Difference between revisions of "Step Profilometer (KLA Tencor P-7)"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(added placeholders for detailed specs)
Line 2: Line 2:
 
|picture=KLA-Tencor-P7_Photo.JPG
  
|picture=KLA-Tencor-P7_Photo.JPG
 
|type = Inspection, Test and Characterization
  
|type = Inspection, Test and Characterization
−
|super= Brian Lingg
 +
|super= Bill Millerski
 
|phone=(805)839-3918x210
  
|phone=(805)839-3918x210
 
|location=Bay 4
  
|location=Bay 4

Revision as of 07:31, 28 October 2021

Step Profilometer (KLA Tencor P-7)
KLA-Tencor-P7 Photo.JPG
Tool Type Inspection, Test and Characterization
Location Bay 4
Supervisor Bill Millerski
Supervisor Phone (805) 893-2655
Supervisor E-Mail wmillerski@ucsb.edu
Description Surface Profilometer
Manufacturer KLA Tencor


About

The KLA Tencor info will be here

Detailed Specifications

  • Probe Tip has a 2um radius and a 60 degree angle
  • Maximum wafer size: ____
  • 1D Profile and 2D Raster Scanning
  • Lateral Resolution: _____
  • Height Resolution: _____

Instructions

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Step_Profilometer_(KLA_Tencor_P-7)&oldid=159368"