User contributions for John d

Results for John d talk block log uploads logs

A user with 4,676 edits. Account created on 5 September 2012.

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20:4920:49, 11 February 2022 diff hist +53 m ICP Etch 2 (Panasonic E626I) →Recipes Tag: Visual edit
20:4820:48, 11 February 2022 diff hist +97 ICP Etch 1 (Panasonic E646V) separate process control section/link Tag: Visual edit
20:4720:47, 11 February 2022 diff hist +59 ICP Etch 2 (Panasonic E626I) →Recipes: separate Process Control section/link Tag: Visual edit
20:2420:24, 11 February 2022 diff hist +31 Test Data of etching SiO2 with CHF3/CF4 minor update to diamond experiemnt comment. Tag: Visual edit
20:2320:23, 11 February 2022 diff hist −36 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): updated ICP1 and ICP2 with Process Control sections for SiO2 etch tests. Tag: Visual edit
20:2220:22, 11 February 2022 diff hist +252 N MediaWiki:Deletereason-dropdown added common NanoFab reasons for deletion current
20:1920:19, 11 February 2022 diff hist +504 Test Data of etching SiO2 with CHF3/CF4-ICP1 new section :pasted data from CHF3/CF4/O2 etch data
20:1320:13, 11 February 2022 diff hist +22 ICP Etching Recipes →SiO2 Etch Historical Data: reanmed to include tool name Tag: Visual edit
20:1220:12, 11 February 2022 diff hist −37 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): consolidated FL-ICP Prcoess Control data Tag: Visual edit
20:1120:11, 11 February 2022 diff hist +493 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher pasted Ning's 2nd data table, hilighted recipe changes and comment about data being "in progress"
19:2819:28, 11 February 2022 diff hist +1 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: moved historical data to top Tag: Visual edit

19:4619:46, 4 February 2022 diff hist +260 Template:Announcements ASML maintenance

22:2422:24, 1 February 2022 diff hist +3 m Autostep 200 Mask Making Guidance →Mask Layout Tag: Visual edit
22:2322:23, 1 February 2022 diff hist +119 m Autostep 200 Mask Making Guidance →Photomask Ordering Info Tag: Visual edit
17:0017:00, 1 February 2022 diff hist +327 Autostep 200 Mask Making Guidance →Photomask Ordering Info: added info Tag: Visual edit
16:3916:39, 1 February 2022 diff hist +428 Autostep 200 Mask Making Guidance →Alignment Marks: adde Vernier CAD file Tag: Visual edit
16:3716:37, 1 February 2022 diff hist +110 N File:Vernier Template.gds Vernier Registration/Alignment Test structure for lithography. Designed by Demis D. John, 2008.
16:0316:03, 1 February 2022 diff hist −14 m Stepper 2 (AutoStep 200) →Process Information Tag: Visual edit
00:3000:30, 1 February 2022 diff hist +185 Autostep 200 Mask Making Guidance →Mask Layout: 2nd attempt to describe Shutter positioning Tag: Visual edit
00:1900:19, 1 February 2022 diff hist +352 Autostep 200 Mask Making Guidance →Mask Layout: 1st attempt at describing shutter blades Tag: Visual edit
00:0000:00, 1 February 2022 diff hist +172 Autostep 200 Mask Making Guidance →Mask Layout / Alignment Marks: split into Mask layout separate section Tag: Visual edit

23:5523:55, 31 January 2022 diff hist +30 Autostep 200 Troubleshooting and Recovery →What to do if you cannot undo the problem or need some help: link to each contact, update to use "Report tool issue' button on SUM current Tag: Visual edit

00:0900:09, 29 January 2022 diff hist +358 m Oxford ICP Etcher - Process Control Data →Data - InP Ridge Etch (Oxford ICP Etcher) Tag: Visual edit
00:0600:06, 29 January 2022 diff hist +805 Oxford ICP Etcher - Process Control Data updated tables, split into "sample size dpeendence" table Tag: Visual edit

04:4304:43, 28 January 2022 diff hist +356 MLA150 - Troubleshooting →Solutions for small substrates: added THomas Messner's solution: disable Overview Camera before starting exposure Tag: Visual edit

18:4218:42, 24 January 2022 diff hist −26 Packaging Recipes →Blade Exposure Calculation: image size increase Tag: Visual edit: Switched
18:1318:13, 24 January 2022 diff hist +40 m Packaging Recipes →Anatomy of a Blade Tag: Visual edit

17:5517:55, 21 January 2022 diff hist +346 Atomic Layer Deposition Recipes →Temperature: mentioned "thermal" and slower rate. Tag: Visual edit
17:5317:53, 21 January 2022 diff hist +661 Atomic Layer Deposition Recipes →Al2O3 deposition (ALD CHAMBER 3): added terms "Plasma/Thermal/Ozone". Also added Chamber 1 Al2O3 Tag: Visual edit

06:1206:12, 14 January 2022 diff hist +133 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): GaN ALE section started Tag: Visual edit
06:1106:11, 14 January 2022 diff hist +238 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): NOTE: Rates in these 2021-09 characterizations are lower than current due to a software timing bug, fixed in 2022-01 Tag: Visual edit
06:0906:09, 14 January 2022 diff hist +174 Oxford ICP Etcher - Process Control Data described basic 'fab process Tag: Visual edit
06:0706:07, 14 January 2022 diff hist +55 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher) Tag: Visual edit
06:0506:05, 14 January 2022 diff hist −17 m Oxford ICP Etcher - Process Control Data removed WIP Tag: Visual edit
06:0306:03, 14 January 2022 diff hist +56 Oxford ICP Etcher - Process Control Data added SEM images for Jan 11th-12th cals Tag: Visual edit
06:0306:03, 14 January 2022 diff hist +36 N File:2022-01-12 Oxford InP Ridge Wiki Post - Cal03.pdf Oxford ICP Etch Cals03 current
05:5505:55, 14 January 2022 diff hist +33 N File:2022-01-12 Oxford InP Ridge Wiki Post - Cal02.pdf Oxford ICP Cal SEMs current
05:5105:51, 14 January 2022 diff hist +161 Oxford ICP Etcher - Process Control Data →Data - InP Ridge Etch (Oxford ICP Etcher): updated SEM 1 Tag: Visual edit
05:5105:51, 14 January 2022 diff hist +38 N File:2022-01-11 Oxford InP Ridge Wiki Post - Cal01.pdf Oxford ICP Etch Cal SEMs current
04:4304:43, 14 January 2022 diff hist +84 m MLA150 - Troubleshooting →Unexpected Behavior Tag: Visual edit
04:4104:41, 14 January 2022 diff hist +271 MLA150 - Troubleshooting →Out Of Focus Exposures: Boris’ solutionnadded Tag: Visual edit

21:2421:24, 13 January 2022 diff hist −1,009 Oxford ICP Etcher - Process Control Data in progress InP Ridge Etch Tag: Visual edit
21:2121:21, 13 January 2022 diff hist +1,617 N Oxford ICP Etcher - Process Control Data pasted ICP2 data table Tag: Visual edit: Switched
21:2121:21, 13 January 2022 diff hist +156 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Recipes: link to Process Control Data Tag: Visual edit
21:2021:20, 13 January 2022 diff hist +3 ICP Etching Recipes →Historical Data (Oxford ICP Etcher): changed to "process control data" Tag: Visual edit
21:1821:18, 13 January 2022 diff hist +208 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): link to Historical Data Tag: Visual edit

22:1422:14, 12 January 2022 diff hist +136 Frequently Asked Questions →Cell Phone Calls: mention eduroam network Tag: Visual edit
22:1122:11, 12 January 2022 diff hist +189 m Frequently Asked Questions →Forcing Calls to use Wifi (not Cellular) Tag: Visual edit
22:0822:08, 12 January 2022 diff hist +441 Frequently Asked Questions →Forcing Calls to use Wifi (not Cellular): additional troubleshooting Tag: Visual edit

22:2222:22, 11 January 2022 diff hist −42 Stepper 3 (ASML DUV) →Operating Procedures: merged Troubleshooting into Operating Procedures Tag: Visual edit

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