Difference between revisions of "Step Profilometer (KLA Tencor P-7)"
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(added placeholders for detailed specs) |
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|picture=KLA-Tencor-P7_Photo.JPG |
|picture=KLA-Tencor-P7_Photo.JPG |
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|type = Inspection, Test and Characterization |
|type = Inspection, Test and Characterization |
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− | |super= |
+ | |super= Bill Millerski |
|phone=(805)839-3918x210 |
|phone=(805)839-3918x210 |
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|location=Bay 4 |
|location=Bay 4 |
Revision as of 07:31, 28 October 2021
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About
The KLA Tencor info will be here
Detailed Specifications
- Probe Tip has a 2um radius and a 60 degree angle
- Maximum wafer size: ____
- 1D Profile and 2D Raster Scanning
- Lateral Resolution: _____
- Height Resolution: _____