User contributions for Sawyer l

22 March 2022

• 18:2818:28, 22 March 2022 diff hist 0‎ N File:EB2 SOP Rev D.pdf ‎No edit summary current

21 March 2022

• 20:4820:48, 21 March 2022 diff hist −5‎ Dicing Saw (ADT) ‎ SOP rev Tag: Visual edit
• 20:4820:48, 21 March 2022 diff hist 0‎ N File:ADT SOP Rev E.pdf ‎No edit summary current

1 March 2022

• 15:4515:45, 1 March 2022 diff hist +347‎ Contact Aligner (SUSS MA-6) ‎ Added chuck and mask sizes Tag: Visual edit

2 February 2022

• 21:1021:10, 2 February 2022 diff hist −5‎ Maskless Aligner (Heidelberg MLA150) ‎ SOP update Tag: Visual edit
• 21:0921:09, 2 February 2022 diff hist 0‎ N File:MLA150 SOP Rev K (LS).pdf ‎No edit summary current

5 January 2022

• 18:1618:16, 5 January 2022 diff hist +4‎ Maskless Aligner (Heidelberg MLA150) ‎ SOP update Tag: Visual edit
• 18:1518:15, 5 January 2022 diff hist 0‎ N File:MLA150 SOP Rev J (LS).docx.pdf ‎No edit summary current

3 January 2022

• 17:5917:59, 3 January 2022 diff hist −3‎ E-Beam 2 (Custom) ‎ Updated SOP Tag: Visual edit
• 17:5817:58, 3 January 2022 diff hist 0‎ N File:EB2 SOP Rev C.pdf ‎No edit summary current
• 17:2517:25, 3 January 2022 diff hist −20‎ Plasma Activation (EVG 810) ‎ SOP update Tag: Visual edit
• 17:2417:24, 3 January 2022 diff hist 0‎ N File:EVG Plasma Activation SOP Rev C.pdf ‎No edit summary current

11 September 2021

• 15:2115:21, 11 September 2021 diff hist +53‎ m ICP Etch 1 (Panasonic E646V) ‎ Updated system description Tag: Visual edit: Switched
• 15:1515:15, 11 September 2021 diff hist −88‎ Stepper 2 (AutoStep 200) ‎ Removed link to deleted shutdown startup page Tag: Visual edit

10 September 2021

• 18:3818:38, 10 September 2021 diff hist +4‎ ICP Etch 1 (Panasonic E646V) ‎No edit summary Tag: Visual edit
• 18:3718:37, 10 September 2021 diff hist +240‎ ICP Etch 1 (Panasonic E646V) ‎ Updated gas changes SOPs, added Rules link Tag: Visual edit
• 18:3318:33, 10 September 2021 diff hist +198‎ ICP Etch 1 (Panasonic E646V) ‎ Updated Gas Change SOP Tag: Visual edit
• 18:2818:28, 10 September 2021 diff hist 0‎ N File:ICP -1 Rules & Important Notes.pdf ‎No edit summary current
• 18:2718:27, 10 September 2021 diff hist 0‎ N File:ICP -1 Gas Change N2-He-N2.pdf ‎No edit summary
• 18:2718:27, 10 September 2021 diff hist 0‎ N File:ICP -1 Gas Change CHF3-Ar-CHF3.pdf ‎No edit summary current
• 18:2618:26, 10 September 2021 diff hist 0‎ N File:ICP -1 Gas Change CF4-SF6-CF4.pdf ‎No edit summary
• 18:1918:19, 10 September 2021 diff hist −14‎ ICP Etch 1 (Panasonic E646V) ‎ Updated tool About section Tag: Visual edit

9 September 2021

• 19:4019:40, 9 September 2021 diff hist −23‎ Dicing Saw (ADT) ‎ Updated SOP Rev Tag: Visual edit
• 19:3919:39, 9 September 2021 diff hist 0‎ N File:ADT SOP Rev D.pdf ‎No edit summary current

3 September 2021

• 17:2517:25, 3 September 2021 diff hist −2‎ m E-Beam 2 (Custom) ‎ Changed tool owner

23 August 2021

• 21:0821:08, 23 August 2021 diff hist 0‎ File:ADT Dicing Saw SOP Rev C.pdf ‎ Sawyer l uploaded a new version of File:ADT Dicing Saw SOP Rev C.pdf current

20 August 2021

• 16:0116:01, 20 August 2021 diff hist +4‎ Dicing Saw (ADT) ‎ SOP Rev Tag: Visual edit
• 16:0016:00, 20 August 2021 diff hist 0‎ N File:ADT Dicing Saw SOP Rev C.pdf ‎No edit summary

11 August 2021

• 21:0821:08, 11 August 2021 diff hist −6‎ Contact Aligner (SUSS MA-6) ‎ →‎Documentation Tag: Visual edit
• 21:0821:08, 11 August 2021 diff hist 0‎ File:MA-6 Exp Mode Visual Aid.pdf ‎ Sawyer l uploaded a new version of File:MA-6 Exp Mode Visual Aid.pdf current
• 21:0821:08, 11 August 2021 diff hist −3‎ Contact Aligner (SUSS MA-6) ‎ →‎Documentation Tag: Visual edit
• 21:0721:07, 11 August 2021 diff hist +100‎ Contact Aligner (SUSS MA-6) ‎ →‎Documentation: Added BA6 SOP Tag: Visual edit
• 21:0521:05, 11 August 2021 diff hist 0‎ N File:BA6 SOP Rev A.pdf ‎No edit summary current

10 August 2021

• 21:1921:19, 10 August 2021 diff hist +153‎ Dicing Saw (ADT) ‎ →‎Operating Procedures: Add link to updated SOP Tag: Visual edit
• 21:1721:17, 10 August 2021 diff hist 0‎ N File:ADT Dicing Saw SOP Rev B.pdf ‎No edit summary current

20 July 2021

• 16:0816:08, 20 July 2021 diff hist −3‎ Dicing Saw (ADT) ‎ Contact info Tag: Visual edit
• 15:3415:34, 20 July 2021 diff hist +125‎ Stepper 2 (AutoStep 200) ‎ →‎Staff Procedures: Added restart SOP pdf link Tag: Visual edit
• 15:3315:33, 20 July 2021 diff hist 0‎ N File:Autostep 200 Restart SOP June 2021.pdf ‎No edit summary current

19 July 2021

• 20:1920:19, 19 July 2021 diff hist +124‎ Maskless Aligner (Heidelberg MLA150) ‎ →‎Design Tools/Info: Added substrate template rules visual aid Tag: Visual edit
• 20:1820:18, 19 July 2021 diff hist 0‎ N File:MLA150 Substrate Template Rules.pdf ‎No edit summary current

13 July 2021

• 17:2417:24, 13 July 2021 diff hist −31‎ Contact Aligner (SUSS MA-6) ‎ Updated SOP with BSA steps, removed old BSA steps Tag: Visual edit
• 17:2217:22, 13 July 2021 diff hist 0‎ N File:MA-6 SOP Rev D.pdf ‎No edit summary

26 May 2021

• 20:1020:10, 26 May 2021 diff hist 0‎ Maskless Aligner (Heidelberg MLA150) ‎ Updated SOP Tag: Visual edit
• 20:0920:09, 26 May 2021 diff hist 0‎ N File:MLA150 SOP Rev I (LS).pdf ‎No edit summary current

19 April 2021

• 17:3117:31, 19 April 2021 diff hist +72‎ Film Stress (Tencor Flexus) ‎ →‎Documentation: Added SOP link Tag: Visual edit
• 17:3117:31, 19 April 2021 diff hist 0‎ N File:Tencor FLX SOP Rev B.pdf ‎No edit summary current
• 17:2917:29, 19 April 2021 diff hist +66‎ Film Stress (Tencor Flexus) ‎ Added Documentation Section Tag: Visual edit
• 17:0617:06, 19 April 2021 diff hist +68‎ Film Stress (Tencor Flexus) ‎ →‎Equipment Specifications Tag: Visual edit
• 16:3316:33, 19 April 2021 diff hist +381‎ Film Stress (Tencor Flexus) ‎ Updating Equipment Specifications Tag: Visual edit

16 March 2021

• 15:3215:32, 16 March 2021 diff hist 0‎ Maskless Aligner (Heidelberg MLA150) ‎ Updated SOP Tag: Visual edit