User contributions for Sawyer l

21 March 2023

• 18:5018:50, 21 March 2023 diff hist 0‎ File:ICP -1 Gas Change CF4-SF6-CF4.pdf ‎ Sawyer l uploaded a new version of File:ICP -1 Gas Change CF4-SF6-CF4.pdf current

16 March 2023

• 21:0321:03, 16 March 2023 diff hist −310‎ Template:Announcements ‎No edit summary
• 21:0021:00, 16 March 2023 diff hist 0‎ Dicing Saw (ADT) ‎ SOP Rev Tag: Visual edit
• 20:5920:59, 16 March 2023 diff hist 0‎ N File:ADT SOP Rev H.pdf ‎No edit summary current

10 March 2023

• 15:3615:36, 10 March 2023 diff hist −1‎ RIE 2 (MRC) ‎ SOP rev Tag: Visual edit
• 15:3215:32, 10 March 2023 diff hist 0‎ N File:RIE 2 SOP Rev C.pdf ‎No edit summary current

8 March 2023

• 21:5721:57, 8 March 2023 diff hist +20‎ CAIBE (Oxford Ion Mill) ‎ Update SOP rev Tag: Visual edit
• 21:5621:56, 8 March 2023 diff hist +21‎ Atomic Layer Deposition (Oxford FlexAL) ‎ Update SOP rev current Tag: Visual edit
• 21:5521:55, 8 March 2023 diff hist 0‎ N File:Oxford Cluster Tool Operating Instructions Rev B.pdf ‎No edit summary current

2 March 2023

• 17:2617:26, 2 March 2023 diff hist 0‎ File:EB2 SOP Rev F.pdf ‎ Sawyer l uploaded a new version of File:EB2 SOP Rev F.pdf current

15 February 2023

• 21:3821:38, 15 February 2023 diff hist −2‎ E-Beam 2 (Custom) ‎ SOP updated Tag: Visual edit
• 21:3721:37, 15 February 2023 diff hist 0‎ N File:EB2 SOP Rev F.pdf ‎No edit summary

8 February 2023

• 18:3118:31, 8 February 2023 diff hist −6‎ Plasma Clean (YES EcoClean) ‎ SOP rev (minor) Tag: Visual edit
• 18:3018:30, 8 February 2023 diff hist 0‎ N File:YES SOP Rev E.pdf ‎No edit summary current

23 November 2022

• 19:3019:30, 23 November 2022 diff hist 0‎ Dicing Saw (ADT) ‎ Updated SOP Tag: Visual edit
• 19:2919:29, 23 November 2022 diff hist 0‎ N File:ADT SOP Rev G.pdf ‎No edit summary current

18 October 2022

• 14:2214:22, 18 October 2022 diff hist +183‎ Contact Aligner (SUSS MA-6) ‎ Added additional tool specs, including BSA objective spacing Tag: Visual edit

7 October 2022

• 17:3817:38, 7 October 2022 diff hist +5‎ Maskless Aligner (Heidelberg MLA150) ‎ Updated SOP Tag: Visual edit
• 17:3717:37, 7 October 2022 diff hist 0‎ N File:MLA150 SOP Rev L (LS).docx.pdf ‎No edit summary current

15 September 2022

• 19:0619:06, 15 September 2022 diff hist 0‎ Plasma Activation (EVG 810) ‎ Updated SOP Tag: Visual edit
• 19:0619:06, 15 September 2022 diff hist 0‎ N File:EVG Plasma Activation SOP Rev D.pdf ‎No edit summary current

8 September 2022

• 21:3521:35, 8 September 2022 diff hist 0‎ E-Beam 2 (Custom) ‎ Updated photo Tag: Visual edit
• 21:1121:11, 8 September 2022 diff hist 0‎ N File:IMG 5388.jpg ‎No edit summary current
• 17:0917:09, 8 September 2022 diff hist −2‎ UV Ozone Reactor ‎ Updated tool template Tag: Visual edit
• 17:0717:07, 8 September 2022 diff hist +404‎ UV Ozone Reactor ‎ About section updated Tag: Visual edit

6 September 2022

• 15:4215:42, 6 September 2022 diff hist +270‎ E-Beam 2 (Custom) ‎ Tool description/specs Tag: Visual edit

31 August 2022

• 20:3220:32, 31 August 2022 diff hist +224‎ Template:Announcements ‎ Add MLA service info

25 August 2022

• 20:2820:28, 25 August 2022 diff hist −9‎ ICP Etch 1 (Panasonic E646V) ‎No edit summary Tag: Visual edit
• 20:2820:28, 25 August 2022 diff hist 0‎ N File:ICP -1 Wafer Type Change.pdf ‎No edit summary current
• 18:2118:21, 25 August 2022 diff hist +121‎ ICP Etch 1 (Panasonic E646V) ‎ Add wafer type change SOP Tag: Visual edit

7 July 2022

• 16:0616:06, 7 July 2022 diff hist 0‎ Dicing Saw (ADT) ‎ updated SOP Tag: Visual edit
• 16:0516:05, 7 July 2022 diff hist 0‎ N File:ADT SOP Rev F.pdf ‎No edit summary current

26 April 2022

• 18:0218:02, 26 April 2022 diff hist +117‎ Dicing Saw (ADT) ‎ Add tape station SOP Tag: Visual edit
• 18:0118:01, 26 April 2022 diff hist 0‎ N File:Tape Station SOP Rev A.pdf ‎No edit summary current

22 March 2022

• 18:2918:29, 22 March 2022 diff hist 0‎ E-Beam 2 (Custom) ‎ SOP rev Tag: Visual edit
• 18:2818:28, 22 March 2022 diff hist 0‎ N File:EB2 SOP Rev D.pdf ‎No edit summary current

21 March 2022

• 20:4820:48, 21 March 2022 diff hist −5‎ Dicing Saw (ADT) ‎ SOP rev Tag: Visual edit
• 20:4820:48, 21 March 2022 diff hist 0‎ N File:ADT SOP Rev E.pdf ‎No edit summary current

1 March 2022

• 15:4515:45, 1 March 2022 diff hist +347‎ Contact Aligner (SUSS MA-6) ‎ Added chuck and mask sizes Tag: Visual edit

2 February 2022

• 21:1021:10, 2 February 2022 diff hist −5‎ Maskless Aligner (Heidelberg MLA150) ‎ SOP update Tag: Visual edit
• 21:0921:09, 2 February 2022 diff hist 0‎ N File:MLA150 SOP Rev K (LS).pdf ‎No edit summary current

5 January 2022

• 18:1618:16, 5 January 2022 diff hist +4‎ Maskless Aligner (Heidelberg MLA150) ‎ SOP update Tag: Visual edit
• 18:1518:15, 5 January 2022 diff hist 0‎ N File:MLA150 SOP Rev J (LS).docx.pdf ‎No edit summary current

3 January 2022

• 17:5917:59, 3 January 2022 diff hist −3‎ E-Beam 2 (Custom) ‎ Updated SOP Tag: Visual edit
• 17:5817:58, 3 January 2022 diff hist 0‎ N File:EB2 SOP Rev C.pdf ‎No edit summary current
• 17:2517:25, 3 January 2022 diff hist −20‎ Plasma Activation (EVG 810) ‎ SOP update Tag: Visual edit
• 17:2417:24, 3 January 2022 diff hist 0‎ N File:EVG Plasma Activation SOP Rev C.pdf ‎No edit summary current

11 September 2021

• 15:2115:21, 11 September 2021 diff hist +53‎ m ICP Etch 1 (Panasonic E646V) ‎ Updated system description Tag: Visual edit: Switched
• 15:1515:15, 11 September 2021 diff hist −88‎ Stepper 2 (AutoStep 200) ‎ Removed link to deleted shutdown startup page Tag: Visual edit

10 September 2021

• 18:3818:38, 10 September 2021 diff hist +4‎ ICP Etch 1 (Panasonic E646V) ‎No edit summary Tag: Visual edit