Don Freeborn: Difference between revisions
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Freeborn d (talk | contribs) (Linked the Fluorine etch page.) |
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{{staff|{{PAGENAME}} |
{{staff|{{PAGENAME}} |
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|position = Senior Development Engineer |
|position = Senior Development Engineer |
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|room = |
|room = 1109B |
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|phone = (805) 839- |
|phone = (805) 839-7975 |
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|cell = |
|cell = |
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|email = dfreeborn@ |
|email = dfreeborn@ucsb.edu |
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}} |
}} |
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=About= |
=About= |
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. |
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Current Work |
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=Current Work= |
=Current Work= |
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. |
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Tools |
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=Tools= |
=Tools= |
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{{PAGENAME}} |
{{PAGENAME}} is in charge of the following tools: |
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is in charge of the following tools: |
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{| |
{| |
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|- valign="top" |
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*[[PECVD 1 (PlasmaTherm 790)]] |
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* |
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*[[PECVD 2 (Advanced Vacuum)]] |
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*Plasma Therm DSE-iii(Plasma-Therm/Deep Silicon Etcher) |
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*[[Wafer Bonder (SUSS SB6-8E)]] |
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*[[E-Beam 3 (Temescal)]] |
*[[E-Beam 3 (Temescal)]] |
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*[[E-Beam 4 (CHA)]] |
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*[[Surface Analysis (KLA/Tencor Surfscan)]] |
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*[[Thermal Evap 1]] |
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*[[Plasma-Therm SLR: Fluorine ICP]] |
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*[[ |
*[[Thermal Evap 2 (Solder)]] |
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*[[XeF2 Etch (Xetch)|XeF<sub>2</sub> Etch (Xetch)]] |
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*[[Spin Rinse Dryer (SemiTool)]] |
*[[Spin Rinse Dryer (SemiTool)]] |
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*[[Vacuum Sealer]] |
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*[[Chemical-Mechanical Polisher (Logitech)]] |
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*[[SEM Sample Coater (Hummer)]] |
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Latest revision as of 16:48, 28 October 2021
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About
.
Current Work
.
Tools
Don Freeborn is in charge of the following tools: