Atomic Layer Deposition (Oxford FlexAL): Revision history

8 March 2023

• curprev 21:5621:56, 8 March 2023‎ Sawyer l talk contribs‎ 2,653 bytes +21‎ Update SOP rev Tag: Visual edit

30 August 2022

• curprev 17:3617:36, 30 August 2022‎ Silva talk contribs‎ 2,632 bytes +21‎ No edit summary

18 November 2021

• curprev 17:1517:15, 18 November 2021‎ Thibeault talk contribs‎ 2,611 bytes +44‎ →‎Cluster Configuration Tag: Visual edit

28 October 2021

• curprev 15:1215:12, 28 October 2021‎ Silva talk contribs‎ 2,567 bytes −3‎ No edit summary
• curprev 15:1115:11, 28 October 2021‎ Silva talk contribs‎ 2,570 bytes +3‎ No edit summary
• curprev 14:2814:28, 28 October 2021‎ Silva talk contribs‎ 2,567 bytes −3‎ No edit summary
• curprev 14:2714:27, 28 October 2021‎ Silva talk contribs‎ 2,570 bytes +3‎ No edit summary

1 July 2020

• curprev 14:5714:57, 1 July 2020‎ John d talk contribs‎ 2,567 bytes +2‎ corrected chamber --> metal/dielectric designation Tag: Visual edit

22 June 2020

• curprev 17:5717:57, 22 June 2020‎ John d talk contribs‎ m 2,565 bytes +8‎ →‎ALD Recipes: bolded recipes page Tag: Visual edit

23 April 2020

• curprev 17:1417:14, 23 April 2020‎ John d talk contribs‎ 2,557 bytes +14‎ →‎Procedures & Documentation: changed to "ask tool supervisor" instead of BillM Tag: Visual edit

7 April 2020

• curprev 01:2801:28, 7 April 2020‎ Jcrode talk contribs‎ 2,543 bytes +2‎ Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/"

30 January 2020

• curprev 19:3419:34, 30 January 2020‎ Thibeault talk contribs‎ 2,541 bytes −98‎ →‎About

26 November 2019

• curprev 21:1421:14, 26 November 2019‎ John d talk contribs‎ m 2,639 bytes +8‎ added CAIBE acronym Tag: Visual edit
• curprev 21:1321:13, 26 November 2019‎ John d talk contribs‎ m 2,631 bytes −72‎ typo/grammar Tag: Visual edit
• curprev 21:1021:10, 26 November 2019‎ John d talk contribs‎ 2,703 bytes +198‎ added cluster config section Tag: Visual edit

28 January 2019

• curprev 19:5819:58, 28 January 2019‎ John d talk contribs‎ 2,505 bytes +39‎ →‎ALD Recipes: max thickness → 30nm Tag: Visual edit

3 July 2018

• curprev 23:3823:38, 3 July 2018‎ John d talk contribs‎ m 2,466 bytes +4‎ →‎ALD Recipes: link to bill mitchell Tag: Visual edit
• curprev 23:3723:37, 3 July 2018‎ John d talk contribs‎ 2,462 bytes +774‎ →‎About: explained dual-chamber setup, added 50nm restriction Tag: Visual edit

14 December 2017

• curprev 17:3917:39, 14 December 2017‎ John d talk contribs‎ m 1,688 bytes +4‎ ALD recipes heading
• curprev 17:3917:39, 14 December 2017‎ John d talk contribs‎ 1,684 bytes +142‎ heading/link to recipes page

13 July 2015

• curprev 22:4822:48, 13 July 2015‎ Lingg talk contribs‎ 1,542 bytes +40‎ →‎About

9 July 2015

• curprev 21:3621:36, 9 July 2015‎ Lingg talk contribs‎ 1,502 bytes +2‎ →‎Documentation

21 March 2014

• curprev 15:5015:50, 21 March 2014‎ Biljana talk contribs‎ 1,500 bytes +2‎ →‎Documentation

2 November 2013

• curprev 20:5120:51, 2 November 2013‎ Bovington j talk contribs‎ 1,498 bytes +46‎ →‎Etch Rates
• curprev 20:5020:50, 2 November 2013‎ Bovington j talk contribs‎ 1,452 bytes +68‎ →‎Documentation

5 July 2013

• curprev 00:2000:20, 5 July 2013‎ Prezioso m talk contribs‎ 1,384 bytes 0‎ No edit summary

22 August 2012

• curprev 17:5017:50, 22 August 2012‎ Zwarburg talk contribs‎ 1,384 bytes +82‎ No edit summary

10 July 2012

• curprev 21:5521:55, 10 July 2012‎ Zwarburg talk contribs‎ m 1,302 bytes 0‎ moved Atomic Layer Deposision (Oxford FlexAL) to Atomic Layer Deposition (Oxford FlexAL)
• curprev 20:3720:37, 10 July 2012‎ Zwarburg talk contribs‎ 1,302 bytes +10‎ No edit summary

30 June 2012

• curprev 23:3223:32, 30 June 2012‎ Zwarburg talk contribs‎ 1,292 bytes +1,292‎ Created page with "{{tool|{{PAGENAME}} |picture=FlexAL.jpg |type = Vacuum Deposition |super= Brian Lingg |phone=(805)839-3918x210 |location=Bay 2 |email=lingg@ece.ucsb.edu |description = Oxford Fle…"