Stepper 3 (ASML DUV): Revision history

18 January 2020

• curprev 20:5520:55, 18 January 2020‎ John d talk contribs‎ m 4,086 bytes +4‎ →‎Design & Fabrication Tools: link to github repo Tag: Visual edit
• curprev 20:5520:55, 18 January 2020‎ John d talk contribs‎ 4,082 bytes +10‎ moved UCSB Test reticles to "Design & Fabrication Tools" section Tag: Visual edit: Switched
• curprev 20:5320:53, 18 January 2020‎ John d talk contribs‎ 4,072 bytes +198‎ moved Mask Making Guidelines to "Design Tools" section Tag: Visual edit

19 December 2019

• curprev 17:2217:22, 19 December 2019‎ John d talk contribs‎ 3,874 bytes +454‎ →‎Operating Procedures: added Software options section Tag: Visual edit

22 November 2019

• curprev 00:3400:34, 22 November 2019‎ John d talk contribs‎ m 3,420 bytes +79‎ moved/updated "service provider" Tag: Visual edit

8 October 2019

• curprev 23:1823:18, 8 October 2019‎ John d talk contribs‎ m 3,341 bytes +56‎ →‎Troubleshooting and Recovery: minor grammar Tag: Visual edit
• curprev 23:1723:17, 8 October 2019‎ John d talk contribs‎ m 3,285 bytes +67‎ toolTemplate added Litho links

18 July 2019

• curprev 19:2919:29, 18 July 2019‎ John d talk contribs‎ 3,218 bytes −2‎ changes supervisor to Demis
• curprev 19:2719:27, 18 July 2019‎ John d talk contribs‎ m 3,220 bytes −51‎ corrected supervisor template

12 June 2019

• curprev 15:4215:42, 12 June 2019‎ John d talk contribs‎ m 3,271 bytes +98‎ Indicated that FEM is in SOP Tag: Visual edit

5 March 2019

• curprev 23:2323:23, 5 March 2019‎ John d talk contribs‎ 3,173 bytes +238‎ →‎Process Information: expand recipes text, added wafer size Tag: Visual edit

21 February 2019

• curprev 00:2300:23, 21 February 2019‎ Thibeault talk contribs‎ 2,935 bytes 0‎ bay number of stepper Tag: Visual edit

5 October 2018

• curprev 15:3315:33, 5 October 2018‎ John d talk contribs‎ 2,935 bytes −348‎ →‎Troubleshooting and Recovery: removed uneeded links Tag: Visual edit

28 August 2018

• curprev 21:2521:25, 28 August 2018‎ John d talk contribs‎ m 3,283 bytes +26‎ moved Test Reticles into Process info, othe rminor changes Tag: Visual edit

1 August 2018

• curprev 09:4409:44, 1 August 2018‎ John d talk contribs‎ 3,257 bytes +86‎ →‎Operating Procedures: Link to UCSB Test Reticles Tag: Visual edit

17 July 2018

• curprev 21:4021:40, 17 July 2018‎ John d talk contribs‎ m 3,171 bytes +23‎ →‎Operating Procedures: added wafer recovery
• curprev 21:1921:19, 17 July 2018‎ John d talk contribs‎ m 3,148 bytes +76‎ →‎Operating Procedures: moved Error recovery to "troubleshootin" section Tag: Visual edit
• curprev 21:1421:14, 17 July 2018‎ John d talk contribs‎ 3,072 bytes +117‎ →‎Operating Procedures: link to error & calibration procedure Tag: Visual edit
• curprev 18:1918:19, 17 July 2018‎ John d talk contribs‎ 2,955 bytes +80‎ link to SOP Tag: Visual edit

4 June 2018

• curprev 20:4120:41, 4 June 2018‎ John d talk contribs‎ m 2,875 bytes +4‎ →‎Process Information: italics on sub-bullet Tag: Visual edit
• curprev 20:4020:40, 4 June 2018‎ John d talk contribs‎ 2,871 bytes +127‎ →‎About: copied info to "process info" Tag: Visual edit
• curprev 19:2319:23, 4 June 2018‎ John d talk contribs‎ 2,744 bytes +131‎ approx maximum wafer bow Tag: Visual edit

28 March 2018

• curprev 16:4816:48, 28 March 2018‎ John d talk contribs‎ 2,613 bytes +224‎ →‎Troubleshooting and Recovery: link to "ASML 5500: Choose Marks for Prealignment" Tag: Visual edit

19 March 2018

• curprev 20:3520:35, 19 March 2018‎ John d talk contribs‎ 2,389 bytes +95‎ →‎Operating Procedures: recovering from error Tag: Visual edit
• curprev 18:3818:38, 19 March 2018‎ John d talk contribs‎ 2,294 bytes +198‎ →‎Operating Procedures: link to reticle id error Tag: Visual edit

21 February 2018

• curprev 22:0622:06, 21 February 2018‎ John d talk contribs‎ m 2,096 bytes −7‎ →‎About: minor tweak Tag: Visual edit
• curprev 22:0522:05, 21 February 2018‎ John d talk contribs‎ m 2,103 bytes +10‎ →‎Operating Procedures: updat elink text Tag: Visual edit
• curprev 22:0522:05, 21 February 2018‎ John d talk contribs‎ 2,093 bytes −146‎ →‎About: removed field sizes text, pointed to mask making page Tag: Visual edit
• curprev 22:0322:03, 21 February 2018‎ John d talk contribs‎ 2,239 bytes −5‎ →‎Operating Procedures: linked to Wiki version of Mask making Guidelines Tag: Visual edit
• curprev 21:2721:27, 21 February 2018‎ John d talk contribs‎ 2,244 bytes +510‎ →‎About: updated capabilities, moved mask sizes to separate paragraph. Tag: Visual edit

29 September 2017

• curprev 23:3223:32, 29 September 2017‎ Thibeault talk contribs‎ 1,734 bytes +1‎ →‎About

3 June 2016

• curprev 21:3321:33, 3 June 2016‎ Thibeault talk contribs‎ 1,733 bytes −47‎ →‎About
• curprev 21:3121:31, 3 June 2016‎ Thibeault talk contribs‎ 1,780 bytes +359‎ →‎About
• curprev 21:2521:25, 3 June 2016‎ Thibeault talk contribs‎ 1,421 bytes +318‎ →‎About
• curprev 18:4918:49, 3 June 2016‎ Thibeault talk contribs‎ 1,103 bytes +96‎ →‎Operating Procedures

10 April 2015

• curprev 23:4723:47, 10 April 2015‎ Thibeault talk contribs‎ 1,007 bytes +3‎ →‎Operating Procedures

3 April 2015

• curprev 00:2700:27, 3 April 2015‎ Thibeault talk contribs‎ 1,004 bytes −5‎ No edit summary
• curprev 00:2500:25, 3 April 2015‎ Thibeault talk contribs‎ 1,009 bytes +67‎ →‎Operating Procedures

1 April 2014

• curprev 17:5617:56, 1 April 2014‎ Abrahamsen talk contribs‎ 942 bytes −2‎ →‎Operating Procedures
• curprev 17:5317:53, 1 April 2014‎ Abrahamsen talk contribs‎ 944 bytes +2‎ No edit summary
• curprev 17:5117:51, 1 April 2014‎ Abrahamsen talk contribs‎ 942 bytes +80‎ No edit summary
• curprev 17:4717:47, 1 April 2014‎ Abrahamsen talk contribs‎ 862 bytes +8‎ No edit summary
• curprev 17:4617:46, 1 April 2014‎ Abrahamsen talk contribs‎ 854 bytes +110‎ No edit summary

11 March 2014

• curprev 20:4620:46, 11 March 2014‎ Thibeault talk contribs‎ 744 bytes 0‎ No edit summary

18 July 2012

• curprev 20:0120:01, 18 July 2012‎ Zwarburg talk contribs‎ 744 bytes −9‎ Reverted edits by Bosch (Talk) to last revision by Zwarburg

16 July 2012

• curprev 23:0223:02, 16 July 2012‎ Bosch talk contribs‎ 753 bytes +9‎ No edit summary

11 July 2012

• curprev 13:5913:59, 11 July 2012‎ Zwarburg talk contribs‎ m 744 bytes 0‎ moved Stepper 3 (ASML) to Stepper 3 (ASML DUV)
• curprev 13:5813:58, 11 July 2012‎ Zwarburg talk contribs‎ 744 bytes +11‎ No edit summary

28 June 2012

• curprev 00:5200:52, 28 June 2012‎ Zwarburg talk contribs‎ 733 bytes −6‎ No edit summary
• curprev 00:4300:43, 28 June 2012‎ Zwarburg talk contribs‎ 739 bytes +739‎ Created page with "{{tool|{{PAGENAME}} |picture=ASML.jpg |type = Vacuum Deposition |super= Adam Abrahamsen |phone=(805)839-3918x213 |location=Bay 3 |email=abrahamsen@ece.ucsb.edu |description = ASM…"