User contributions for Biljana

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22:3622:36, 21 December 2023 diff hist −138‎ Surface Analysis (KLA/Tencor Surfscan) ‎ →‎Standard Recipes
22:3522:35, 21 December 2023 diff hist +13‎ Surface Analysis (KLA/Tencor Surfscan) ‎ →‎Standard Recipes
22:3122:31, 21 December 2023 diff hist +100‎ Surface Analysis (KLA/Tencor Surfscan) ‎ →‎Standard Recipes
22:2922:29, 21 December 2023 diff hist +22‎ Surface Analysis (KLA/Tencor Surfscan) ‎No edit summary Tag: Visual edit: Switched
22:2822:28, 21 December 2023 diff hist +18‎ Surface Analysis (KLA/Tencor Surfscan) ‎ →‎About Tag: Visual edit
22:2722:27, 21 December 2023 diff hist −1‎ Surface Analysis (KLA/Tencor Surfscan) ‎ →‎Documentation

17:2817:28, 20 December 2023 diff hist +1‎ PECVD Recipes ‎No edit summary Tag: Visual edit: Switched

18:1218:12, 15 December 2023 diff hist +2‎ PECVD Recipes ‎ →‎Low-Stress SiN deposition (PECVD #2)
18:1118:11, 15 December 2023 diff hist +1‎ PECVD Recipes ‎ →‎Low-Stress SiN deposition (PECVD #2)
18:1118:11, 15 December 2023 diff hist −6‎ PECVD Recipes ‎ →‎Low-Stress SiN deposition (PECVD #2)
18:0318:03, 15 December 2023 diff hist +6‎ PECVD Recipes ‎ →‎Low-Stress SiN deposition (PECVD #2)
18:0318:03, 15 December 2023 diff hist +2‎ PECVD Recipes ‎ →‎Low-Stress SiN deposition (PECVD #2)
18:0218:02, 15 December 2023 diff hist −4‎ PECVD Recipes ‎ →‎Low-Stress SiN deposition (PECVD #2)
18:0218:02, 15 December 2023 diff hist −4‎ PECVD Recipes ‎ →‎Low-Stress SiN deposition (PECVD #2)
18:0118:01, 15 December 2023 diff hist +5‎ PECVD Recipes ‎ →‎Low-Stress SiN deposition (PECVD #2)
18:0018:00, 15 December 2023 diff hist +222‎ PECVD Recipes ‎ →‎Low-Stress SiN deposition (PECVD #2)
17:5717:57, 15 December 2023 diff hist +1‎ PECVD Recipes ‎ →‎=SiN deposition (PECVD #2)
17:5517:55, 15 December 2023 diff hist +195‎ PECVD Recipes ‎ →‎SiN deposition (PECVD #2)
17:5317:53, 15 December 2023 diff hist +4‎ PECVD Recipes ‎ →‎SiO2 deposition (PECVD #2)
17:5217:52, 15 December 2023 diff hist +130‎ PECVD Recipes ‎ →‎SiO2 deposition (PECVD #2)
17:3817:38, 15 December 2023 diff hist +1‎ PECVD Recipes ‎ →‎SiO2 deposition (PECVD #2)
17:3617:36, 15 December 2023 diff hist +49‎ PECVD Recipes ‎ →‎SiO2 deposition (PECVD #2): New recipe from Nov. 2023 Tag: Visual edit

20:3920:39, 13 September 2023 diff hist +627‎ Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses ‎ Added info for a new shim current Tag: Visual edit
20:1720:17, 13 September 2023 diff hist +39‎ Stepper 2 (Autostep 200) - Chuck Selection ‎ Adding a new chuck current Tag: Visual edit

23:4923:49, 18 January 2023 diff hist +226‎ PECVD Recipes ‎ →‎Low Stress Si3N4 [ICP-PECVD]
23:4823:48, 18 January 2023 diff hist +208‎ PECVD Recipes ‎ →‎Si3N4 [ICP-PECVD]
23:4723:47, 18 January 2023 diff hist +219‎ PECVD Recipes ‎ →‎High Deposition Rate SiO2 [ICP-PECVD]
23:4623:46, 18 January 2023 diff hist +8‎ PECVD Recipes ‎ →‎Low Deposition Rate SiO2 [ICP-PECVD]
23:4523:45, 18 January 2023 diff hist +212‎ PECVD Recipes ‎ →‎Low Deposition Rate SiO2 [ICP-PECVD]

00:3000:30, 14 June 2022 diff hist −159‎ PECVD Recipes ‎ →‎SiO2 deposition (PECVD #1)
00:2900:29, 14 June 2022 diff hist +159‎ PECVD Recipes ‎ →‎SiO2 deposition (PECVD #1)

21:3221:32, 13 June 2022 diff hist −2‎ PECVD Recipes ‎ →‎SiO2 deposition (PECVD #1)
21:3121:31, 13 June 2022 diff hist +2‎ PECVD Recipes ‎ →‎SiO2 deposition (PECVD #1)
21:3021:30, 13 June 2022 diff hist −156‎ PECVD Recipes ‎ →‎SiO2 deposition (PECVD #1)
21:2821:28, 13 June 2022 diff hist 0‎ PECVD Recipes ‎ →‎SiO2 deposition (PECVD #1)
21:2721:27, 13 June 2022 diff hist +2‎ PECVD Recipes ‎ →‎SiO2 deposition (PECVD #1)
21:2621:26, 13 June 2022 diff hist +156‎ PECVD Recipes ‎ →‎SiO2 deposition (PECVD #1)

19:1619:16, 9 September 2021 diff hist −293‎ E-Beam Evaporation Recipes ‎ Updated tooling factor for Al in E-beam#4. Tag: Visual edit

16:4716:47, 7 May 2021 diff hist −42‎ Troubleshooting and Recovery ‎ →‎What to do in case of computer (monitor) freeze-up. current Tag: Visual edit
16:4616:46, 7 May 2021 diff hist −7‎ Troubleshooting and Recovery ‎ →‎What to do in case of computer (monitor) freeze-up. Tag: Visual edit
16:4616:46, 7 May 2021 diff hist +151‎ Troubleshooting and Recovery ‎ →‎What to do in case of computer (monitor) freeze-up.: reboot Tag: Visual edit
16:4416:44, 7 May 2021 diff hist +1,766‎ GCA 6300 Reboot Procedures ‎ reboot and shutdwon-start up current Tag: Visual edit
16:4016:40, 7 May 2021 diff hist −1,956‎ Troubleshooting and Recovery ‎ →‎What to do in case of computer (monitor) freeze-up.: rebooring Tag: Visual edit

17:1317:13, 5 May 2021 diff hist +1,447‎ Troubleshooting and Recovery ‎ troublwshooting Tag: Visual edit
17:0117:01, 5 May 2021 diff hist +77‎ GCA 6300 USer Accessible Commands ‎ →‎List of commands: mapping command added current Tag: Visual edit

22:4722:47, 19 February 2021 diff hist +139‎ PECVD Recipes ‎ →‎PECVD 2 (Advanced Vacuum)
22:4522:45, 19 February 2021 diff hist +160‎ PECVD Recipes ‎ →‎SiO2 deposition (PECVD #2)
22:4422:44, 19 February 2021 diff hist +136‎ PECVD Recipes ‎ →‎Uniformity Data
22:4222:42, 19 February 2021 diff hist +142‎ PECVD Recipes ‎ →‎Uniformity Data
22:3722:37, 19 February 2021 diff hist +139‎ PECVD Recipes ‎ →‎Uniformity Data

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