User contributions for John d

Results for John d talk block log uploads logs

A user with 4,672 edits. Account created on 5 September 2012.

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22:3322:33, 28 August 2023 diff hist +42 Stepper 2 (AutoStep 200) Operating Procedures →Other Useful links for this system:: explained Quick vs Detailed Tag: Visual edit
21:5321:53, 28 August 2023 diff hist +9 m ICP Etching Recipes →Through Silicon Via etch (DSEiii) Tag: Visual edit
21:5221:52, 28 August 2023 diff hist +164 ICP Etching Recipes →Through Silicon Via etch (DSEiii): added link to publication policy Tag: Visual edit
21:4321:43, 28 August 2023 diff hist +25 ICP Etching Recipes →Through Silicon Via etch (DSEiii): mention PR thickness requirement Tag: Visual edit
21:3621:36, 28 August 2023 diff hist +26 Stepper 2 (AutoStep 200) Operating Procedures heading for useful links Tag: Visual edit
21:3421:34, 28 August 2023 diff hist +251 Stepper 2 (AutoStep 200) Operating Procedures links to other pages at top Tag: Visual edit

00:1600:16, 22 August 2023 diff hist +4 m Frequently Asked Questions →Authorship on Publications Tag: Visual edit
00:1600:16, 22 August 2023 diff hist +149 Frequently Asked Questions →Publications acknowledging the Nanofab: link to LIGO papers with >1000 authors Tag: Visual edit

18:1418:14, 20 August 2023 diff hist +84 Stepper 3 (ASML DUV) →Process Information: added maximu. Dose & disallowed EVL PR’s Tag: Visual edit
18:0818:08, 20 August 2023 diff hist +177 Stepper 3 (ASML DUV) Added KrF and some more info on piece part, and removed unnecessary heading Tag: Visual edit

17:0717:07, 15 August 2023 diff hist +10 MediaWiki:Sidebar Added link to process control data pages
17:0417:04, 15 August 2023 diff hist +134 Process Group - Process Control Data move TOC below intro Tag: Visual edit: Switched
17:0317:03, 15 August 2023 diff hist +139 Process Group - Process Control Data description of process control data
16:5816:58, 15 August 2023 diff hist +61 MediaWiki:Sidebar Added link to process control data pages

16:5616:56, 9 August 2023 diff hist +183 MLA150 - Troubleshooting →Greyscale Lithography Limitations: updated that X-Y alignment may work, just not rotation. Tag: Visual edit
14:1414:14, 9 August 2023 diff hist −16 Oxygen Plasma System Recipes →O2-Only Recipes: removed "To be added", as these recipes are currently on the tool Tag: Visual edit
00:0700:07, 9 August 2023 diff hist +443 Sputtering Recipes added Sputter 3 ignition issues Tag: Visual edit

03:4203:42, 8 August 2023 diff hist +69 Maskless Aligner (Heidelberg MLA150) →Video Trainings: added training procedure Tag: Visual edit

19:5019:50, 7 August 2023 diff hist +119 Stepper 3 (ASML DUV) added minimum wafer thickness Tag: Visual edit
19:4719:47, 7 August 2023 diff hist +89 m Wafer Bonder (Logitech WBS7) →Recipes: minro note of what is in the recipe sections Tag: Visual edit

20:5420:54, 4 August 2023 diff hist +67 Maskless Aligner (Heidelberg MLA150) →About: link to greyscale limitations page. Tag: Visual edit

22:4022:40, 2 August 2023 diff hist +630 Template:Announcements mla150 annc

17:0417:04, 1 August 2023 diff hist +146 Oxygen Plasma System Recipes →O2-Only Recipes: note on dim plasma Tag: Visual edit

21:3221:32, 30 July 2023 diff hist +1,820 MLA150 - Troubleshooting Greyscale limitations Tag: Visual edit

22:5722:57, 20 July 2023 diff hist +172 Maskless Aligner (Heidelberg MLA150) →Video Trainings: note on training proceudre Tag: Visual edit

23:5023:50, 18 July 2023 diff hist +13 Field Emission SEM 2 (JEOL IT800SHL) →Operating Procedures: uplaoded SOP v08.12 from Mitchell Tag: Visual edit
23:4923:49, 18 July 2023 diff hist +40 N File:JEOL 7600F UserManual.pdf v08.12, from Bill Mitchell current

23:0923:09, 17 July 2023 diff hist −19 m Oxygen Plasma System Recipes →O2 Recipe Characterization Tag: Visual edit
23:0223:02, 17 July 2023 diff hist +1,512 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): updates, explained Gold oxidation etc. Placeholders for recipe names Tag: Visual edit
22:4022:40, 17 July 2023 diff hist −8 Dry Etching Recipes deleted extra blank column, linked Technics & YES Ecoclean to recipes page. Tag: Visual edit

01:4801:48, 9 July 2023 diff hist +155 Packaging Recipes →Photoresist: added to use squirt bottles. Tag: Visual edit

03:4303:43, 8 July 2023 diff hist +18 UCSB NanoFab Microscope Training →Measurements Tag: Visual edit

12:2912:29, 28 June 2023 diff hist +1 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Exposing with corrected Focus Offset via IQC Tag: Visual edit
11:2111:21, 28 June 2023 diff hist +220 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Important Warnings: explain how to bring warnings window to front Tag: Visual edit
11:1711:17, 28 June 2023 diff hist +160 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: added subheading for “exposing with IQC correction” Tag: Visual edit

19:1019:10, 23 June 2023 diff hist +202 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Documentation: link to Manual edge bead removal page Tag: Visual edit
19:0819:08, 23 June 2023 diff hist +96 Photolithography - Manual Edge-Bead Removal Techniques →EBR100 Swabbing: minor description about ebr wicking / drying Tag: Visual edit

22:4522:45, 21 June 2023 diff hist +64 Rapid Thermal Processor (SSI Solaris 150) Added “RTA” and abbreviations for searchability Tag: Visual edit

20:1320:13, 20 June 2023 diff hist +6 m Photolithography - Manual Edge-Bead Removal Techniques →Lithographic Edge Bead Removal Tag: Visual edit

05:3705:37, 16 June 2023 diff hist +346 m Wet Etching Recipes table: link to Piranha section Tag: Visual edit
05:3205:32, 16 June 2023 diff hist −1,111 m Wet Etching Recipes →Organic removal: headings for Organics Removal section Tag: Visual edit
05:1505:15, 16 June 2023 diff hist +6 Wet Etching Recipes →Table of Wet Etching Recipes: InGaAs exothermic comment Tag: Visual edit
05:1405:14, 16 June 2023 diff hist +97 Wet Etching Recipes →Table of Wet Etching Recipes: Added InP & InGaAs selective etches for stop-etch Tag: Visual edit
04:3304:33, 16 June 2023 diff hist −238 Wet Etching Recipes →Table of Wet Etching Recipes: added selective substrate removal recipes for GaAs/AlGaAs (from Garrett Cole), oxide removal dips for InP, GaAs (from memory) Tag: Visual edit

17:2717:27, 15 June 2023 diff hist +153 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #1: Metals: added BDEAS recipe - needs more info Tag: Visual edit

21:0121:01, 14 June 2023 diff hist +944 Direct-Write Lithography Recipes →Greyscale Lithography (MLA150): adde dgresyscale starter process Tag: Visual edit
20:5220:52, 14 June 2023 diff hist +232 Direct-Write Lithography Recipes →Positive Resist (MLA150): explain rehydration step Tag: Visual edit
20:3820:38, 14 June 2023 diff hist +219 Direct-Write Lithography Recipes →Positive Resist (MLA150): added SPR220-7.0, from Lubin greyscale project Tag: Visual edit
20:2320:23, 14 June 2023 diff hist +1 Template:Announcements →NanoFan Lab is UP: typo

23:0523:05, 12 June 2023 diff hist +61 Wet Benches added NEVER heat: ISO, Toluene etc. Tag: Visual edit

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