Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher: Revision history

9 January 2023

• curprev 22:0322:03, 9 January 2023‎ Noahdutra talk contribs‎ 5,423 bytes +230‎ No edit summary Tag: Visual edit

16 December 2022

• curprev 22:0922:09, 16 December 2022‎ Noahdutra talk contribs‎ 5,193 bytes +458‎ No edit summary Tag: Visual edit

10 December 2022

• curprev 07:3607:36, 10 December 2022‎ John d talk contribs‎ 4,735 bytes −899‎ added comment about NP vs ND meas, deleted extraneous tables of old non-standard measurements Tag: Visual edit

22 November 2022

• curprev 01:1801:18, 22 November 2022‎ Noahdutra talk contribs‎ 5,634 bytes +228‎ No edit summary Tag: Visual edit

15 November 2022

• curprev 00:4100:41, 15 November 2022‎ Noahdutra talk contribs‎ 5,406 bytes +231‎ No edit summary Tag: Visual edit

28 October 2022

• curprev 18:0218:02, 28 October 2022‎ Noahdutra talk contribs‎ 5,175 bytes 0‎ No edit summary Tag: Visual edit
• curprev 17:4917:49, 28 October 2022‎ Noahdutra talk contribs‎ 5,175 bytes +230‎ No edit summary Tag: Visual edit

14 October 2022

• curprev 20:2320:23, 14 October 2022‎ Noahdutra talk contribs‎ 4,945 bytes +299‎ No edit summary Tag: Visual edit

3 October 2022

• curprev 20:4220:42, 3 October 2022‎ Noahdutra talk contribs‎ 4,646 bytes +21‎ No edit summary Tag: Visual edit
• curprev 20:2720:27, 3 October 2022‎ Noahdutra talk contribs‎ 4,625 bytes +225‎ No edit summary Tag: Visual edit

13 September 2022

• curprev 15:3015:30, 13 September 2022‎ Noahdutra talk contribs‎ 4,400 bytes +1‎ No edit summary Tag: Visual edit
• curprev 15:2315:23, 13 September 2022‎ Noahdutra talk contribs‎ 4,399 bytes +28‎ No edit summary Tag: Visual edit
• curprev 15:1715:17, 13 September 2022‎ Noahdutra talk contribs‎ 4,371 bytes +243‎ No edit summary Tag: Visual edit

27 August 2022

• curprev 01:1201:12, 27 August 2022‎ Noahdutra talk contribs‎ 4,128 bytes +251‎ No edit summary Tag: Visual edit

23 August 2022

• curprev 01:4901:49, 23 August 2022‎ Noahdutra talk contribs‎ 3,877 bytes +255‎ new trial Tag: Visual edit

20 August 2022

• curprev 00:0700:07, 20 August 2022‎ Noahdutra talk contribs‎ 3,622 bytes +5‎ No edit summary Tag: Visual edit

19 August 2022

• curprev 23:5823:58, 19 August 2022‎ Noahdutra talk contribs‎ 3,617 bytes +253‎ No edit summary Tag: Visual edit

18 May 2022

• curprev 17:4317:43, 18 May 2022‎ Pakala talk contribs‎ m 3,364 bytes +247‎ still a low etch rate on new fl cal Tag: Visual edit

11 May 2022

• curprev 17:3317:33, 11 May 2022‎ Pakala talk contribs‎ m 3,117 bytes +241‎ addded entry to fl cals, added selectivity. etch rate is 10% lower Tag: Visual edit

4 May 2022

• curprev 16:0916:09, 4 May 2022‎ Pakala talk contribs‎ m 2,876 bytes +220‎ added entry to FL cals Tag: Visual edit

21 April 2022

• curprev 18:1718:17, 21 April 2022‎ Pakala talk contribs‎ m 2,656 bytes +3‎ fixed typo Tag: Visual edit
• curprev 18:0918:09, 21 April 2022‎ Pakala talk contribs‎ m 2,653 bytes +219‎ added entry to FL cals Tag: Visual edit

20 April 2022

• curprev 18:1418:14, 20 April 2022‎ Pakala talk contribs‎ m 2,434 bytes −8‎ new SEM on SiO2_Fl_03 Tag: Visual edit

19 April 2022

• curprev 19:5819:58, 19 April 2022‎ Pakala talk contribs‎ m 2,442 bytes +242‎ added entry to Fl cals Tag: Visual edit

13 April 2022

• curprev 20:2220:22, 13 April 2022‎ Pakala talk contribs‎ m 2,200 bytes −3‎ made more recent cals on top for Fl Etcher Tag: Visual edit

12 April 2022

• curprev 19:5019:50, 12 April 2022‎ John d talk contribs‎ 2,203 bytes +3‎ No edit summary
• curprev 19:4919:49, 12 April 2022‎ John d talk contribs‎ 2,200 bytes +1‎ moved cals table to the top

30 March 2022

• curprev 17:2917:29, 30 March 2022‎ Pakala talk contribs‎ m 2,199 bytes +238‎ added entry in Fl Etcher, added selectivity to recent Cals Tag: Visual edit

9 March 2022

• curprev 17:3517:35, 9 March 2022‎ Pakala talk contribs‎ m 1,961 bytes +455‎ added entry to Fl historical data (wiht new table for 90s cals) Tag: Visual edit

8 March 2022

• curprev 18:5618:56, 8 March 2022‎ Pakala talk contribs‎ m 1,506 bytes +190‎ added new entry + SEM into Fl etcher historical data Tag: Visual edit

2 March 2022

• curprev 17:5917:59, 2 March 2022‎ Pakala talk contribs‎ m 1,316 bytes +504‎ Added SEMs and some notes to new etch cals done on FL etcher Tag: Visual edit

11 February 2022

• curprev 20:1120:11, 11 February 2022‎ John d talk contribs‎ 812 bytes +493‎ pasted Ning's 2nd data table, hilighted recipe changes and comment about data being "in progress"

4 February 2021

• curprev 23:1623:16, 4 February 2021‎ Ningcao talk contribs‎ 319 bytes +59‎ No edit summary Tag: Visual edit
• curprev 23:1423:14, 4 February 2021‎ Ningcao talk contribs‎ 260 bytes +260‎ Created page with "{| class="wikitable" | colspan="6" |Fluorine ICP: 3.8mT, 50/800W, CHF3/CF4=10/30sccm, time=90 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Average..." Tag: Visual edit