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  • Oxygen Plasma System Recipes
    Recipe Temperature control is by the lift-pins , with hotplate at 200°C ====Recipe Names:====
    6 KB (952 words) - 13:23, 15 May 2024
  • Wafer Bonder (SUSS SB6-8E)
    ...em is computer controlled with a windows environment allowing for multiple recipe steps and saving of recipes and data. The system is configured for manual l ...i.nanofab.ucsb.edu/w/images/5/5c/Suss_Bonder_Recipe_Guidelines.docx Bonder Recipe Guidelines]
    2 KB (229 words) - 10:53, 20 September 2023
  • Automated Coat/Develop System (S-Cubed Flexi)
    |recipe = Lithography ...cassettes, processes them and returns them to the cassette. The system is recipe driven with a high degree of process control and minimal backside contamina
    3 KB (382 words) - 11:03, 3 September 2024
  • Filmetrics F10-RT-UVX Operating Procedure
    ...or Reflectance measurement by clicking '''Spectra''' button, then, '''Edit Recipe''' button, then, '''Acquisition Settings''' tab. # Click '''Edit Recipe''' button, then, edit the model according to your film sample (suck as film
    4 KB (664 words) - 12:52, 4 September 2021
  • Old Deposition Data - 2021-12-15
    ...ts/d/1DGU745SeunYz4sLs1LpGKbtOYX-tQyBHEvVYcMxHRKE/edit#gid= Si3N4 Standard Recipe] ...ets/d/1uqpg3sirsRbXdTFlxZ6_k3t0ovP0MtpFtICjpH0-prs/edit#gid= SiO2 Standard Recipe]
    31 KB (4,516 words) - 00:18, 16 December 2021
  • KLA Tencor P7 - Basic profile instructions
    #From the main Profiler screen, select scan recipe. #Single click a scan recipe based on the total height of the structure to be measured.
    2 KB (336 words) - 15:20, 2 November 2022
  • RIE 3 (MRC)
    ....edu/w/images/2/2f/SiO2-Etch-Recipe-using-RIE-3-a.pdf SiO<sub>2</sub> Etch Recipe with a very low surface damage - CHF<sub>3] ....edu/w/images/9/98/51-SiNx-Etch-Recipe-using-RIE3.pdf SiN<sub>x</sub> Etch Recipe with a very low surface damage - CHF<sub>3]
    3 KB (554 words) - 15:35, 6 August 2024
  • Oxford ICP Etcher (PlasmaPro 100 Cobra)
    **GaAs-baased epitaxies - ''starter recipe is available'' **GaN-based epitaxies - ''starter recipe is available''
    4 KB (532 words) - 23:33, 4 May 2023
  • ICP-Etch (Unaxis VLR)
    ...ech.ucsb.edu/wiki/images/4/4e/15-GaAs_etch-Unaxis_ICP_etcher.pdf GaAs Etch Recipe (Cl<sub>2</sub>N<sub>2</sub> 30C)] ...edu/wiki/images/1/1f/14-AlAs-GR-cal_etch-Unaxis_ICP_etcher.pdf AlGaAs Etch Recipe (Cl<sub>2</sub>N<sub>2</sub> 30C)]
    4 KB (573 words) - 15:38, 6 August 2024
  • Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers
    === Laser Monitor & Recipe setup === ...Time is longer than expected, to stop using the Manual Box instead of the recipe time.
    6 KB (876 words) - 14:23, 13 June 2019
  • Atomic Layer Deposition (Oxford FlexAL)
    **Includes recipe names for various films, and approx. dep. rates ...regime is rather complex. [[Bill Mitchell]] is the resident expert on ALD recipe development.
    3 KB (377 words) - 14:56, 8 March 2023
  • Tube Furnace (Tystar 8300)
    ...haracterization Data, such as thermal oxidation times, can be found on the recipe page: * No recipe should be run with >1slpm gas flow without discussing with supervisor first
    4 KB (580 words) - 11:15, 7 March 2024
  • Plasma Activation (EVG 810)
    ...Oxygen Plasma System Recipes#Plasma Activation .28EVG 810.29|Oxygen Plasma Recipe]] page for standard EVG recipes.
    1 KB (172 words) - 11:06, 30 October 2023
  • ADT 7100 - Initial Setup Before Cutting
    ...yellow you can choose one of two routes. You can either create or load a recipe or load your sample. === Create a Recipe ===
    11 KB (2,072 words) - 09:50, 2 July 2021
  • Template:Tool2test
    ...hing Recipes{{!}}{{{type}}} Recipes]]'''}}{{#if:{{{recipe|}}}|{{!}}'''[[{{{recipe}}} Recipes{{!}}{{{type}}} Recipes]]'''|none}} |recipe = One of the process types, from the list below
    7 KB (1,028 words) - 01:07, 19 October 2022
  • Template:Tool2
    ...hing Recipes{{!}}{{{type}}} Recipes]]'''}}{{#if:{{{recipe|}}}|{{!}}'''[[{{{recipe}}} Recipes{{!}}{{{type}}} Recipes]]'''|}} |recipe = One of the process types, from the list below
    8 KB (1,056 words) - 15:53, 31 May 2024
  • Thermal Processing Recipes
    # Ready to load into Tystar quartz boats, run recipe on Tystar. *Recipe Name: '''''DRY1050'''''
    5 KB (713 words) - 16:24, 30 January 2024
  • Test Data of etching SiO2 with CHF3/CF4-ICP1
    |+'''ICP#1 Recipe:''' Alternate SiO<sub>2</sub> etch recipe with O2 included.
    7 KB (936 words) - 09:54, 12 January 2023
  • Template:Tool
    ...}{{{type}}} Recipes]]'''}}{{#if:{{{recipe|}}}|{{!}}colspan="2"{{!}}'''[[{{{recipe}}} Recipes{{!}}{{{type}}} Recipes]]'''}} |recipe = One of the process types, from the list below
    8 KB (1,159 words) - 07:57, 30 August 2022
  • IBD: Calibrating Optical Thickness
    ...step in the IBD recipe, which will also change all "SiO2_dep" steps in the recipe. ...her film, in this case do an "TaO-FP", and apply the new TaO/4 time to the recipe.
    5 KB (758 words) - 10:19, 9 March 2024

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