Atomic Layer Deposition Recipes: Revision history

17 October 2024

• curprev 17:0017:00, 17 October 2024‎ Biljana talk contribs‎ 7,551 bytes +13‎ →‎SiO{{sub|2}} deposition (ALD CHAMBER 1)
• curprev 16:5916:59, 17 October 2024‎ Biljana talk contribs‎ 7,538 bytes +35‎ →‎SiO{{sub|2}} deposition (ALD CHAMBER 1)

15 June 2023

• curprev 17:2717:27, 15 June 2023‎ John d talk contribs‎ 7,503 bytes +153‎ →‎Oxford FlexAL Chamber #1: Metals: added BDEAS recipe - needs more info Tag: Visual edit

25 October 2022

• curprev 21:1721:17, 25 October 2022‎ John d talk contribs‎ 7,350 bytes +43‎ →‎SiO2 deposition (ALD CHAMBER 3): added temperature-variation/recipes avaialble on tool Tag: Visual edit

2 September 2022

• curprev 13:5813:58, 2 September 2022‎ John d talk contribs‎ 7,307 bytes +289‎ →‎Oxford FlexAL Chamber #1: Metals: added SiO2 recipes Tag: Visual edit

21 January 2022

• curprev 17:5517:55, 21 January 2022‎ John d talk contribs‎ 7,018 bytes +346‎ →‎Temperature: mentioned "thermal" and slower rate. Tag: Visual edit
• curprev 17:5317:53, 21 January 2022‎ John d talk contribs‎ 6,672 bytes +661‎ →‎Al2O3 deposition (ALD CHAMBER 3): added terms "Plasma/Thermal/Ozone". Also added Chamber 1 Al2O3 Tag: Visual edit

9 July 2021

• curprev 21:1921:19, 9 July 2021‎ John d talk contribs‎ 6,011 bytes +928‎ →‎Atomic Layer Deposition (Oxford FlexAL): Recipe info on Plasma, Ratios Tag: Visual edit

28 May 2021

• curprev 21:1321:13, 28 May 2021‎ John d talk contribs‎ 5,083 bytes +96‎ →‎Oxford FlexAL Chamber #3: Dielectrics: started historical data seciton Tag: Visual edit

16 April 2021

• curprev 17:0917:09, 16 April 2021‎ Thibeault talk contribs‎ m 4,987 bytes −179‎ Removed statement on cycle time for plasma versus thermal deposition. Tag: Visual edit

26 February 2021

• curprev 14:4614:46, 26 February 2021‎ John d talk contribs‎ 5,166 bytes +31‎ →‎Al2O3 deposition (ALD CHAMBER 3): rate on AlOx / O* ~2x faster Tag: Visual edit

17 February 2021

• curprev 16:2316:23, 17 February 2021‎ John d talk contribs‎ 5,135 bytes +178‎ →‎Atomic Layer Deposition (Oxford FlexAL): note on plasma being faster Tag: Visual edit

22 June 2020

• curprev 18:0118:01, 22 June 2020‎ John d talk contribs‎ 4,957 bytes +95‎ →‎Pt deposition (ALD CHAMBER 1): added Pt recipe name for O* plasma Tag: Visual edit

15 May 2020

• curprev 17:1217:12, 15 May 2020‎ John d talk contribs‎ 4,862 bytes +1,701‎ →‎Al2O3 deposition (ALD CHAMBER 3): added all Chamber 3 recipes I could find Tag: Visual edit

23 April 2020

• curprev 17:1317:13, 23 April 2020‎ John d talk contribs‎ 3,161 bytes +28‎ →‎Atomic Layer Deposition (Oxford FlexAL): changed to "ask Tool Supervisor" instead of BillM Tag: Visual edit

18 July 2019

• curprev 19:2419:24, 18 July 2019‎ John d talk contribs‎ m 3,133 bytes +154‎ →‎Atomic Layer Deposition (Oxford FlexAL): 30nm max. thickness indicated Tag: Visual edit

30 October 2018

• curprev 00:4500:45, 30 October 2018‎ John d talk contribs‎ 2,979 bytes +225‎ added temps and plasma/reactant info Tag: Visual edit
• curprev 00:4100:41, 30 October 2018‎ John d talk contribs‎ 2,754 bytes +4‎ →‎ZnO Deposition (ALD Chamber 1): added approx rate from old notes Tag: Visual edit

17 October 2018

• curprev 00:3300:33, 17 October 2018‎ John d talk contribs‎ 2,750 bytes +48‎ →‎Al O  deposition (ALD CHAMBER 3): converted to regular subscripts, indented each recipe param Tag: Visual edit

29 August 2018

• curprev 00:1900:19, 29 August 2018‎ John d talk contribs‎ m 2,702 bytes −5‎ →‎ZnO Deposition (ALD Chamber 1): itlaics Tag: Visual edit
• curprev 00:1300:13, 29 August 2018‎ John d talk contribs‎ m 2,707 bytes −149‎ →‎ZrO  deposition (ALD CHAMBER 3): removed unneeded comment about HfO (which is already in the HfO section) Tag: Visual edit
• curprev 00:1100:11, 29 August 2018‎ John d talk contribs‎ 2,856 bytes +235‎ →‎ZnO:Al deposition (ALD CHAMBER 1): described double-loop recipes Tag: Visual edit
• curprev 00:0900:09, 29 August 2018‎ John d talk contribs‎ 2,621 bytes +167‎ →‎Oxford FlexAL Chamber #1: Metals: added ZnO recipe. Tag: Visual edit

17 July 2018

• curprev 23:3923:39, 17 July 2018‎ John d talk contribs‎ 2,454 bytes +355‎ split up bullets, clarified recipe name, formatting Tag: Visual edit
• curprev 23:3423:34, 17 July 2018‎ John d talk contribs‎ 2,099 bytes +155‎ split into Chamber 1 & Chamber 3 Tag: Visual edit

14 May 2018

• curprev 18:5118:51, 14 May 2018‎ Mitchell b talk contribs‎ 1,944 bytes +3‎ →‎ZnO deposition (ALD CHAMBER 1) Tag: Visual edit
• curprev 18:4818:48, 14 May 2018‎ Mitchell b talk contribs‎ 1,941 bytes +169‎ →‎Al O  deposition (ALD CHAMBER 3) Tag: Visual edit

10 May 2018

• curprev 00:3500:35, 10 May 2018‎ Mitchell b talk contribs‎ 1,772 bytes +464‎ →‎TiO  deposition (ALD) Tag: Visual edit

17 January 2018

• curprev 15:4415:44, 17 January 2018‎ John d talk contribs‎ 1,308 bytes +210‎ added "contact bill mitchell" and Added Ru Tag: Visual edit

16 December 2015

• curprev 00:3600:36, 16 December 2015‎ Thibeault talk contribs‎ 1,098 bytes +117‎ →‎Atomic Layer Deposition (Oxford FlexAL)

25 July 2013

• curprev 01:1601:16, 25 July 2013‎ Prezioso m talk contribs‎ 981 bytes +1‎ No edit summary

16 July 2013

• curprev 00:2700:27, 16 July 2013‎ Prezioso m talk contribs‎ 980 bytes −6‎ No edit summary

5 July 2013

• curprev 00:4100:41, 5 July 2013‎ Prezioso m talk contribs‎ 986 bytes 0‎ No edit summary
• curprev 00:4000:40, 5 July 2013‎ Prezioso m talk contribs‎ 986 bytes +28‎ No edit summary
• curprev 00:3200:32, 5 July 2013‎ Prezioso m talk contribs‎ 958 bytes +152‎ No edit summary

6 September 2012

• curprev 18:3518:35, 6 September 2012‎ Zwarburg talk contribs‎ 806 bytes +30‎ No edit summary
• curprev 18:3318:33, 6 September 2012‎ Zwarburg talk contribs‎ 776 bytes +205‎ No edit summary
• curprev 18:3118:31, 6 September 2012‎ Zwarburg talk contribs‎ 571 bytes +186‎ →‎Atomic Layer Deposition (Oxford FlexAL)
• curprev 18:2718:27, 6 September 2012‎ Zwarburg talk contribs‎ 385 bytes +273‎ →‎Al{{sub|2}}O{{sub|3}} Deposition
• curprev 18:2318:23, 6 September 2012‎ Zwarburg talk contribs‎ 112 bytes +83‎ No edit summary

17 August 2012

• curprev 13:3113:31, 17 August 2012‎ Zwarburg talk contribs‎ 29 bytes +18‎ No edit summary

18 July 2012

• curprev 17:0317:03, 18 July 2012‎ Zwarburg talk contribs‎ 11 bytes +11‎ Created page with "{{recipes}}"