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  • ...tch_Bosch_DSEIII.pdf Bosch Process Recipe and Characterization] - Standard recipe on the tool. **Recipe Name: "'''''Plasma-Therm Standard DSE'''''" (''Production'' - copy to your
    28 KB (4,356 words) - 12:49, 7 May 2024
  • {{Recipe Table Explanation}}
    7 KB (841 words) - 17:19, 18 July 2013
  • ...re tool. You can find starting exposure parameters for SPR955CM-0.8 on the recipe pages for the exposure tool you are using: |SPR955CM-0.9 spin @ 3krpm (Spin Recipe #5)
    5 KB (854 words) - 14:58, 31 August 2022
  • ===Where do I find a recipe for a process (litho/etch/dep etc.)?=== ...mate only. '''''If you have tight tolerances, you need to characterize the recipe yourself''''' (ie. figure out deposition/etch rate, selectivity, verticalit
    25 KB (4,202 words) - 20:37, 13 May 2024
  • ...ls as well as the sputtering of a wide variety of materials. The system is recipe driven and computer controlled for reproducible results.
    3 KB (413 words) - 15:50, 16 September 2022
  • ...ration_Recipes#Materials_Table_(Thermal Evaporator #1)|Thermal Evaporation Recipe Page]].
    2 KB (382 words) - 17:31, 12 October 2017
  • *[[Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer)|Test Data of etching SiO2 w
    7 KB (976 words) - 13:15, 11 January 2023
  • ...ration_Recipes#Materials_Table_(Thermal Evaporator #1)|Thermal Evaporation Recipe Page]].
    3 KB (384 words) - 10:28, 30 August 2022
  • ...r to the etch, do O2 clean 15 minutes, then, chamber coating with the same recipe on 1/4-2" InP on Silicon carrier for 15 minutes.
    5 KB (717 words) - 18:41, 21 November 2022
  • ...te biasing and pre-cleaning. Samples can be heated to 650°C. The system is recipe driven and computer controlled for reproducible results.
    3 KB (479 words) - 10:36, 30 August 2022
  • ...give you the values of the key parameters you will need to establish your recipe. Underlayers such as LOL2000 or PMGI can be used on the stepper systems. &n ==Positive Resist (GCA 6300)== <!--Note that if this heading is changed, the recipe links on the Lithography page must be changed-->
    17 KB (2,294 words) - 17:03, 21 March 2024
  • ...s group provides expertise on process development, fabrication techniques, recipe development, and some direct tool training and maintenance. The Process Gro
    5 KB (664 words) - 09:42, 11 March 2024
  • ...nanotech.ucsb.edu/w/images/6/65/Editing_a_Recipe_on_Plasma.pdf How to edit recipe]
    4 KB (606 words) - 09:59, 14 June 2024
  • Optionally can use lift-pins & Recipe "'''00 220deg, 3min Vac'''";
    4 KB (608 words) - 16:32, 27 April 2022
  • ...asily without aborting the programmed cuts. The "Height Check Rate" in the recipe will check the blade exposure after this many cuts, using the optical heigh ...opriate thickness, and spin-coat it & soft-bake it according to a standard recipe.
    10 KB (1,597 words) - 11:18, 1 May 2024
  • #*[[#Photolithography_Recipes |'''Photo Lithography Recipe section''']] ...ll>'''R''': ''Recipe is available. Clicking this link will take you to the recipe.''</small>
    23 KB (3,174 words) - 12:37, 9 May 2024
  • #Spin coat resist following the recipe for spinning/baking specific resist (make sure the resist is fresh) # When exposure is finished, follow the recipe (post exposure bake if needed) with development. Please take your time for
    15 KB (2,499 words) - 09:42, 19 March 2020
  • |recipe = Lithography
    6 KB (893 words) - 17:44, 12 February 2024
  • |recipe = Lithography
    9 KB (1,400 words) - 13:08, 3 May 2024

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