Difference between revisions of "Thermal Evaporation Recipes"
Jump to navigation
Jump to search
m (moved In to bottom of table) |
|||
(30 intermediate revisions by 2 users not shown) | |||
Line 2: | Line 2: | ||
=[[Thermal Evaporator 1]]= |
=[[Thermal Evaporator 1]]= |
||
+ | |||
− | == Materials Table == |
||
+ | ==Materials Table== |
||
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable" |
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable" |
||
|- |
|- |
||
− | ! colspan=8 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div> |
+ | ! colspan=8 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table for Thermal Evaporator #1</div> |
|- bgcolor="#D0E7FF" |
|- bgcolor="#D0E7FF" |
||
! width="45" bgcolor="#D0E7FF" align="center" | '''Material''' |
! width="45" bgcolor="#D0E7FF" align="center" | '''Material''' |
||
! width="45" bgcolor="#D0E7FF" align="center" | '''Symbol''' |
! width="45" bgcolor="#D0E7FF" align="center" | '''Symbol''' |
||
− | ! width=" |
+ | ! width="95" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3''' |
! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio''' |
! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio''' |
||
! width="45" bgcolor="#D0E7FF" align="center" | '''Tooling, %''' |
! width="45" bgcolor="#D0E7FF" align="center" | '''Tooling, %''' |
||
− | ! width=" |
+ | ! width="95" bgcolor="#D0E7FF" align="center" | '''Current, Amp''' |
− | ! width=" |
+ | ! width="95" bgcolor="#D0E7FF" align="center" | '''Dep.rate, A/sec''' |
− | ! width=" |
+ | ! width="95" bgcolor="#D0E7FF" align="center" | '''Comments''' |
|- |
|- |
||
|Aluminum |
|Aluminum |
||
Line 28: | Line 29: | ||
|Chromium |
|Chromium |
||
|Cr |
|Cr |
||
− | | |
+ | |7.20 |
− | | |
+ | |28.95 |
|95 |
|95 |
||
|85 |
|85 |
||
Line 179: | Line 180: | ||
| |
| |
||
|- |
|- |
||
+ | |Strontium Fluoride |
||
− | |StrontiumFluoride |
||
− | |SrF<sub>2 |
+ | |SrF<sub>2 |
|4.28 |
|4.28 |
||
|12.15 |
|12.15 |
||
Line 198: | Line 199: | ||
|- |
|- |
||
|ITO(IndiumTinOxide) |
|ITO(IndiumTinOxide) |
||
− | |In<sub>2</sub>O<sub>3</sub> - |
+ | |In<sub>2</sub>O<sub>3</sub> - SnO<sub>2 |
|6.43-7.14 |
|6.43-7.14 |
||
|0.841 |
|0.841 |
||
Line 206: | Line 207: | ||
| |
| |
||
|- |
|- |
||
− | |Permalloy |
+ | |Permalloy |
− | |Ni<sub>0.1</sub>Fe<sub>0.2 |
+ | |Ni<sub>0.1</sub>Fe<sub>0.2</sub> |
|8.7 |
|8.7 |
||
|26.40 |
|26.40 |
||
Line 214: | Line 215: | ||
|0.1 |
|0.1 |
||
| |
| |
||
− | | |
+ | |} |
+ | =[[Thermal Evaporator 2]]= |
||
+ | == Materials Table == |
||
+ | {| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable" |
||
+ | |- |
||
+ | ! colspan=6 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table for Thermal Evaporator #2</div> |
||
+ | |- bgcolor="#D0E7FF" |
||
+ | ! width="45" bgcolor="#D0E7FF" align="center" | '''Material''' |
||
+ | ! width="45" bgcolor="#D0E7FF" align="center" | '''Symbol''' |
||
+ | ! width="45" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3''' |
||
+ | ! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio''' |
||
+ | ! width="45" bgcolor="#D0E7FF" align="center" | '''Tooling, %''' |
||
+ | ! width="100" bgcolor="#D0E7FF" align="center" | '''Comments''' |
||
+ | |- |
||
+ | |Aluminum |
||
+ | |Al |
||
+ | |2.70 |
||
+ | |1.08 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Antimony |
||
+ | |Sb |
||
+ | |6.620 |
||
+ | |0.768 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Arsenic |
||
+ | |As |
||
+ | |5.73 |
||
+ | |0.996 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Beryllium |
||
+ | |Be |
||
+ | |1.85 |
||
+ | |0.543 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Boron |
||
+ | |B |
||
+ | |2.54 |
||
+ | |0.389 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Cadmium |
||
+ | |Cd |
||
+ | |8.64 |
||
+ | |0.682 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Cadmium sulfide |
||
+ | |CdS |
||
+ | |4.83 |
||
+ | |1.02 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Cadmium telluride |
||
+ | |CdTe |
||
+ | |5.85 |
||
+ | |0.980 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Calcium fluoride |
||
+ | |CaF<sub>2</sub> |
||
+ | |3.18 |
||
+ | |0.775 |
||
+ | | |
||
+ | |Used often |
||
+ | |- |
||
+ | |Carbon (graphite) |
||
+ | |C |
||
+ | |2.25 |
||
+ | |3.26 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Chromium |
||
+ | |Cr |
||
+ | |7.20 |
||
+ | |0.305 |
||
+ | |155 |
||
+ | |Used often |
||
+ | |- |
||
+ | |Cobalt |
||
+ | |Co |
||
+ | |8.71 |
||
+ | |0.343 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Copper |
||
+ | |Cu |
||
+ | |8.93 |
||
+ | |0.437 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Gallium |
||
+ | |Ga |
||
+ | |5.93 |
||
+ | |0.593 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Gallium Arsenide |
||
+ | |GaAs |
||
+ | |5.31 |
||
+ | |1.59 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Germanium |
||
+ | |Ge |
||
+ | |5.35 |
||
+ | |0.516 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Gold |
||
+ | |Au |
||
+ | |19.30 |
||
+ | |0.381 |
||
+ | | |
||
+ | |Used often |
||
+ | |- |
||
+ | |Indium |
||
+ | |In |
||
+ | |7.30 |
||
+ | |0.841 |
||
+ | |120 |
||
+ | |Used often |
||
+ | |- |
||
+ | |Indium antimonide |
||
+ | |InSb |
||
+ | |5.76 |
||
+ | |0.769 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Iridium |
||
+ | |Ir |
||
+ | |22.4 |
||
+ | |0.129 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Iron |
||
+ | |Fe |
||
+ | |7.86 |
||
+ | |0.349 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Lead |
||
+ | |Pb |
||
+ | |11.3 |
||
+ | |1.13 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Lead sulfide |
||
+ | |PbS |
||
+ | |7.50 |
||
+ | |0.566 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Lithium fluoride |
||
+ | |LiF |
||
+ | |2.638 |
||
+ | |0.778 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Magnesium |
||
+ | |Mg |
||
+ | |1.74 |
||
+ | |1.61 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Magnesium oxide |
||
+ | |MgO |
||
+ | |3.58 |
||
+ | |0.411 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Magnesium Fluoride |
||
+ | |MgF<sub>2</sub> |
||
+ | |3.00 ( should be 3.18) |
||
+ | |0.427( should be 0.637) |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Manganese |
||
+ | |Mn |
||
+ | |7.20 |
||
+ | |0.377 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Manganese(II) Sulfide |
||
+ | |MnS |
||
+ | |3.99 |
||
+ | |0.94 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Mercury |
||
+ | |Hg |
||
+ | |13.46 |
||
+ | |0.74 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Molybdenum |
||
+ | |Mo |
||
+ | |10.2 |
||
+ | |0.257 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Nickel |
||
+ | |Ni |
||
+ | |8.91 |
||
+ | |0.331 |
||
+ | | |
||
+ | |Used often |
||
+ | |- |
||
+ | |Niobium |
||
+ | |Nb |
||
+ | |8.578 |
||
+ | |0.492 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Niobium(V) Oxide |
||
+ | |Nb<sub>2</sub>O<sub>5</sub> |
||
+ | |4.47 |
||
+ | |*1.00 |
||
+ | | |
||
+ | |*z ratio has not been established |
||
+ | |- |
||
+ | |Palladium |
||
+ | |Pd |
||
+ | |12.0 |
||
+ | |0.357 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Platinum |
||
+ | |Pt |
||
+ | |21.4 |
||
+ | |0.245 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Potasium Cloride |
||
+ | |KCl |
||
+ | |1.98 |
||
+ | |2.05 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Selenium |
||
+ | |Se |
||
+ | |4.82 |
||
+ | |0.864 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Silicon |
||
+ | |Si |
||
+ | |2.32 |
||
+ | |0.712 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Silicon(II) Oxide |
||
+ | |SiO |
||
+ | |2.13 |
||
+ | |0.87 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Silicon dioxide (fused quarz) |
||
+ | |SiO<sub>2</sub> |
||
+ | |2.20 |
||
+ | |1.07 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Silver |
||
+ | |Ag |
||
+ | |10.5 |
||
+ | |0.529 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Silver bromide |
||
+ | |AgBr |
||
+ | |6.47 |
||
+ | |1.18 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Silver chloride |
||
+ | |AgCl |
||
+ | |5.56 |
||
+ | |1.32 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Sodium |
||
+ | |Na |
||
+ | |0.97 |
||
+ | |4.8 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Sodium chloride |
||
+ | |NaCl |
||
+ | |2.17 |
||
+ | |1.57 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Tantalum |
||
+ | |Ta |
||
+ | |16.6 |
||
+ | |0.262 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Tantalum(IV) oxide |
||
+ | |Ta<sub>2</sub>O<sub>5</sub> |
||
+ | |8.2 |
||
+ | |0.30 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Tin |
||
+ | |Sn |
||
+ | |7.30 |
||
+ | |0.724 |
||
+ | | |
||
+ | |Used often |
||
+ | |- |
||
+ | |Titanium |
||
+ | |Ti |
||
+ | |4.50 |
||
+ | |0.628 |
||
+ | | |
||
+ | |Used often |
||
+ | |- |
||
+ | |Titanium (IV) Oxide |
||
+ | |TiO<sub>2</sub> |
||
+ | |4.26 |
||
+ | |0.40 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Titanium Oxide |
||
+ | |TiO |
||
+ | |4.90 |
||
+ | |*1.00 |
||
+ | | |
||
+ | |* z ratio not established |
||
+ | |- |
||
+ | |Tungsten |
||
+ | |W |
||
+ | |19.3 |
||
+ | |0.163 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Tungsten carbide |
||
+ | |WC |
||
+ | |15.6 |
||
+ | |0.151 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Zinc |
||
+ | |Zn |
||
+ | |7.04 |
||
+ | |0.514 |
||
+ | | |
||
+ | |Used often |
||
+ | |- |
||
+ | |Zinc Oxide |
||
+ | |ZnO |
||
+ | |5.61 |
||
+ | |0.556 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Zinc Sulfide |
||
+ | |ZnS |
||
+ | |4.09 |
||
+ | |0.775 |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | |Zirconium |
||
+ | |Zr |
||
+ | |6.51 |
||
+ | |0.60 |
||
+ | | |
||
+ | |Should be 6.49 |
||
+ | |- |
||
+ | |Zirconium Oxide |
||
+ | |ZrO<sub>2</sub> |
||
+ | |5.6 |
||
+ | |1.001 |
||
+ | | |
||
+ | | |
||
+ | |} |
||
+ | == In Deposition (Thermal Evaporator 2) == |
||
− | |||
+ | *[[media:Thermal evaporator 2-new Sheet1.pdf|Indium evaporation Data]] |
||
− | =[[Thermal Evaporator 2]]= |
Latest revision as of 17:00, 26 June 2018
Back to Vacuum Deposition Recipes.
Thermal Evaporator 1
Materials Table
Materials Table for Thermal Evaporator #1
| |||||||
---|---|---|---|---|---|---|---|
Material | Symbol | Density, g/cm3 | Z Ratio | Tooling, % | Current, Amp | Dep.rate, A/sec | Comments |
Aluminum | Al | 2.70 | 8.17 | 95 | 85 | 1 | Used often |
Chromium | Cr | 7.20 | 28.95 | 95 | 85 | 2 | Used often |
Cobalt | Co | 8.71 | 25.74 | ||||
Copper | Cu | 8.93 | 20.21 | 100 | Used often | ||
Gold | Au | 19.32 | 23.18 | 101.2 | 122 | 5 | Used often |
Gold/Palladium | Au.5/Pd.5 | 15.86 | 23.96 | ||||
Gold/Palladium | Au.5/Pd.4 | 16.40 | 23.80 | ||||
Gold/Zinc | Au.95/Zn.05 | 18.72 | 22.89 | 101.2 | |||
Gold/Zinc | Au.90/Zn.10 | 18.07 | 22.58 | ||||
Magnezium | Mg | 1.74 | 5.48 | 98.4 | |||
Manganese | Mn | 7.20 | 23.40 | 120 | 100 | ||
Nickel | Ni | 8.90 | 26.68 | 100 | 50 | 4.5 | Used often |
Nichrome | NiCr | 8.32 | 27.59 | 100 | 0.4 | ||
Palladium | Pd | 12.40 | 24.73 | 140.5 | 62 | 1.5 | Used often |
Silicon Monoxide | SiO | 2.13 | 10.19 | 120 | 70 | ||
Silver | Ag | 10.5 | 16.69 | ||||
Zinc | Zn | 7.14 | 17.18 | 50 | 4.5 | Used often | |
Zinc Oxide | ZnO | 5.61 | 15.88 | ||||
Strontium Fluoride | SrF2 | 4.28 | 12.15 | 200 | |||
Iron | Fe | 7.86 | 25.30 | ||||
ITO(IndiumTinOxide) | In2O3 - SnO2 | 6.43-7.14 | 0.841 | ||||
Permalloy | Ni0.1Fe0.2 | 8.7 | 26.40 | 140 | 0.1 |
Thermal Evaporator 2
Materials Table
Materials Table for Thermal Evaporator #2
| |||||
---|---|---|---|---|---|
Material | Symbol | Density, g/cm3 | Z Ratio | Tooling, % | Comments |
Aluminum | Al | 2.70 | 1.08 | ||
Antimony | Sb | 6.620 | 0.768 | ||
Arsenic | As | 5.73 | 0.996 | ||
Beryllium | Be | 1.85 | 0.543 | ||
Boron | B | 2.54 | 0.389 | ||
Cadmium | Cd | 8.64 | 0.682 | ||
Cadmium sulfide | CdS | 4.83 | 1.02 | ||
Cadmium telluride | CdTe | 5.85 | 0.980 | ||
Calcium fluoride | CaF2 | 3.18 | 0.775 | Used often | |
Carbon (graphite) | C | 2.25 | 3.26 | ||
Chromium | Cr | 7.20 | 0.305 | 155 | Used often |
Cobalt | Co | 8.71 | 0.343 | ||
Copper | Cu | 8.93 | 0.437 | ||
Gallium | Ga | 5.93 | 0.593 | ||
Gallium Arsenide | GaAs | 5.31 | 1.59 | ||
Germanium | Ge | 5.35 | 0.516 | ||
Gold | Au | 19.30 | 0.381 | Used often | |
Indium | In | 7.30 | 0.841 | 120 | Used often |
Indium antimonide | InSb | 5.76 | 0.769 | ||
Iridium | Ir | 22.4 | 0.129 | ||
Iron | Fe | 7.86 | 0.349 | ||
Lead | Pb | 11.3 | 1.13 | ||
Lead sulfide | PbS | 7.50 | 0.566 | ||
Lithium fluoride | LiF | 2.638 | 0.778 | ||
Magnesium | Mg | 1.74 | 1.61 | ||
Magnesium oxide | MgO | 3.58 | 0.411 | ||
Magnesium Fluoride | MgF2 | 3.00 ( should be 3.18) | 0.427( should be 0.637) | ||
Manganese | Mn | 7.20 | 0.377 | ||
Manganese(II) Sulfide | MnS | 3.99 | 0.94 | ||
Mercury | Hg | 13.46 | 0.74 | ||
Molybdenum | Mo | 10.2 | 0.257 | ||
Nickel | Ni | 8.91 | 0.331 | Used often | |
Niobium | Nb | 8.578 | 0.492 | ||
Niobium(V) Oxide | Nb2O5 | 4.47 | *1.00 | *z ratio has not been established | |
Palladium | Pd | 12.0 | 0.357 | ||
Platinum | Pt | 21.4 | 0.245 | ||
Potasium Cloride | KCl | 1.98 | 2.05 | ||
Selenium | Se | 4.82 | 0.864 | ||
Silicon | Si | 2.32 | 0.712 | ||
Silicon(II) Oxide | SiO | 2.13 | 0.87 | ||
Silicon dioxide (fused quarz) | SiO2 | 2.20 | 1.07 | ||
Silver | Ag | 10.5 | 0.529 | ||
Silver bromide | AgBr | 6.47 | 1.18 | ||
Silver chloride | AgCl | 5.56 | 1.32 | ||
Sodium | Na | 0.97 | 4.8 | ||
Sodium chloride | NaCl | 2.17 | 1.57 | ||
Tantalum | Ta | 16.6 | 0.262 | ||
Tantalum(IV) oxide | Ta2O5 | 8.2 | 0.30 | ||
Tin | Sn | 7.30 | 0.724 | Used often | |
Titanium | Ti | 4.50 | 0.628 | Used often | |
Titanium (IV) Oxide | TiO2 | 4.26 | 0.40 | ||
Titanium Oxide | TiO | 4.90 | *1.00 | * z ratio not established | |
Tungsten | W | 19.3 | 0.163 | ||
Tungsten carbide | WC | 15.6 | 0.151 | ||
Zinc | Zn | 7.04 | 0.514 | Used often | |
Zinc Oxide | ZnO | 5.61 | 0.556 | ||
Zinc Sulfide | ZnS | 4.09 | 0.775 | ||
Zirconium | Zr | 6.51 | 0.60 | Should be 6.49 | |
Zirconium Oxide | ZrO2 | 5.6 | 1.001 |