User contributions for Biljana

21 December 2023

• 22:5222:52, 21 December 2023 diff hist 0 Stepper 1 (GCA 6300) →Operating Procedures
• 22:5222:52, 21 December 2023 diff hist −33 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
• 22:4822:48, 21 December 2023 diff hist +33 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
• 22:4722:47, 21 December 2023 diff hist −115 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
• 22:4722:47, 21 December 2023 diff hist −80 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes Tag: Visual edit: Switched
• 22:4522:45, 21 December 2023 diff hist +98 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes Tag: Visual edit
• 22:4322:43, 21 December 2023 diff hist +97 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
• 22:4122:41, 21 December 2023 diff hist −119 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
• 22:4122:41, 21 December 2023 diff hist +8 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
• 22:3922:39, 21 December 2023 diff hist +111 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
• 22:3622:36, 21 December 2023 diff hist −138 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
• 22:3522:35, 21 December 2023 diff hist +13 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
• 22:3122:31, 21 December 2023 diff hist +100 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
• 22:2922:29, 21 December 2023 diff hist +22 Surface Analysis (KLA/Tencor Surfscan) No edit summary Tag: Visual edit: Switched
• 22:2822:28, 21 December 2023 diff hist +18 Surface Analysis (KLA/Tencor Surfscan) →About Tag: Visual edit
• 22:2722:27, 21 December 2023 diff hist −1 Surface Analysis (KLA/Tencor Surfscan) →Documentation

20 December 2023

• 17:2817:28, 20 December 2023 diff hist +1 PECVD Recipes No edit summary Tag: Visual edit: Switched

15 December 2023

• 18:1218:12, 15 December 2023 diff hist +2 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 18:1118:11, 15 December 2023 diff hist +1 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 18:1118:11, 15 December 2023 diff hist −6 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 18:0318:03, 15 December 2023 diff hist +6 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 18:0318:03, 15 December 2023 diff hist +2 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 18:0218:02, 15 December 2023 diff hist −4 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 18:0218:02, 15 December 2023 diff hist −4 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 18:0118:01, 15 December 2023 diff hist +5 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 18:0018:00, 15 December 2023 diff hist +222 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 17:5717:57, 15 December 2023 diff hist +1 PECVD Recipes →=SiN deposition (PECVD #2)
• 17:5517:55, 15 December 2023 diff hist +195 PECVD Recipes →SiN deposition (PECVD #2)
• 17:5317:53, 15 December 2023 diff hist +4 PECVD Recipes →SiO2 deposition (PECVD #2)
• 17:5217:52, 15 December 2023 diff hist +130 PECVD Recipes →SiO2 deposition (PECVD #2)
• 17:3817:38, 15 December 2023 diff hist +1 PECVD Recipes →SiO2 deposition (PECVD #2)
• 17:3617:36, 15 December 2023 diff hist +49 PECVD Recipes →SiO2 deposition (PECVD #2): New recipe from Nov. 2023 Tag: Visual edit

13 September 2023

• 20:3920:39, 13 September 2023 diff hist +627 Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses Added info for a new shim current Tag: Visual edit
• 20:1720:17, 13 September 2023 diff hist +39 Stepper 2 (Autostep 200) - Chuck Selection Adding a new chuck current Tag: Visual edit

18 January 2023

• 23:4923:49, 18 January 2023 diff hist +226 PECVD Recipes →Low Stress Si3N4 [ICP-PECVD]
• 23:4823:48, 18 January 2023 diff hist +208 PECVD Recipes →Si3N4 [ICP-PECVD]
• 23:4723:47, 18 January 2023 diff hist +219 PECVD Recipes →High Deposition Rate SiO2 [ICP-PECVD]
• 23:4623:46, 18 January 2023 diff hist +8 PECVD Recipes →Low Deposition Rate SiO2 [ICP-PECVD]
• 23:4523:45, 18 January 2023 diff hist +212 PECVD Recipes →Low Deposition Rate SiO2 [ICP-PECVD]

14 June 2022

• 00:3000:30, 14 June 2022 diff hist −159 PECVD Recipes →SiO2 deposition (PECVD #1)
• 00:2900:29, 14 June 2022 diff hist +159 PECVD Recipes →SiO2 deposition (PECVD #1)

13 June 2022

• 21:3221:32, 13 June 2022 diff hist −2 PECVD Recipes →SiO2 deposition (PECVD #1)
• 21:3121:31, 13 June 2022 diff hist +2 PECVD Recipes →SiO2 deposition (PECVD #1)
• 21:3021:30, 13 June 2022 diff hist −156 PECVD Recipes →SiO2 deposition (PECVD #1)
• 21:2821:28, 13 June 2022 diff hist 0 PECVD Recipes →SiO2 deposition (PECVD #1)
• 21:2721:27, 13 June 2022 diff hist +2 PECVD Recipes →SiO2 deposition (PECVD #1)
• 21:2621:26, 13 June 2022 diff hist +156 PECVD Recipes →SiO2 deposition (PECVD #1)

9 September 2021

• 19:1619:16, 9 September 2021 diff hist −293 E-Beam Evaporation Recipes Updated tooling factor for Al in E-beam#4. Tag: Visual edit

7 May 2021

• 16:4716:47, 7 May 2021 diff hist −42 Troubleshooting and Recovery →What to do in case of computer (monitor) freeze-up. current Tag: Visual edit
• 16:4616:46, 7 May 2021 diff hist −7 Troubleshooting and Recovery →What to do in case of computer (monitor) freeze-up. Tag: Visual edit