Vacuum Deposition Recipes: Difference between revisions

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{{Recipe Table Explanation}}
{{Recipe Table Explanation}}
{| class="wikitable" border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;"
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! colspan="18" width="1675" height="45" | <div style="font-size: 150%;">Vacuum Deposition Recipes</div>
! width="1675" height="45" colspan="18" | <div style="font-size: 150%;">Vacuum Deposition Recipes</div>
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| <!-- INTENTIONALLY LEFT BLANK --> <br>
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! colspan="4" bgcolor="#D0E7FF" align="center" | '''[[E-Beam Evaporation Recipes|E-Beam Evaporation]]'''
! align="center" bgcolor="#d0e7ff" colspan="4" | '''[[E-Beam Evaporation Recipes|E-Beam Evaporation]]'''
! colspan="6" bgcolor="#D0E7FF" align="center" | '''[[Sputtering Recipes|Sputtering]]'''
! align="center" bgcolor="#d0e7ff" colspan="6" | '''[[Sputtering Recipes|Sputtering]]'''
! colspan="2" bgcolor="#D0E7FF" align="center" | '''[[Thermal Evaporation Recipes|Thermal Evaporation]]'''
! align="center" bgcolor="#d0e7ff" colspan="2" | '''[[Thermal Evaporation Recipes|Thermal Evaporation]]'''
! colspan="3" bgcolor="#D0E7FF" align="center" | '''[[PECVD Recipes|Plasma Enhanced Chemical<br>Vapor Deposition (PECVD)]]'''
! align="center" bgcolor="#d0e7ff" colspan="3" | '''[[PECVD Recipes|Plasma Enhanced Chemical<br>Vapor Deposition (PECVD)]]'''
! width="90" bgcolor="#D0E7FF" align="center" | '''[[Atomic Layer Deposition Recipes|Atomic Layer Deposition]]'''
! width="90" align="center" bgcolor="#d0e7ff" | '''[[Atomic Layer Deposition Recipes|Atomic Layer Deposition]]'''
! width="80" bgcolor="#D0E7FF" align="center" | '''[[Molecular Vapor Deposition Recipes|Molecular Vapor Deposition]]'''
! width="80" align="center" bgcolor="#d0e7ff" | '''[[Molecular Vapor Deposition Recipes|Molecular Vapor Deposition]]'''
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! width="20" bgcolor="#D0E7FF" align="center" | '''Material'''
! width="20" align="center" bgcolor="#d0e7ff" | '''Material'''
| width="65" bgcolor="#DAF1FF" | [[E-Beam Evaporation Recipes#E-Beam_1_.28Sharon.29|E-Beam 1 (Sharon)]]
| width="65" bgcolor="#daf1ff" | [[E-Beam Evaporation Recipes#E-Beam_1_.28Sharon.29|E-Beam 1 (Sharon)]]
| width="65" bgcolor="#DAF1FF" | [[E-Beam Evaporation Recipes#E-Beam_2_.28Custom.29|E-Beam 2 (Custom)]]
| width="65" bgcolor="#daf1ff" | [[E-Beam Evaporation Recipes#E-Beam_2_.28Custom.29|E-Beam 2 (Custom)]]
| width="65" bgcolor="#DAF1FF" | [[E-Beam Evaporation Recipes#E-Beam_3_.28Temescal.29|E-Beam 3 (Temescal)]]
| width="65" bgcolor="#daf1ff" | [[E-Beam Evaporation Recipes#E-Beam_3_.28Temescal.29|E-Beam 3 (Temescal)]]
| width="65" bgcolor="#DAF1FF" | [[E-Beam Evaporation Recipes#E-Beam_4_.28CHA.29|E-Beam 4 (CHA)]]
| width="65" bgcolor="#daf1ff" | [[E-Beam Evaporation Recipes#E-Beam_4_.28CHA.29|E-Beam 4 (CHA)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter_1_.28Custom.29|Sputter 1 (Custom)]]
| width="65" bgcolor="#daf1ff" | [[Sputtering Recipes#Sputter_1_.28Custom.29|Sputter 1 (Custom)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter_2_.28SFI_Endeavor.29|Sputter 2<br>(SFI Endeavor)]]
| width="65" bgcolor="#daf1ff" | [[Sputtering Recipes#Sputter_2_.28SFI_Endeavor.29|Sputter 2<br>(SFI Endeavor)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering_Recipes#Sputter_3_.28AJA_ATC_2000-F.29|Sputter 3<br>(ATC 2000-F)]]
| width="65" bgcolor="#daf1ff" | [[Sputtering_Recipes#Sputter_3_.28AJA_ATC_2000-F.29|Sputter 3<br>(ATC 2000-F)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering_Recipes#Sputter_4_.28AJA_ATC_2200-V.29|Sputter 4<br>(ATC 2200-V)]]
| width="65" bgcolor="#daf1ff" | [[Sputtering_Recipes#Sputter_4_.28AJA_ATC_2200-V.29|Sputter 4<br>(ATC 2200-V)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter_5_.28Lesker_AXXIS.29|Sputter 5 (Lesker AXXIS)]]
| width="65" bgcolor="#daf1ff" | [[Sputtering Recipes#Sputter_5_.28Lesker_AXXIS.29|Sputter 5 (Lesker AXXIS)]]
| width="55" bgcolor="#DAF1FF" | [[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|Ion Beam<br>Deposition (Veeco Nexus)]]
| width="55" bgcolor="#daf1ff" | [[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|Ion Beam<br>Deposition (Veeco Nexus)]]
| width="45" bgcolor="#DAF1FF" | [[Thermal Evaporation Recipes#Thermal_Evap_1|Thermal<br>Evap 1]]
| width="45" bgcolor="#daf1ff" | [[Thermal Evaporation Recipes#Thermal_Evap_1|Thermal<br>Evap 1]]
| width="65" bgcolor="#DAF1FF" | [[Thermal Evaporation Recipes#Thermal_Evap_2_.28Solder.29|Thermal Evap 2 (Solder)]]
| width="65" bgcolor="#daf1ff" | [[Thermal Evaporation Recipes#Thermal_Evap_2_.28Solder.29|Thermal Evap 2 (Solder)]]
| width="65" bgcolor="#DAF1FF" | [[PECVD Recipes#PECVD_1_.28PlasmaTherm_790.29|PECVD 1<br>(PlasmaTherm 790)]]
| width="65" bgcolor="#daf1ff" | [[PECVD Recipes#PECVD_1_.28PlasmaTherm_790.29|PECVD 1<br>(PlasmaTherm 790)]]
| width="65" bgcolor="#DAF1FF" | [[PECVD Recipes#PECVD_2_.28Advanced_Vacuum.29|PECVD 2<br>(Advanced Vacuum)]]
| width="65" bgcolor="#daf1ff" | [[PECVD Recipes#PECVD_2_.28Advanced_Vacuum.29|PECVD 2<br>(Advanced Vacuum)]]
| width="65" bgcolor="#DAF1FF" | [[PECVD_Recipes#ICP-PECVD_.28Unaxis_VLR.29|Unaxis VLR ICP-PECVD]]
| width="65" bgcolor="#daf1ff" | [[PECVD_Recipes#ICP-PECVD_.28Unaxis_VLR.29|Unaxis VLR ICP-PECVD]]
| width="65" bgcolor="#DAF1FF" | [[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition (Oxford FlexAL)]]
| width="65" bgcolor="#daf1ff" | [[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition (Oxford FlexAL)]]
| width="65" bgcolor="#DAF1FF" | [[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]]
| width="65" bgcolor="#daf1ff" | [[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]]
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| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | [[Thermal Evaporation Recipes|A]]
| bgcolor="#eeffff" | [[Thermal Evaporation Recipes|A]]
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
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| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
|-
|-
! bgcolor="#D0E7FF" align="center" | Ir
! align="center" bgcolor="#d0e7ff" | Ir
| {{Al/E1}}
| {{Al/E1}}
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! bgcolor="#D0E7FF" align="center" | ITO
! align="center" bgcolor="#d0e7ff" | ITO
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | {{rl|E-Beam Evaporation Recipes|E-Beam 2 (Custom)|ITO deposition (E-Beam 2)}}
| bgcolor="#eeffff" | {{rl|E-Beam Evaporation Recipes|E-Beam 2 (Custom)|ITO deposition (E-Beam 2)}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | [[Sputtering Recipes|A]]
| bgcolor="#eeffff" | [[Sputtering Recipes|A]]
| bgcolor="EEFFFF" | [[Sputtering Recipes|A]]
| bgcolor="#eeffff" | [[Sputtering Recipes|A]]
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | [[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|A]]
| bgcolor="#eeffff" | [[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|A]]
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
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| {{Al/E2}}
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! bgcolor="#D0E7FF" align="center" | Mo
! align="center" bgcolor="#d0e7ff" | Mo
| bgcolor="EEFFFF" | {{Al/E1}}
| bgcolor="#eeffff" | {{Al/E1}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | [[Sputtering Recipes|R]]
| bgcolor="#eeffff" | [[Sputtering Recipes|R]]
| bgcolor="EEFFFF" | [[Sputtering Recipes|A]]
| bgcolor="#eeffff" | [[Sputtering Recipes|A]]
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
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| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
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|-
|-
! bgcolor="#D0E7FF" align="center" | Nb
! align="center" bgcolor="#d0e7ff" | Nb
| {{Al/E1}}
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! bgcolor="#D0E7FF" align="center" | Ni
! align="center" bgcolor="#d0e7ff" | Ni
| bgcolor="EEFFFF" | {{Al/E1}}
| bgcolor="#eeffff" | {{Al/E1}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | {{Al/E3}}
| bgcolor="#eeffff" | {{Al/E3}}
| bgcolor="EEFFFF" | {{Al/E4}}
| bgcolor="#eeffff" | {{Al/E4}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | {{rl|Sputtering Recipes|Sputter 3 (AJA ATC 2000-F)}}
| bgcolor="#eeffff" | {{rl|Sputtering Recipes|Sputter 3 (AJA ATC 2000-F)}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | [[Thermal Evaporation Recipes|A]]
| bgcolor="#eeffff" | [[Thermal Evaporation Recipes|A]]
| bgcolor="EEFFFF" | [[Thermal Evaporation Recipes|A]]
| bgcolor="#eeffff" | [[Thermal Evaporation Recipes|A]]
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
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|-
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! bgcolor="#D0E7FF" align="center" | NiCr
! align="center" bgcolor="#d0e7ff" | NiCr
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| bgcolor="#eeffff" |
| bgcolor="EEFFFF" |
| bgcolor="#eeffff" |
| bgcolor="EEFFFF" | [[Sputtering Recipes|A]]
| bgcolor="#eeffff" | [[Sputtering Recipes|A]]
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! bgcolor="#D0E7FF" align="center" | Pd
! align="center" bgcolor="#d0e7ff" | Pd
| {{Al/E1}}
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! bgcolor="#D0E7FF" align="center" | Pt
! align="center" bgcolor="#d0e7ff" | Pt
| bgcolor="EEFFFF" | {{Al/E1}}
| bgcolor="#eeffff" | {{Al/E1}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | {{Al/E3}}
| bgcolor="#eeffff" | {{Al/E3}}
| bgcolor="EEFFFF" | {{Al/E4}}
| bgcolor="#eeffff" | {{Al/E4}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | [[Sputtering Recipes|A]]
| bgcolor="#eeffff" | [[Sputtering Recipes|A]]
| bgcolor="EEFFFF" | {{rl|Sputtering Recipes|Sputter 4 (AJA ATC 2200-V)}}
| bgcolor="#eeffff" | {{rl|Sputtering Recipes|Sputter 4 (AJA ATC 2200-V)}}
| bcolor="EEFFFF" | <br>
| bcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | {{rl|Atomic Layer Deposition Recipes|Pt deposition (ALD)}}
| bgcolor="#eeffff" | {{rl|Atomic Layer Deposition Recipes|Pt deposition (ALD)}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
|-
|-
! bgcolor="#D0E7FF" align="center" | Ru
! align="center" bgcolor="#d0e7ff" | Ru
| {{Al/E1}}
| {{Al/E1}}
| <br>
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! bgcolor="#D0E7FF" align="center" | Si
! align="center" bgcolor="#d0e7ff" | Si
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | {{Al/E2}}
| bgcolor="#eeffff" | {{Al/E2}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | [[Sputtering Recipes|R]]
| bgcolor="#eeffff" | [[Sputtering Recipes|R]]
| bgcolor="EEFFFF" | [[Sputtering Recipes|A]]
| bgcolor="#eeffff" | [[Sputtering Recipes|A]]
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | {{rl|PECVD Recipes|PECVD 2 (Advanced Vacuum)|Amorphous-Si deposition (PECVD#2|Amorphous Si Films and Their Stress}}
| bgcolor="#eeffff" | {{rl|PECVD Recipes|PECVD 2 (Advanced Vacuum)|Amorphous-Si deposition (PECVD#2|Amorphous Si Films and Their Stress}}
| bgcolor="EEFFFF" | [[PECVD_Recipes#Amorphous_Si_.28100.25SiH4_Ar_He.29|R]]
| bgcolor="#eeffff" | [[PECVD_Recipes#Amorphous_Si_.28100.25SiH4_Ar_He.29|R]]
| bgcolor="EEFFFF" | <br>
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| bgcolor="EEFFFF" | <br>
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|-
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! bgcolor="#D0E7FF" align="center" | SiN
! align="center" bgcolor="#d0e7ff" | SiN
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! bgcolor="#D0E7FF" align="center" | SiO<sub>2</sub>
! align="center" bgcolor="#d0e7ff" | SiO<sub>2</sub>
| bgcolor="EEFFFF" | {{Al/E1}}
| bgcolor="#eeffff" | {{Al/E1}}
| bgcolor="EEFFFF" | {{Al/E2}}
| bgcolor="#eeffff" | {{Al/E2}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | {{rl|Sputtering Recipes|SiO2 deposition (Sputter 3)}}
| bgcolor="#eeffff" | {{rl|Sputtering Recipes|SiO2 deposition (Sputter 3)}}
| bgcolor="EEFFFF" | [[Sputtering Recipes|A]]
| bgcolor="#eeffff" | [[Sputtering Recipes|A]]
| bgcolor="EEFFFF" | [[Sputtering Recipes|A]]
| bgcolor="#eeffff" | [[Sputtering Recipes|A]]
| bgcolor="EEFFFF" | [[Sputtering_Recipes#SiO2_deposition_.28IBD.29|R]]
| bgcolor="#eeffff" | [[Sputtering_Recipes#SiO2_deposition_.28IBD.29|R]]
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #1)}}
| bgcolor="#eeffff" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #1)}}
| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #2)}}
| bgcolor="#eeffff" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #2)}}
| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (Unaxis VLR)}}
| bgcolor="#eeffff" | {{rl|PECVD Recipes|SiO2 deposition (Unaxis VLR)}}
| bgcolor="EEFFFF" | {{rl|Atomic Layer Deposition Recipes|SiO2 deposition (ALD)}}
| bgcolor="#eeffff" | {{rl|Atomic Layer Deposition Recipes|SiO2 deposition (ALD)}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
|-
|-
! bgcolor="#D0E7FF" align="center" | SiO<sub>x</sub>N<sub>y</sub>
! align="center" bgcolor="#d0e7ff" | SiO<sub>x</sub>N<sub>y</sub>
| <br>
| <br>
| <br>
| <br>
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! bgcolor="#D0E7FF" align="center" | Sn
! align="center" bgcolor="#d0e7ff" | Sn
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | [[Thermal Evaporation Recipes|A]]
| bgcolor="#eeffff" | [[Thermal Evaporation Recipes|A]]
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
|-
|-
! bgcolor="#D0E7FF" align="center" | SrF<sub>2</sub>
! align="center" bgcolor="#d0e7ff" | SrF<sub>2</sub>
| <br>
| <br>
| {{Al/E2}}
| {{Al/E2}}
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! bgcolor="#D0E7FF" align="center" | Ta
! align="center" bgcolor="#d0e7ff" | Ta
| bgcolor="EEFFFF" | {{Al/E1}}
| bgcolor="#eeffff" | {{Al/E1}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | {{rl|Sputtering Recipes|Ta deposition (Sputter 3)}}
| bgcolor="#eeffff" | {{rl|Sputtering Recipes|Ta deposition (Sputter 3)}}
| bgcolor="EEFFFF" | [[Sputtering Recipes|A]]
| bgcolor="#eeffff" | [[Sputtering Recipes|A]]
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
|-
|-
! bgcolor="#D0E7FF" align="center" | Ta<sub>2</sub>O<sub>5</sub>
! align="center" bgcolor="#d0e7ff" | Ta<sub>2</sub>O<sub>5</sub>
| <br>
| <br>
| <br>
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! bgcolor="#D0E7FF" align="center" | Ti
! align="center" bgcolor="#d0e7ff" | Ti
| bgcolor="EEFFFF" | {{Al/E1}}
| bgcolor="#eeffff" | {{Al/E1}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | {{Al/E3}}
| bgcolor="#eeffff" | {{Al/E3}}
| bgcolor="EEFFFF" | {{Al/E4}}
| bgcolor="#eeffff" | {{Al/E4}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | [[Sputtering Recipes|A]] {{rl|Sputtering Recipes|Sputter 3 (AJA ATC 2000-F)}}
| bgcolor="#eeffff" | [[Sputtering Recipes|A]] {{rl|Sputtering Recipes|Sputter 3 (AJA ATC 2000-F)}}
| bgcolor="EEFFFF" | {{rl|Sputtering Recipes|Ti-Au Deposition (Sputter 4)}}
| bgcolor="#eeffff" | {{rl|Sputtering Recipes|Ti-Au Deposition (Sputter 4)}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
|-
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! bgcolor="#D0E7FF" align="center" | TiN
! align="center" bgcolor="#d0e7ff" | TiN
| <br>
| <br>
| <br>
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! bgcolor="#D0E7FF" align="center" | TiW
! align="center" bgcolor="#d0e7ff" | TiW
| bgcolor="EEFFFF" | {{Al/E1}}
| bgcolor="#eeffff" | {{Al/E1}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | [[Sputtering Recipes|A]]
| bgcolor="#eeffff" | [[Sputtering Recipes|A]]
| bgcolor="EEFFFF" | {{rl|Sputtering Recipes|W-TiW Deposition (Sputter 4)}}
| bgcolor="#eeffff" | {{rl|Sputtering Recipes|W-TiW Deposition (Sputter 4)}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
|-
|-
! bgcolor="#D0E7FF" align="center" | TiO<sub>2</sub>
! align="center" bgcolor="#d0e7ff" | TiO<sub>2</sub>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | {{Al/E2}}
| bgcolor="#eeffff" | {{Al/E2}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | {{Rl|Sputtering Recipes|TiO2 deposition (Sputter 2)}}
| bgcolor="#eeffff" | {{Rl|Sputtering Recipes|TiO2 deposition (Sputter 2)}}
| bgcolor="EEFFFF" | [[Sputtering Recipes|A]]
| bgcolor="#eeffff" | [[Sputtering Recipes|A]]
| bgcolor="EEFFFF" | [[Sputtering Recipes|A]] {{rl|Sputtering Recipes|Sputter 4 (AJA ATC 2200-V)}}
| bgcolor="#eeffff" | [[Sputtering Recipes|A]] {{rl|Sputtering Recipes|Sputter 4 (AJA ATC 2200-V)}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | [[Sputtering_Recipes#TiO2_deposition_.28IBD.29|R]]
| bgcolor="#eeffff" | [[Sputtering_Recipes#TiO2_deposition_.28IBD.29|R]]
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | {{rl|Atomic Layer Deposition Recipes|TiO2 deposition (ALD)}}
| bgcolor="#eeffff" | {{rl|Atomic Layer Deposition Recipes|TiO2 deposition (ALD)}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
|-
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! bgcolor="#D0E7FF" align="center" | V
! align="center" bgcolor="#d0e7ff" | V
| <br>
| <br>
| <br>
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! bgcolor="#D0E7FF" align="center" | W
! align="center" bgcolor="#d0e7ff" | W
| bgcolor="EEFFFF" | {{Al/E1}}
| bgcolor="#eeffff" | {{Al/E1}}
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
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| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="#eeffff" | <br>
| bgcolor="EEFFFF" | [[Sputtering Recipes|A]]
| bgcolor="#eeffff" | [[Sputtering Recipes|A]]
| bgcolor="EEFFFF" | {{rl|Sputtering Recipes|W deposition (Sputter 4)}}
| bgcolor="#eeffff" | {{rl|Sputtering Recipes|W deposition (Sputter 4)}}
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! align="center" bgcolor="#d0e7ff" | Zn
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! bgcolor="#D0E7FF" align="center" | ZnO
! align="center" bgcolor="#d0e7ff" | ZnO
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| bgcolor="EEFFFF" | {{rl|Atomic Layer Deposition Recipes|ZnO deposition (ALD)}}
| bgcolor="#eeffff" | {{rl|Atomic Layer Deposition Recipes|ZnO deposition (ALD)}}
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! bgcolor="#D0E7FF" align="center" | Zr
! align="center" bgcolor="#d0e7ff" | Zr
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! bgcolor="#D0E7FF" align="center" | ZrO<sub>2</sub>
! align="center" bgcolor="#d0e7ff" | ZrO<sub>2</sub>
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| bgcolor="EEFFFF" | {{rl|Atomic Layer Deposition Recipes|ZrO2 deposition (ALD)}}
| bgcolor="#eeffff" | {{rl|Atomic Layer Deposition Recipes|ZrO2 deposition (ALD)}}
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! width="20" bgcolor="#D0E7FF" align="center" | '''Material'''
! width="20" align="center" bgcolor="#d0e7ff" | '''Material'''
| width="65" bgcolor="#DAF1FF" | [[E-Beam Evaporation Recipes#E-Beam_1_.28Sharon.29|E-Beam 1 (Sharon)]]
| width="65" bgcolor="#daf1ff" | [[E-Beam Evaporation Recipes#E-Beam_1_.28Sharon.29|E-Beam 1 (Sharon)]]
| width="65" bgcolor="#DAF1FF" | [[E-Beam Evaporation Recipes#E-Beam_2_.28Custom.29|E-Beam 2 (Custom)]]
| width="65" bgcolor="#daf1ff" | [[E-Beam Evaporation Recipes#E-Beam_2_.28Custom.29|E-Beam 2 (Custom)]]
| width="65" bgcolor="#DAF1FF" | [[E-Beam Evaporation Recipes#E-Beam_3_.28Temescal.29|E-Beam 3 (Temescal)]]
| width="65" bgcolor="#daf1ff" | [[E-Beam Evaporation Recipes#E-Beam_3_.28Temescal.29|E-Beam 3 (Temescal)]]
| width="65" bgcolor="#DAF1FF" | [[E-Beam Evaporation Recipes#E-Beam_4_.28CHA.29|E-Beam 4 (CHA)]]
| width="65" bgcolor="#daf1ff" | [[E-Beam Evaporation Recipes#E-Beam_4_.28CHA.29|E-Beam 4 (CHA)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter_1_.28Custom.29|Sputter 1 (Custom)]]
| width="65" bgcolor="#daf1ff" | [[Sputtering Recipes#Sputter_1_.28Custom.29|Sputter 1 (Custom)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter_2_.28SFI_Endeavor.29|Sputter 2<br>(SFI Endeavor)]]
| width="65" bgcolor="#daf1ff" | [[Sputtering Recipes#Sputter_2_.28SFI_Endeavor.29|Sputter 2<br>(SFI Endeavor)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter_3_.28ATC_2000-F.29|Sputter 3<br>(ATC 2000-F)]]
| width="65" bgcolor="#daf1ff" | [[Sputtering Recipes#Sputter_3_.28ATC_2000-F.29|Sputter 3<br>(ATC 2000-F)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering_Recipes#Sputter_4_.28AJA_ATC_2200-V.29|Sputter 4<br>(ATC 2200-V)]]
| width="65" bgcolor="#daf1ff" | [[Sputtering_Recipes#Sputter_4_.28AJA_ATC_2200-V.29|Sputter 4<br>(ATC 2200-V)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter_5_.28Lesker_AXXIS.29|Sputter 5 (Lesker AXXIS)]]
| width="65" bgcolor="#daf1ff" | [[Sputtering Recipes#Sputter_5_.28Lesker_AXXIS.29|Sputter 5 (Lesker AXXIS)]]
| width="55" bgcolor="#DAF1FF" | [[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|Ion Beam<br>Deposition (Veeco Nexus)]]
| width="55" bgcolor="#daf1ff" | [[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|Ion Beam<br>Deposition (Veeco Nexus)]]
| width="45" bgcolor="#DAF1FF" | [[Thermal Evaporation Recipes#Thermal_Evap_1|Thermal<br>Evap 1]]
| width="45" bgcolor="#daf1ff" | [[Thermal Evaporation Recipes#Thermal_Evap_1|Thermal<br>Evap 1]]
| width="65" bgcolor="#DAF1FF" | [[Thermal Evaporation Recipes#Thermal_Evap_2_.28Solder.29|Thermal Evap 2 (Solder)]]
| width="65" bgcolor="#daf1ff" | [[Thermal Evaporation Recipes#Thermal_Evap_2_.28Solder.29|Thermal Evap 2 (Solder)]]
| width="65" bgcolor="#DAF1FF" | [[PECVD Recipes#PECVD_1_.28PlasmaTherm_790.29|PECVD 1<br>(PlasmaTherm 790)]]
| width="65" bgcolor="#daf1ff" | [[PECVD Recipes#PECVD_1_.28PlasmaTherm_790.29|PECVD 1<br>(PlasmaTherm 790)]]
| width="65" bgcolor="#DAF1FF" | [[PECVD Recipes#PECVD_2_.28Advanced_Vacuum.29|PECVD 2<br>(Advanced Vacuum)]]
| width="65" bgcolor="#daf1ff" | [[PECVD Recipes#PECVD_2_.28Advanced_Vacuum.29|PECVD 2<br>(Advanced Vacuum)]]
| width="65" bgcolor="#DAF1FF" | [[PECVD_Recipes#ICP-PECVD_.28Unaxis_VLR.29|Unaxis VLR ICP-PECVD]]
| width="65" bgcolor="#daf1ff" | [[PECVD_Recipes#ICP-PECVD_.28Unaxis_VLR.29|Unaxis VLR ICP-PECVD]]
| width="65" bgcolor="#DAF1FF" | [[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition (Oxford FlexAl)]]
| width="65" bgcolor="#daf1ff" | [[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition (Oxford FlexAl)]]
| width="65" bgcolor="#DAF1FF" | [[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]]
| width="65" bgcolor="#daf1ff" | [[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]]
|}
|}


Revision as of 15:42, 19 September 2017

  • R = Recipe is available. Clicking this link will take you to the recipe.
  • A = Material is available for use, but no recipes are provided.
Vacuum Deposition Recipes

 E-Beam Evaporation Sputtering Thermal Evaporation Plasma Enhanced Chemical
Vapor Deposition (PECVD) 		Atomic Layer Deposition Molecular Vapor Deposition
Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 1 (Custom) Sputter 2
(SFI Endeavor) 		Sputter 3
(ATC 2000-F) 		Sputter 4
(ATC 2200-V) 		Sputter 5 (Lesker AXXIS) Ion Beam
Deposition (Veeco Nexus) 		Thermal
Evap 1 		Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790) 		PECVD 2
(Advanced Vacuum) 		Unaxis VLR ICP-PECVD Atomic Layer Deposition (Oxford FlexAL) Molecular Vapor Deposition (Tool)
Ag A
A A

A A








Al A
A A
R1 A R

A A




Al2O3 A A



A A
A




R1
AlN




R1 A A
A




R1
Au A
A A
R1 A R1

A A




B
















C R1
CeO2
CeO2 deposition (E-Beam 2)














Co A

A

R









Cr A

A

R


A A




Cu A




A R1 A








Fe A

A

R









Ge A
A A

A A








GeO2 A
Gd A

A












Hf A















HfO2





A A






R1
In










A




Ir A















ITO
ITO deposition (E-Beam 2)



A A
A






MgF2 A A
MgO A
Mo A




R A








Nb A





R








Nd





A








Ni A
A A

R1


A A




NiCr A A
NiFe A A A
Pd A
A A





A A




Pt A
A A

A R1






R1
Ru A

A












Si
A



R A




Amorphous-Si deposition (PECVD#2 R

SiN





R1 A
R

R1 R1 R1

SiO2 A A



R1 A A R

R1 R1 R1 R1
SiOxNy








A

R



Sn










A




SrF2
A














Ta A




R1 A








Ta2O5


A




R






Ti A
A A

A R1 R1








TiN




A
R
A




R1
TiW A




A R1








TiO2
A


R1 A A R1
R




R1
V





A A








W A




A R1








Zn









A A




ZnO














R1
Zr A

A

A A








ZrO2














R1
Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 1 (Custom) Sputter 2
(SFI Endeavor) 		Sputter 3
(ATC 2000-F) 		Sputter 4
(ATC 2200-V) 		Sputter 5 (Lesker AXXIS) Ion Beam
Deposition (Veeco Nexus) 		Thermal
Evap 1 		Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790) 		PECVD 2
(Advanced Vacuum) 		Unaxis VLR ICP-PECVD Atomic Layer Deposition (Oxford FlexAl) Molecular Vapor Deposition (Tool)
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