User contributions for Biljana

15 December 2023

• 17:5717:57, 15 December 2023 diff hist +1 PECVD Recipes →=SiN deposition (PECVD #2)
• 17:5517:55, 15 December 2023 diff hist +195 PECVD Recipes →SiN deposition (PECVD #2)
• 17:5317:53, 15 December 2023 diff hist +4 PECVD Recipes →SiO2 deposition (PECVD #2)
• 17:5217:52, 15 December 2023 diff hist +130 PECVD Recipes →SiO2 deposition (PECVD #2)
• 17:3817:38, 15 December 2023 diff hist +1 PECVD Recipes →SiO2 deposition (PECVD #2)
• 17:3617:36, 15 December 2023 diff hist +49 PECVD Recipes →SiO2 deposition (PECVD #2): New recipe from Nov. 2023 Tag: Visual edit

13 September 2023

• 20:3920:39, 13 September 2023 diff hist +627 Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses Added info for a new shim current Tag: Visual edit
• 20:1720:17, 13 September 2023 diff hist +39 Stepper 2 (Autostep 200) - Chuck Selection Adding a new chuck current Tag: Visual edit

18 January 2023

• 23:4923:49, 18 January 2023 diff hist +226 PECVD Recipes →Low Stress Si3N4 [ICP-PECVD]
• 23:4823:48, 18 January 2023 diff hist +208 PECVD Recipes →Si3N4 [ICP-PECVD]
• 23:4723:47, 18 January 2023 diff hist +219 PECVD Recipes →High Deposition Rate SiO2 [ICP-PECVD]
• 23:4623:46, 18 January 2023 diff hist +8 PECVD Recipes →Low Deposition Rate SiO2 [ICP-PECVD]
• 23:4523:45, 18 January 2023 diff hist +212 PECVD Recipes →Low Deposition Rate SiO2 [ICP-PECVD]

14 June 2022

• 00:3000:30, 14 June 2022 diff hist −159 PECVD Recipes →SiO2 deposition (PECVD #1)
• 00:2900:29, 14 June 2022 diff hist +159 PECVD Recipes →SiO2 deposition (PECVD #1)

13 June 2022

• 21:3221:32, 13 June 2022 diff hist −2 PECVD Recipes →SiO2 deposition (PECVD #1)
• 21:3121:31, 13 June 2022 diff hist +2 PECVD Recipes →SiO2 deposition (PECVD #1)
• 21:3021:30, 13 June 2022 diff hist −156 PECVD Recipes →SiO2 deposition (PECVD #1)
• 21:2821:28, 13 June 2022 diff hist 0 PECVD Recipes →SiO2 deposition (PECVD #1)
• 21:2721:27, 13 June 2022 diff hist +2 PECVD Recipes →SiO2 deposition (PECVD #1)
• 21:2621:26, 13 June 2022 diff hist +156 PECVD Recipes →SiO2 deposition (PECVD #1)

9 September 2021

• 19:1619:16, 9 September 2021 diff hist −293 E-Beam Evaporation Recipes Updated tooling factor for Al in E-beam#4. Tag: Visual edit

7 May 2021

• 16:4716:47, 7 May 2021 diff hist −42 Troubleshooting and Recovery →What to do in case of computer (monitor) freeze-up. current Tag: Visual edit
• 16:4616:46, 7 May 2021 diff hist −7 Troubleshooting and Recovery →What to do in case of computer (monitor) freeze-up. Tag: Visual edit
• 16:4616:46, 7 May 2021 diff hist +151 Troubleshooting and Recovery →What to do in case of computer (monitor) freeze-up.: reboot Tag: Visual edit
• 16:4416:44, 7 May 2021 diff hist +1,766 GCA 6300 Reboot Procedures reboot and shutdwon-start up current Tag: Visual edit
• 16:4016:40, 7 May 2021 diff hist −1,956 Troubleshooting and Recovery →What to do in case of computer (monitor) freeze-up.: rebooring Tag: Visual edit

5 May 2021

• 17:1317:13, 5 May 2021 diff hist +1,447 Troubleshooting and Recovery troublwshooting Tag: Visual edit
• 17:0117:01, 5 May 2021 diff hist +77 GCA 6300 USer Accessible Commands →List of commands: mapping command added current Tag: Visual edit

19 February 2021

• 22:4722:47, 19 February 2021 diff hist +139 PECVD Recipes →PECVD 2 (Advanced Vacuum)
• 22:4522:45, 19 February 2021 diff hist +160 PECVD Recipes →SiO2 deposition (PECVD #2)
• 22:4422:44, 19 February 2021 diff hist +136 PECVD Recipes →Uniformity Data
• 22:4222:42, 19 February 2021 diff hist +142 PECVD Recipes →Uniformity Data
• 22:3722:37, 19 February 2021 diff hist +139 PECVD Recipes →Uniformity Data
• 22:3322:33, 19 February 2021 diff hist +176 PECVD Recipes →SiO2 deposition (PECVD #1)
• 22:3022:30, 19 February 2021 diff hist +139 PECVD Recipes →Historical Particulate Data
• 22:2922:29, 19 February 2021 diff hist +152 PECVD Recipes →Uniformity Data
• 22:2822:28, 19 February 2021 diff hist +140 PECVD Recipes →Uniformity Data

17 February 2021

• 05:3105:31, 17 February 2021 diff hist +136 PECVD Recipes →Thin-Film Properties
• 05:3005:30, 17 February 2021 diff hist +124 PECVD Recipes →Thin-Film Properties
• 05:2905:29, 17 February 2021 diff hist +119 PECVD Recipes →Thin-Film Properties
• 05:2805:28, 17 February 2021 diff hist +126 PECVD Recipes →Thin-Film Properties
• 05:2705:27, 17 February 2021 diff hist +123 PECVD Recipes →Thin-Film Properties
• 05:2505:25, 17 February 2021 diff hist 0 PECVD Recipes →Thin-Film Properties
• 05:2405:24, 17 February 2021 diff hist −2 PECVD Recipes →Thin-Film Properties

13 November 2020

• 21:4321:43, 13 November 2020 diff hist +3,288 N Direct-Write I-Line Recipes MLa recipes- Bilja trying to link R to recipes Tag: Visual edit
• 21:2121:21, 13 November 2020 diff hist +270 Lithography Recipes →Photolithography Recipes
• 21:1621:16, 13 November 2020 diff hist +40 Lithography Recipes →Photolithography Recipes
• 21:1521:15, 13 November 2020 diff hist +40 Lithography Recipes →Photolithography Recipes

3 November 2020

• 23:2923:29, 3 November 2020 diff hist −120 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)