Autostep 200 Troubleshooting and Recovery: Difference between revisions

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If there is an issue with the tool that requires troubleshooting and recovery, please follow instructions bellow carefully.
If there is an issue with the tool that requires troubleshooting and recovery, please follow instructions bellow carefully.


= Troubleshooting =
=Troubleshooting=
Most of the errors are listed on the paper that is attached to the tall cabinet. Here are the most common ones:
Most of the errors are listed on the paper that is attached to the tall cabinet. Here are the most common ones:


What to do in case of computer (monitor) freeze-up.  Please try these things in this order.
===What to do in case of computer (monitor) freeze-up===
  Please try these things in this order.
⚫
# Try CTRL C followed by A and Enter.  This will abort any command that may have hung up.
⚫
# For Reticle Robot Hang Up:  See step 25 of start-up procedure ( tall cabinet, printed paper on the wall). 
⚫
What to do in case of unplanned power outage.
⚫
# CR Staff will take care of the system in the morning.
⚫
What to do for alignment error.
⚫
# Verify that correct alignment key offset is being used
⚫
# If you have DFAS alignment marks, perform a MAP job to verify alignment.
⚫
What to do for focus resolution problems.
⚫
# Perform a focus (EXPO) job using the same type of wafer that you will use for your real job and use the optimal focus offset determined from this job.  You may need to look at both exposure time and focus.
⚫
# If you have been running the same process and now have issues, run SETUP from the : prompt, following the instructions on the GCA Regular Maintenance Sheet.
⚫
What to do in case of the stage limit going too far (red stage limit light will be lit inside the stepper chamber next to the joystick.
⚫
# Press the lit limit switch (lower left corner in the environmental chamber) to release the stage.
⚫
What to do if you cannot undo the problem or something is wrong with the tool:
* send e-mail to '''nanofab@ucsb.edu''' and report the problem
* contact 1) '''Mike Silva''' : x 3918 x 219 Work, 2) '''Biljana Stamenic''':x4002 Work, or '''Lee Sawyer''': Work)


⚫
#Try CTRL C followed by A and Enter.  This will abort any command that may have hung up. Fallow instructions ( tall cabinet, printed paper on the wall)
* contact 2) '''3Ctechnical''' (Ask for Matt, Adam or Mike). The contact info bellow:
⚫
#For Reticle Robot Hang Up:  See step 25 of start-up procedure
         (matt@3ctechnical.com, www.3ctechnical.com, phone: 480-963-4559, fax: 480.212.0932)         


⚫
===What to do in case of unplanned power outage.===
=System restarting procedure=
If there is an error that requires powering down/ powering up components, please follow step by step instructions bellow.


⚫
#CR Staff will take care of the system in the morning.
==How to <u>power down</u> components ==


⚫
===What to do for an alignment error===
1) Press '''“ctrl C & A”''' on '''the upper keyboard''' to abort any currently running process.


⚫
#Verify that correct alignment key offset is being used (check sign convention)
2) If the system is frozen skip to step 3
#Verify that correct pass shift is being used (check sign convention)
⚫
#If you have DFAS alignment marks, perform a MAP job to verify alignment ( check sign convention)


⚫
===What to do for focus resolution problems===
If not, press '''“ctrl & ]''' (right bracket) “ on the '''upper keyboard.''' (The main keyboard under the alignment screens)
[[File:Autostep 200 Upper keyboard.png|frame|none]]


⚫
#Perform a focus (EXPO) job using the same type of wafer that you will use for your real job and use the optimal focus offset determined from this job.  You may need to look at both exposure time and focus.
3) Open the lower cabinet and pull out '''the lower keyboard''', quickly press '''“scroll lock”''' twice followed immediately by the '''“up''' arrow key'''”.'''
⚫
#If you have been running the same process and now have issues, run SETUP from the : prompt, following the instructions on the GCA Regular Maintenance Sheet.
[[File:Lower keyboard.png|none|thumb]]
#Verify that you are using correct chuck for a substrate that you are exposing (each chuck has a specific thickness)
4) On the same lower keyboard, press “'''alt & x'''”.


===What to do in case of the stage limit going too far===
5) Press “'''enter”'''.


⚫
#Red stage limit light will be lit inside the stepper chamber next to the joystick.
6) In the lower cabinet, turn off '''the computer (#2)-(smart set)''' below the keyboard. Press the '''power''' button.
⚫
#Press the lit limit switch (lower left corner in the environmental chamber) to release the stage.
[[File:Computer-2 -smart set.png|none|thumb]]
7) Retrieve the keys on the key chain (located in the lower cabinet in front of the computer).


⚫
===What to do if you cannot undo the problem or need some help===
8) Open the tall cabinet to the left.
[[File:Autostep Cabinet .png|none|thumb]]
9) Use the keys to open the locked '''main computer (#1) - (kontron)'''. It is the black flip down module. Turn off this computer.
[[File:Autostep main computer -1.png|left|thumb|191x191px]]
[[File:Autostep main computer switch.png|none|thumb|189x189px]]


#contact [[Biljana Stamenic]]: if it is job related or need some help in using the tool
10) Go down the rack and turn off each control module. '''Do NOT turn off''' the lamp power supply '''OR''' the '''AC''' interface/ Power interface.
#contact [[Lee Sawyer]]: if it is something wrong with the tool/broken

#contact [[Mike Silva]] if neither Lee Sawyer or Biljana Stamenic can be reached
11) '''DSW/IAS - II''' control module: Should already be '''OFF'''.
#NOTE: If the tool is down, leave a note by tool. Report the issue on SignupMonkey, by clicking the '''''[Report Tool Issue]''''' button for the AutoStep.

12) '''DSW/AWH Control''' module: Switch it '''OFF'''. (power switch is on the right)

'''1'''3) '''Stage Control''' module: Switch it '''OFF'''. (power switch is on the right)

14) '''RMS Control''' module: Switch it '''OFF'''. (power switch is on the left)
[[File:Autostep DSW.png|left|thumb]]
[[File:Autostep stage control.png|none|thumb]]
[[File:RMS control.png|thumb|none]]
15) '''DO NOT TURN OFF THE LAMP'''


==How to <u>power up</u> components ==

Power up the control modules, turning it ON following this order:
# '''RMS Control''' module: Switch it '''ON'''.
# '''Stage Control''' module: Switch it '''ON'''.
# '''DSW/AWH Control''' module: Switch it '''ON'''.
# '''DSW/IAS - II control''' module: Leave it '''OFF'''.
# Switch on the '''main computer (#1) - (kontron)''' and lock the cover.
# Open the upper panel door, above the locked '''computer (#1)'''. '''Press and hold the black reset button for 2 sec'''.
# Close the tall cabinet door.
# Put the keys back in front of '''the computer (#2)''' in the lower cabinet.  
# Switch on the computer under the keyboard in the cabinet. Press the '''power''' button.
# On the '''lower keyboard''' press “'''enter'''” to default to the command prompt, or wait and it will default for you.  
# Press “'''enter'''” twice to clear wait prompts.
# Press “'''F10'''”.
# '''Arrow to the right''' <u>twice</u> to the stepper menu.
# '''Arrow down''' one to highlight the “'''start'''” option. Press “'''enter'''” again.
# On the '''middle keyboard''' press “'''caps lock'''”.
# Wait for the '''system to prompt''' you to <u>'''enter the date and time'''</u> on the middle key board. '''HH:MM DD-MMM-YY''' as in '''01:15 27-JUL-20'''. Press “'''enter'''”.
# Open the lower cabinet and pull out the '''lower keyboard''', quickly press “'''scroll lock'''” <u>twice</u> followed immediately by the “'''up arrow key”. This will switch the upper monitor for setup execution'''.
# Log in to your account. '''Log In [10, xxx]'''
# Type “'''RESET'''” and “'''enter'''”. Look at the mask loading robot and make sure it is facing the reticle mask box correctly. It may misalign toward you a little. This is bad. Go to error section (RMS error).
# If Mask is still on, type “'''RMSR'''” to remove mask.
# Run “'''INV'''” to inventory the masks in the elevator.
# “'''SETUP'''” align target and press “'''expose'''”.
# System is ready to run.

Latest revision as of 23:55, 31 January 2022

If there is an issue with the tool that requires troubleshooting and recovery, please follow instructions bellow carefully.

Troubleshooting

Most of the errors are listed on the paper that is attached to the tall cabinet. Here are the most common ones:

What to do in case of computer (monitor) freeze-up

  Please try these things in this order.

  1. Try CTRL C followed by A and Enter.  This will abort any command that may have hung up. Fallow instructions ( tall cabinet, printed paper on the wall)
  2. For Reticle Robot Hang Up:  See step 25 of start-up procedure

What to do in case of unplanned power outage.

  1. CR Staff will take care of the system in the morning.

What to do for an alignment error

  1. Verify that correct alignment key offset is being used (check sign convention)
  2. Verify that correct pass shift is being used (check sign convention)
  3. If you have DFAS alignment marks, perform a MAP job to verify alignment ( check sign convention)

What to do for focus resolution problems

  1. Perform a focus (EXPO) job using the same type of wafer that you will use for your real job and use the optimal focus offset determined from this job.  You may need to look at both exposure time and focus.
  2. If you have been running the same process and now have issues, run SETUP from the : prompt, following the instructions on the GCA Regular Maintenance Sheet.
  3. Verify that you are using correct chuck for a substrate that you are exposing (each chuck has a specific thickness)

What to do in case of the stage limit going too far

  1. Red stage limit light will be lit inside the stepper chamber next to the joystick.
  2. Press the lit limit switch (lower left corner in the environmental chamber) to release the stage.

What to do if you cannot undo the problem or need some help

  1. contact Biljana Stamenic: if it is job related or need some help in using the tool
  2. contact Lee Sawyer: if it is something wrong with the tool/broken
  3. contact Mike Silva if neither Lee Sawyer or Biljana Stamenic can be reached
  4. NOTE: If the tool is down, leave a note by tool. Report the issue on SignupMonkey, by clicking the [Report Tool Issue] button for the AutoStep.
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