Stepper Recipes: Revision history

21 August 2024

• curprev 17:1517:15, 21 August 2024‎ John d talk contribs‎ 19,562 bytes +830‎ →‎Negative Resist (GCA 6300): added 5214 info Tag: Visual edit

10 August 2024

• curprev 05:4005:40, 10 August 2024‎ John d talk contribs‎ 18,732 bytes +79‎ →‎Photomasks & Job Programming Tag: Visual edit

16 July 2024

• curprev 20:2120:21, 16 July 2024‎ John d talk contribs‎ m 18,653 bytes +26‎ →‎Particle Checks Tag: Visual edit
• curprev 20:1920:19, 16 July 2024‎ John d talk contribs‎ m 18,627 bytes −10‎ →‎Particle Checks Tag: Visual edit
• curprev 20:1820:18, 16 July 2024‎ John d talk contribs‎ 18,637 bytes +814‎ →‎Process Control Data: added thumbnail images of the Cals
• curprev 20:1620:16, 16 July 2024‎ John d talk contribs‎ 17,823 bytes +457‎ →‎Process Control Data: added particle check section and explanation/fig Tag: Visual edit

22 March 2024

• curprev 00:0300:03, 22 March 2024‎ John d talk contribs‎ 17,366 bytes +58‎ →‎Negative Resist (ASML DUV): UVN dev time Tag: Visual edit

19 September 2023

• curprev 13:4413:44, 19 September 2023‎ John d talk contribs‎ 17,308 bytes +22‎ →‎Positive Resist (ASML DUV): UV26 updates from data sheet Tag: Visual edit

10 March 2023

• curprev 21:0921:09, 10 March 2023‎ John d talk contribs‎ 17,286 bytes +643‎ →‎Stepper 3 (ASML DUV): added Process Control Data section

21 December 2022

• curprev 17:5017:50, 21 December 2022‎ John d talk contribs‎ m 16,643 bytes −12‎ →‎Anti-Reflective Coatings: removed bold Tag: Visual edit
• curprev 17:4917:49, 21 December 2022‎ John d talk contribs‎ m 16,655 bytes +19‎ →‎Anti-Reflective Coatings Tag: Visual edit
• curprev 17:4817:48, 21 December 2022‎ John d talk contribs‎ 16,636 bytes +838‎ →‎Stepper 3 (ASML DUV): added TOC Tag: Visual edit

15 December 2022

• curprev 22:5822:58, 15 December 2022‎ John d talk contribs‎ 15,798 bytes +112‎ →‎DS-K101-304: changed spin speed to 2500rpm Tag: Visual edit

8 November 2022

• curprev 20:1920:19, 8 November 2022‎ John d talk contribs‎ 15,686 bytes +199‎ →‎Positive Resist (ASML DUV): added UV26 Tag: Visual edit: Switched

15 October 2022

• curprev 23:0123:01, 15 October 2022‎ John d talk contribs‎ 15,487 bytes +245‎ →‎Stepper 3 (ASML DUV): LinkedIn to Design Tools section Tag: Visual edit

10 September 2021

• curprev 00:0700:07, 10 September 2021‎ John d talk contribs‎ 15,242 bytes +1,173‎ linked to PR datasheets Tag: Visual edit

4 September 2021

• curprev 19:5019:50, 4 September 2021‎ Jcrode talk contribs‎ 14,069 bytes −9‎ Text replacement - "/wiki/index.php" to "/w/index.php"
• curprev 19:4819:48, 4 September 2021‎ Jcrode talk contribs‎ 14,078 bytes +18‎ Text replacement - "/wiki/index.php/" to "/wiki/index.php?title="

27 July 2021

• curprev 17:5817:58, 27 July 2021‎ John d talk contribs‎ m 14,060 bytes −10‎ →‎DUV-42P-6: updated spin speed / noted mistake Tag: Visual edit

12 July 2021

• curprev 20:4720:47, 12 July 2021‎ John d talk contribs‎ m 14,070 bytes +48‎ →‎DUV-42P-6: updated etching links Tag: Visual edit

21 June 2021

• curprev 16:4716:47, 21 June 2021‎ John d talk contribs‎ 14,022 bytes +12‎ →‎DUV-42P: corrected to 2500rpm for 60nm thick, DUV42P-6 formulation Tag: Visual edit

17 May 2021

• curprev 20:0620:06, 17 May 2021‎ John d talk contribs‎ 14,010 bytes +155‎ →‎DUV-42P: link to FL-ICP and Technics for BARC etches Tag: Visual edit
• curprev 19:5519:55, 17 May 2021‎ John d talk contribs‎ m 13,855 bytes +8‎ →‎DUV-42P-6: comments on corrected spin speed Tag: Visual edit
• curprev 19:5319:53, 17 May 2021‎ John d talk contribs‎ 13,847 bytes +4‎ →‎DUV-42P: aDDED "-6" to the DUV42P part number Tag: Visual edit

1 March 2021

• curprev 19:5519:55, 1 March 2021‎ John d talk contribs‎ 13,843 bytes +74‎ →‎DUV-42P: added 2500rpm note Tag: Visual edit

9 November 2020

• curprev 17:2317:23, 9 November 2020‎ John d talk contribs‎ m 13,769 bytes +2‎ →‎Other Lithography Porcess (ASML DUV): typo in heading Tag: Visual edit
• curprev 17:2317:23, 9 November 2020‎ John d talk contribs‎ 13,767 bytes +73‎ →‎Other Lithography Porcess (ASML DUV): linked to lift-off process Tag: Visual edit
• curprev 17:1617:16, 9 November 2020‎ John d talk contribs‎ 13,694 bytes +158‎ →‎Stepper 3 (ASML DUV): link to edge bead removal Tag: Visual edit

6 November 2020

• curprev 16:3016:30, 6 November 2020‎ John d talk contribs‎ m 13,536 bytes +5‎ →‎Anti-Reflective Coatings: added BARC Tag: Visual edit

16 October 2020

• curprev 19:3219:32, 16 October 2020‎ Biljana talk contribs‎ 13,531 bytes +150‎ No edit summary

14 September 2020

• curprev 06:2006:20, 14 September 2020‎ John d talk contribs‎ 13,381 bytes +26‎ added category

7 April 2020

• curprev 01:2801:28, 7 April 2020‎ Jcrode talk contribs‎ 13,355 bytes +7‎ Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/"

19 November 2019

• curprev 19:1719:17, 19 November 2019‎ John d talk contribs‎ m 13,348 bytes +234‎ →‎Anti-Reflective Coatings: links to BARC datasheets Tag: Visual edit

25 September 2019

• curprev 20:5120:51, 25 September 2019‎ John d talk contribs‎ 13,114 bytes +52‎ →‎Positive Resist (ASML DUV): added Annular illum in notes Tag: Visual edit

17 September 2019

• curprev 14:3114:31, 17 September 2019‎ John d talk contribs‎ 13,062 bytes −558‎ →‎DS-K101-304: link to bake temp vs. dev. rate Tag: Visual edit

8 July 2019

• curprev 23:1223:12, 8 July 2019‎ John d talk contribs‎ m 13,620 bytes +14‎ →‎DS-K101: approx. thickness Tag: Visual edit
• curprev 23:1023:10, 8 July 2019‎ John d talk contribs‎ m 13,606 bytes +243‎ →‎DS-K101: link to datasheet Tag: Visual edit

6 May 2019

• curprev 23:3323:33, 6 May 2019‎ John d talk contribs‎ 13,363 bytes −4‎ →‎Negative Resist (ASML DUV): updates UVN2300 --> UVN30, from S.Cronin Traveler Tag: Visual edit

24 October 2018

• curprev 20:3720:37, 24 October 2018‎ John d talk contribs‎ 13,367 bytes +57‎ →‎Positive Resist (ASML DUV): UV6-0.7 recipe - mentioned replaced by -0.8 Tag: Visual edit

29 September 2018

• curprev 01:2201:22, 29 September 2018‎ John d talk contribs‎ m 13,310 bytes −6‎ →‎DS-K101: clarify how to reduce undercut. Tag: Visual edit
• curprev 01:2201:22, 29 September 2018‎ John d talk contribs‎ 13,316 bytes +264‎ →‎Anti-Reflective Coatings: link to DUV42P etch recipes, also set to individual subheadings Tag: Visual edit

16 August 2017

• curprev 03:3003:30, 16 August 2017‎ John d talk contribs‎ 13,052 bytes +1‎ moved 6300-->AutoStep 200 multiplier into GCA 6300 section
• curprev 03:2903:29, 16 August 2017‎ John d talk contribs‎ 13,051 bytes +58‎ broke up intro paragraph
• curprev 03:2403:24, 16 August 2017‎ John d talk contribs‎ 12,993 bytes +18‎ →‎Positive Resist (ASML DUV): aka UV6-0.8 (actually written on bottle)
• curprev 03:2203:22, 16 August 2017‎ John d talk contribs‎ m 12,975 bytes +12‎ →‎Anti-Reflective Coatings: formatting
• curprev 03:2003:20, 16 August 2017‎ John d talk contribs‎ m 12,963 bytes +14‎ →‎Anti-Reflective Coatings: aka. for ARC, to aid in searchability
• curprev 03:1903:19, 16 August 2017‎ John d talk contribs‎ 12,949 bytes −476‎ →‎Stepper 3 (ASML DUV): combined ARC section into one section, referenced from pos/neg sections
• curprev 02:5202:52, 16 August 2017‎ John d talk contribs‎ 13,425 bytes +83‎ →‎Positive Resist (ASML DUV): turned ARC into bulleted lists

15 August 2017

• curprev 23:1623:16, 15 August 2017‎ John d talk contribs‎ 13,342 bytes +26‎ →‎Positive Resist (ASML DUV): replaced AR2 with DUV-42P

12 June 2017

• curprev 21:3621:36, 12 June 2017‎ Thibeault talk contribs‎ 13,316 bytes +319‎ No edit summary