User contributions for Sawyer l

23 November 2022

• 19:2919:29, 23 November 2022 diff hist 0‎ N File:ADT SOP Rev G.pdf ‎No edit summary current

18 October 2022

• 14:2214:22, 18 October 2022 diff hist +183‎ Contact Aligner (SUSS MA-6) ‎ Added additional tool specs, including BSA objective spacing Tag: Visual edit

7 October 2022

• 17:3817:38, 7 October 2022 diff hist +5‎ Maskless Aligner (Heidelberg MLA150) ‎ Updated SOP Tag: Visual edit
• 17:3717:37, 7 October 2022 diff hist 0‎ N File:MLA150 SOP Rev L (LS).docx.pdf ‎No edit summary current

15 September 2022

• 19:0619:06, 15 September 2022 diff hist 0‎ Plasma Activation (EVG 810) ‎ Updated SOP Tag: Visual edit
• 19:0619:06, 15 September 2022 diff hist 0‎ N File:EVG Plasma Activation SOP Rev D.pdf ‎No edit summary current

8 September 2022

• 21:3521:35, 8 September 2022 diff hist 0‎ E-Beam 2 (Custom) ‎ Updated photo Tag: Visual edit
• 21:1121:11, 8 September 2022 diff hist 0‎ N File:IMG 5388.jpg ‎No edit summary current
• 17:0917:09, 8 September 2022 diff hist −2‎ UV Ozone Reactor ‎ Updated tool template Tag: Visual edit
• 17:0717:07, 8 September 2022 diff hist +404‎ UV Ozone Reactor ‎ About section updated Tag: Visual edit

6 September 2022

• 15:4215:42, 6 September 2022 diff hist +270‎ E-Beam 2 (Custom) ‎ Tool description/specs Tag: Visual edit

31 August 2022

• 20:3220:32, 31 August 2022 diff hist +224‎ Template:Announcements ‎ Add MLA service info

25 August 2022

• 20:2820:28, 25 August 2022 diff hist −9‎ ICP Etch 1 (Panasonic E646V) ‎No edit summary Tag: Visual edit
• 20:2820:28, 25 August 2022 diff hist 0‎ N File:ICP -1 Wafer Type Change.pdf ‎No edit summary current
• 18:2118:21, 25 August 2022 diff hist +121‎ ICP Etch 1 (Panasonic E646V) ‎ Add wafer type change SOP Tag: Visual edit

7 July 2022

• 16:0616:06, 7 July 2022 diff hist 0‎ Dicing Saw (ADT) ‎ updated SOP Tag: Visual edit
• 16:0516:05, 7 July 2022 diff hist 0‎ N File:ADT SOP Rev F.pdf ‎No edit summary current

26 April 2022

• 18:0218:02, 26 April 2022 diff hist +117‎ Dicing Saw (ADT) ‎ Add tape station SOP Tag: Visual edit
• 18:0118:01, 26 April 2022 diff hist 0‎ N File:Tape Station SOP Rev A.pdf ‎No edit summary current

22 March 2022

• 18:2918:29, 22 March 2022 diff hist 0‎ E-Beam 2 (Custom) ‎ SOP rev Tag: Visual edit
• 18:2818:28, 22 March 2022 diff hist 0‎ N File:EB2 SOP Rev D.pdf ‎No edit summary current

21 March 2022

• 20:4820:48, 21 March 2022 diff hist −5‎ Dicing Saw (ADT) ‎ SOP rev Tag: Visual edit
• 20:4820:48, 21 March 2022 diff hist 0‎ N File:ADT SOP Rev E.pdf ‎No edit summary current

1 March 2022

• 15:4515:45, 1 March 2022 diff hist +347‎ Contact Aligner (SUSS MA-6) ‎ Added chuck and mask sizes Tag: Visual edit

2 February 2022

• 21:1021:10, 2 February 2022 diff hist −5‎ Maskless Aligner (Heidelberg MLA150) ‎ SOP update Tag: Visual edit
• 21:0921:09, 2 February 2022 diff hist 0‎ N File:MLA150 SOP Rev K (LS).pdf ‎No edit summary current

5 January 2022

• 18:1618:16, 5 January 2022 diff hist +4‎ Maskless Aligner (Heidelberg MLA150) ‎ SOP update Tag: Visual edit
• 18:1518:15, 5 January 2022 diff hist 0‎ N File:MLA150 SOP Rev J (LS).docx.pdf ‎No edit summary current

3 January 2022

• 17:5917:59, 3 January 2022 diff hist −3‎ E-Beam 2 (Custom) ‎ Updated SOP Tag: Visual edit
• 17:5817:58, 3 January 2022 diff hist 0‎ N File:EB2 SOP Rev C.pdf ‎No edit summary current
• 17:2517:25, 3 January 2022 diff hist −20‎ Plasma Activation (EVG 810) ‎ SOP update Tag: Visual edit
• 17:2417:24, 3 January 2022 diff hist 0‎ N File:EVG Plasma Activation SOP Rev C.pdf ‎No edit summary current

11 September 2021

• 15:2115:21, 11 September 2021 diff hist +53‎ m ICP Etch 1 (Panasonic E646V) ‎ Updated system description Tag: Visual edit: Switched
• 15:1515:15, 11 September 2021 diff hist −88‎ Stepper 2 (AutoStep 200) ‎ Removed link to deleted shutdown startup page Tag: Visual edit

10 September 2021

• 18:3818:38, 10 September 2021 diff hist +4‎ ICP Etch 1 (Panasonic E646V) ‎No edit summary Tag: Visual edit
• 18:3718:37, 10 September 2021 diff hist +240‎ ICP Etch 1 (Panasonic E646V) ‎ Updated gas changes SOPs, added Rules link Tag: Visual edit
• 18:3318:33, 10 September 2021 diff hist +198‎ ICP Etch 1 (Panasonic E646V) ‎ Updated Gas Change SOP Tag: Visual edit
• 18:2818:28, 10 September 2021 diff hist 0‎ N File:ICP -1 Rules & Important Notes.pdf ‎No edit summary current
• 18:2718:27, 10 September 2021 diff hist 0‎ N File:ICP -1 Gas Change N2-He-N2.pdf ‎No edit summary
• 18:2718:27, 10 September 2021 diff hist 0‎ N File:ICP -1 Gas Change CHF3-Ar-CHF3.pdf ‎No edit summary current
• 18:2618:26, 10 September 2021 diff hist 0‎ N File:ICP -1 Gas Change CF4-SF6-CF4.pdf ‎No edit summary
• 18:1918:19, 10 September 2021 diff hist −14‎ ICP Etch 1 (Panasonic E646V) ‎ Updated tool About section Tag: Visual edit

9 September 2021

• 19:4019:40, 9 September 2021 diff hist −23‎ Dicing Saw (ADT) ‎ Updated SOP Rev Tag: Visual edit
• 19:3919:39, 9 September 2021 diff hist 0‎ N File:ADT SOP Rev D.pdf ‎No edit summary current

3 September 2021

• 17:2517:25, 3 September 2021 diff hist −2‎ m E-Beam 2 (Custom) ‎ Changed tool owner

23 August 2021

• 21:0821:08, 23 August 2021 diff hist 0‎ File:ADT Dicing Saw SOP Rev C.pdf ‎ Sawyer l uploaded a new version of File:ADT Dicing Saw SOP Rev C.pdf current

20 August 2021

• 16:0116:01, 20 August 2021 diff hist +4‎ Dicing Saw (ADT) ‎ SOP Rev Tag: Visual edit
• 16:0016:00, 20 August 2021 diff hist 0‎ N File:ADT Dicing Saw SOP Rev C.pdf ‎No edit summary

11 August 2021

• 21:0821:08, 11 August 2021 diff hist −6‎ Contact Aligner (SUSS MA-6) ‎ →‎Documentation Tag: Visual edit
• 21:0821:08, 11 August 2021 diff hist 0‎ File:MA-6 Exp Mode Visual Aid.pdf ‎ Sawyer l uploaded a new version of File:MA-6 Exp Mode Visual Aid.pdf current