Direct-Write Lithography Recipes: Revision history

12 November 2024

• curprev 19:1019:10, 12 November 2024‎ Biljana talk contribs‎ 7,814 bytes +179‎ →‎Positive Resist (MLA150): Update for SPR 955-1.8 Tag: Visual edit

21 August 2024

• curprev 17:1417:14, 21 August 2024‎ John d talk contribs‎ 7,635 bytes +19‎ →‎Negative Resist (MLA150): udpated 5214 instructions Tag: Visual edit
• curprev 16:4616:46, 21 August 2024‎ John d talk contribs‎ 7,616 bytes +147‎ →‎Negative Resist (MLA150): link to az5214 basic process Tag: Visual edit

17 July 2024

• curprev 14:1314:13, 17 July 2024‎ John d talk contribs‎ 7,469 bytes +358‎ →‎Greyscale Lithography (MLA150): moved SPR comments to own row, was squished into small column Tag: Visual edit

16 May 2024

• curprev 00:1700:17, 16 May 2024‎ John d talk contribs‎ 7,111 bytes +273‎ added links to CAD design tips Tag: Visual edit

20 March 2024

• curprev 22:0422:04, 20 March 2024‎ John d talk contribs‎ 6,838 bytes +172‎ →‎Maskless Aligner (Heidelberg MLA150): link to Troubleshooting/OOFocus section Tag: Visual edit

15 March 2024

• curprev 00:2700:27, 15 March 2024‎ John d talk contribs‎ 6,666 bytes +429‎ →‎Maskless Aligner (Heidelberg MLA150): added FEM comment Tag: Visual edit
• curprev 00:1700:17, 15 March 2024‎ John d talk contribs‎ 6,237 bytes −29‎ →‎Greyscale Lithography (MLA150): deleted Flood Expose column Tag: Visual edit

27 February 2024

• curprev 19:2919:29, 27 February 2024‎ John d talk contribs‎ 6,266 bytes +135‎ →‎Greyscale Lithography (MLA150): added link to GS page Tag: Visual edit

14 June 2023

• curprev 21:0121:01, 14 June 2023‎ John d talk contribs‎ 6,131 bytes +944‎ →‎Greyscale Lithography (MLA150): adde dgresyscale starter process Tag: Visual edit
• curprev 20:5220:52, 14 June 2023‎ John d talk contribs‎ 5,187 bytes +232‎ →‎Positive Resist (MLA150): explain rehydration step Tag: Visual edit
• curprev 20:3820:38, 14 June 2023‎ John d talk contribs‎ 4,955 bytes +219‎ →‎Positive Resist (MLA150): added SPR220-7.0, from Lubin greyscale project Tag: Visual edit

18 May 2023

• curprev 22:1322:13, 18 May 2023‎ John d talk contribs‎ 4,736 bytes +32‎ →‎Positive Resist (MLA150) Tag: Visual edit

1 December 2022

• curprev 19:2319:23, 1 December 2022‎ John d talk contribs‎ 4,704 bytes +20‎ converted File links to Media links (open PDF directly) Tag: Visual edit
• curprev 19:2019:20, 1 December 2022‎ John d talk contribs‎ 4,684 bytes 0‎ testing File-->Media link
• curprev 19:1619:16, 1 December 2022‎ John d talk contribs‎ 4,684 bytes +17‎ linkto nLOF2020 Tag: Visual edit

1 July 2022

• curprev 14:4714:47, 1 July 2022‎ John d talk contribs‎ 4,667 bytes +69‎ →‎Maskless Aligner (Heidelberg MLA150): links to MJB/MA6 for Flood exp Tag: Visual edit
• curprev 04:5804:58, 1 July 2022‎ John d talk contribs‎ 4,598 bytes +211‎ →‎Positive Resist (MLA150): clarify “PEB” Tag: Visual edit

26 May 2021

• curprev 19:3519:35, 26 May 2021‎ John d talk contribs‎ 4,387 bytes +149‎ →‎Maskless Aligner (Heidelberg MLA150): mention that any I-Line PR will work. Tag: Visual edit

4 January 2021

• curprev 16:2116:21, 4 January 2021‎ John d talk contribs‎ 4,238 bytes +170‎ →‎Positive Resist (MLA150): note about HIMT design giving higher dose result Tag: Visual edit

12 December 2020

• curprev 17:0617:06, 12 December 2020‎ John d talk contribs‎ m 4,068 bytes +4‎ →‎Negative Resist (MLA150) Tag: Visual edit

3 December 2020

• curprev 23:3923:39, 3 December 2020‎ John d talk contribs‎ 4,064 bytes +25‎ →‎Positive Resist (MLA150): added line-space for SPR 220-3 Tag: Visual edit

15 November 2020

• curprev 05:0805:08, 15 November 2020‎ John d talk contribs‎ 4,039 bytes +233‎ →‎Positive Resist (MLA150): time/temp formatting, link to high-res Tag: Visual edit
• curprev 04:5704:57, 15 November 2020‎ John d talk contribs‎ m 3,806 bytes 0‎ John d moved page Maskless Aligner Recipes to Direct-Write Lithography Recipes: new title and catergory on SignupMonkey "Direct write litho"

14 November 2020

• curprev 01:0201:02, 14 November 2020‎ John d talk contribs‎ 3,806 bytes +438‎ added notes/comments to each section Tag: Visual edit

14 October 2020

• curprev 14:1314:13, 14 October 2020‎ John d talk contribs‎ m 3,368 bytes +1‎ updated THMR thickness Tag: Visual edit

11 October 2020

• curprev 01:4401:44, 11 October 2020‎ John d talk contribs‎ 3,367 bytes +143‎ →‎Positive Resist (MLA150): added THMR recipe Tag: Visual edit

10 October 2020

• curprev 04:5204:52, 10 October 2020‎ John d talk contribs‎ m 3,224 bytes +59‎ "Exposure Time" → "Exposure Dose (mJ/cm2)" Tag: Visual edit

9 October 2020

• curprev 23:3823:38, 9 October 2020‎ Biljana talk contribs‎ 3,165 bytes −10‎ →‎Negative Resist (MLA150)
• curprev 23:3723:37, 9 October 2020‎ Biljana talk contribs‎ 3,175 bytes +64‎ →‎Negative Resist (MLA150)
• curprev 23:1623:16, 9 October 2020‎ Biljana talk contribs‎ 3,111 bytes +45‎ →‎Negative Resist (MLA150)
• curprev 23:1423:14, 9 October 2020‎ Biljana talk contribs‎ 3,066 bytes +10‎ →‎Negative Resist (MLA150)
• curprev 23:1223:12, 9 October 2020‎ Biljana talk contribs‎ 3,056 bytes +7‎ →‎Negative Resist (MLA150)
• curprev 22:4222:42, 9 October 2020‎ Biljana talk contribs‎ 3,049 bytes 0‎ →‎Negative Resist (MLA150)
• curprev 22:3422:34, 9 October 2020‎ Biljana talk contribs‎ 3,049 bytes 0‎ →‎Negative Resist (MLA150)
• curprev 22:3322:33, 9 October 2020‎ Biljana talk contribs‎ 3,049 bytes +22‎ →‎Positive Resist (MLA150)
• curprev 22:0122:01, 9 October 2020‎ Biljana talk contribs‎ 3,027 bytes −1‎ →‎Positive Resist (MLA150)
• curprev 21:5821:58, 9 October 2020‎ Biljana talk contribs‎ 3,028 bytes +1‎ →‎Positive Resist (MLA150)
• curprev 21:5621:56, 9 October 2020‎ Biljana talk contribs‎ 3,027 bytes +4‎ →‎Positive Resist (MLA150)
• curprev 21:5221:52, 9 October 2020‎ Biljana talk contribs‎ 3,023 bytes +3‎ →‎Positive Resist (MLA150)
• curprev 21:1221:12, 9 October 2020‎ Biljana talk contribs‎ 3,020 bytes +19‎ →‎Positive Resist (MLA150)
• curprev 18:4118:41, 9 October 2020‎ Biljana talk contribs‎ 3,001 bytes +3‎ →‎Positive Resist (MLA150)
• curprev 18:3918:39, 9 October 2020‎ Biljana talk contribs‎ 2,998 bytes −2‎ →‎Maskless Aligner (Heidelberg MLA150)
• curprev 18:3818:38, 9 October 2020‎ Biljana talk contribs‎ 3,000 bytes +55‎ →‎Positive Resist (MLA150)

3 October 2020

• curprev 06:0306:03, 3 October 2020‎ John d talk contribs‎ m 2,945 bytes +9‎ →‎Greyscale Lithography: added model to header title

2 October 2020

• curprev 23:2723:27, 2 October 2020‎ John d talk contribs‎ 2,936 bytes +876‎ Added PR's we are characterizing Tag: Visual edit: Switched

14 September 2020

• curprev 06:3406:34, 14 September 2020‎ John d talk contribs‎ m 2,060 bytes +547‎ →‎Maskless Aligner (Heidelberg MLA150): greyscale Tag: Visual edit
• curprev 06:3206:32, 14 September 2020‎ John d talk contribs‎ m 1,513 bytes +11‎ link to tool page Tag: Visual edit
• curprev 06:3106:31, 14 September 2020‎ John d talk contribs‎ m 1,502 bytes +8‎ No edit summary
• curprev 06:2806:28, 14 September 2020‎ John d talk contribs‎ m 1,494 bytes +125‎ No edit summary Tag: Visual edit