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19 August 2024
17:08 | Stepper 2 (AutoStep 200) diffhist +121 John d talk contribs →Detailed Specifications: added substrate thickness |
6 August 2024
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15:38 | ICP-Etch (Unaxis VLR) 2 changes history +1,575 [John d (2×)] | |||
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15:38 (cur | prev) +1,397 John d talk contribs pasted recipes section | ||||
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13:29 (cur | prev) +178 John d talk contribs note that tool is decommissioned, point to Oxforrd Etcher Tag: Visual edit |
15:35 | RIE 3 (MRC) diffhist +381 John d talk contribs pasted recipes |
1 August 2024
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17:17 | SEM Sample Coater (Hummer) 2 changes history +38 [John d (2×)] | |||
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17:17 (cur | prev) +1 John d talk contribs →Operating Procedures: fixed bullet points, listed approx film thickness Tag: Visual edit | ||||
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17:17 (cur | prev) +37 John d talk contribs →About Tag: Visual edit |
17:16 | SEM 1 (JEOL IT800SHL) diffhist +70 John d talk contribs →Operating Procedures: link to hummer techniques |
30 July 2024
09:02 | Laser Scanning Confocal M-scope (Olympus LEXT) diffhist +6 Hopkins a talk contribs →Offline software |
08:10 | Suss Aligners (SUSS MJB-3) diffhist +2 Sawyer l talk contribs |
08:10 | Contact Aligner (SUSS MA-6) diffhist +2 Sawyer l talk contribs |
08:09 | E-Beam 2 (Custom) diffhist +1 Sawyer l talk contribs |
08:06 | ICP Etch 2 (Panasonic E626I) diffhist -6 Sawyer l talk contribs |
29 July 2024
19:24 | SEM 1 (JEOL IT800SHL) diffhist +108 John d talk contribs →Imaging: added minor descriptions on detector types |