Autostep 200 Troubleshooting and Recovery: Difference between revisions

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If there is an issue with the tool that requires troubleshooting and recovery, please follow instructions bellow carefully.
WIP...


= Troubleshooting =
=Troubleshooting=
Most of the errors are listed on the paper that is attached to the tall cabinet. Here are the most common ones:
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What to do in case of computer (monitor) freeze-up.  Please try these things in this order.


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===What to do in case of computer (monitor) freeze-up===
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1)    Try CTRL C followed by A and Enter.  This will abort any command that may have hung up.
  Please try these things in this order.


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#Try CTRL C followed by A and Enter.  This will abort any command that may have hung up. Fallow instructions ( tall cabinet, printed paper on the wall)
2)    For Reticle Robot Hang Up:  See step 25 of start-up procedure. 
#For Reticle Robot Hang Up:  See step 25 of start-up procedure


What to do in case of unplanned power outage.
===What to do in case of unplanned power outage.===


     1)  CR Staff will take care of the system in the morning.
#CR Staff will take care of the system in the morning.


What to do for alignment error.
===What to do for an alignment error===


1)   Verify that correct alignment key offset is being used
#Verify that correct alignment key offset is being used (check sign convention)
#Verify that correct pass shift is being used (check sign convention)
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#If you have DFAS alignment marks, perform a MAP job to verify alignment ( check sign convention)


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===What to do for focus resolution problems===
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2)   If you have DFAS alignment marks, perform a MAP job to verify alignment.


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#Perform a focus (EXPO) job using the same type of wafer that you will use for your real job and use the optimal focus offset determined from this job.  You may need to look at both exposure time and focus.
⚫
What to do for focus resolution problems.
⚫
#If you have been running the same process and now have issues, run SETUP from the : prompt, following the instructions on the GCA Regular Maintenance Sheet.
#Verify that you are using correct chuck for a substrate that you are exposing (each chuck has a specific thickness)


===What to do in case of the stage limit going too far===
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1)   Perform a focus (EXPO) job using the same type of wafer that you will use for your real job and use the optimal focus offset determined from this job.  You may need to look at both exposure time and focus.


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#Red stage limit light will be lit inside the stepper chamber next to the joystick.
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2)   If you have been running the same process and now have issues, run SETUP from the : prompt, following the instructions on the GCA Regular Maintenance Sheet.
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#Press the lit limit switch (lower left corner in the environmental chamber) to release the stage.


===What to do if you cannot undo the problem or need some help===
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What to do in case of the stage limit going too far (red stage limit light will be lit inside the stepper chamber next to the joystick.


#contact [[Biljana Stamenic]]: if it is job related or need some help in using the tool
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1)   Press the lit limit switch to release the stage.
#contact [[Lee Sawyer]]: if it is something wrong with the tool/broken

#contact [[Mike Silva]] if neither Lee Sawyer or Biljana Stamenic can be reached
Contacts to call if you cannot undo the problem. Do not call after 10 p.m. unless there is a real emergency (A deadline for a paper or conference is not a real emergency)
#NOTE: If the tool is down, leave a note by tool. Report the issue on SignupMonkey, by clicking the '''''[Report Tool Issue]''''' button for the AutoStep.

1)    Mike Silva : x 3918 x 219 Work

2)    Brian Thibeault : x 2268 Work

3)    Biljana Stamenic:x4002 Work

4)    3c technical.  (These guys know all about the stepper, they rebuilt it and service it under contract for us).   Ask for Matt or Adam.
         matt@3ctechnical.com

         www.3ctechnical.com

         480-963-4559 voice

         480.212.0932 fax

5)    Send e-mail to nanofab@ece.ucsb.edu and report the problem.

==Restarting procedure==
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If there is an error that requires powering down/ powering up components, please follow carefully instructions bellow.

=='''How to <u>power down</u> components''' ==

1) Press '''“ctrl C & A”''' to abort any currently running process.

2) If the system is frozen skip to step 3

If not, press '''“ctrl & ]''' (right bracket) “ on the '''upper keyboard.''' (The main keyboard under the alignment screens)
[[File:Autostep 200 Upper keyboard.png|frame|none]]

3) Open the lower cabinet and pull out the lower keyboard, quickly press '''“scroll lock”''' twice followed immediately by the '''“up arrow key”.'''
[[File:Lower keyboard.png|none|thumb]]
4) On the same lower keyboard, press “'''alt & x'''”.

5) Press “'''enter”'''.

6) In the lower cabinet, turn off '''the computer (#2)-(smart set)''' below the keyboard. Press the '''power''' button.
[[File:Computer-2 -smart set.png|none|thumb]]
7) Retrieve the keys on the key chain (located in the lower cabinet in front of the computer).

8) Open the tall cabinet to the left.
[[File:Autostep Cabinet .png|none|thumb]]
9) Use the keys to open the locked '''main computer (#1) - (kontron)'''. It is the black flip down module. Turn off this computer.
[[File:Autostep main computer -1.png|left|thumb|191x191px]]
[[File:Autostep main computer switch.png|none|thumb|189x189px]]

10) Go down the rack and turn off each control module. '''Do NOT turn off''' the lamp power supply '''OR''' the '''AC''' interface/ Power interface.

11) '''DSW/IAS - II''' control module: Should already be off. (power switch is on the right)

12) '''DSW/AWH Control''' module: Switch it off. (power switch is on the right)

'''1'''3) '''Stage Control''' module: Switch it off. (power switch is on the right)

14) '''RMS Control''' module: Switch it off. (power switch is on the left)
[[File:Autostep DSW.png|left|thumb]]
[[File:Autostep stage control.png|none|thumb]]
[[File:RMS control.png|thumb|none]]
15) '''DO NOT TURN OFF THE LAMP'''


=='''How to <u>power up</u> components''' ==

1)

Latest revision as of 23:55, 31 January 2022

If there is an issue with the tool that requires troubleshooting and recovery, please follow instructions bellow carefully.

Troubleshooting

Most of the errors are listed on the paper that is attached to the tall cabinet. Here are the most common ones:

What to do in case of computer (monitor) freeze-up

  Please try these things in this order.

  1. Try CTRL C followed by A and Enter.  This will abort any command that may have hung up. Fallow instructions ( tall cabinet, printed paper on the wall)
  2. For Reticle Robot Hang Up:  See step 25 of start-up procedure

What to do in case of unplanned power outage.

  1. CR Staff will take care of the system in the morning.

What to do for an alignment error

  1. Verify that correct alignment key offset is being used (check sign convention)
  2. Verify that correct pass shift is being used (check sign convention)
  3. If you have DFAS alignment marks, perform a MAP job to verify alignment ( check sign convention)

What to do for focus resolution problems

  1. Perform a focus (EXPO) job using the same type of wafer that you will use for your real job and use the optimal focus offset determined from this job.  You may need to look at both exposure time and focus.
  2. If you have been running the same process and now have issues, run SETUP from the : prompt, following the instructions on the GCA Regular Maintenance Sheet.
  3. Verify that you are using correct chuck for a substrate that you are exposing (each chuck has a specific thickness)

What to do in case of the stage limit going too far

  1. Red stage limit light will be lit inside the stepper chamber next to the joystick.
  2. Press the lit limit switch (lower left corner in the environmental chamber) to release the stage.

What to do if you cannot undo the problem or need some help

  1. contact Biljana Stamenic: if it is job related or need some help in using the tool
  2. contact Lee Sawyer: if it is something wrong with the tool/broken
  3. contact Mike Silva if neither Lee Sawyer or Biljana Stamenic can be reached
  4. NOTE: If the tool is down, leave a note by tool. Report the issue on SignupMonkey, by clicking the [Report Tool Issue] button for the AutoStep.
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