Processing - How Do I…?
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Below are answers to common processing questions in the NanoFab.
Lithography
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Deposition
Metal Deposition
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Dielectric/Insulator Deposition
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Etching
Dry (plasma) Etching
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Wet (chemical) Etching
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Materials
Material "Quality"
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Alloying metals
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Impurities
Experiment Setup
Design of Experiments
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Tracking your processes
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