Processing - How Do I…?: Difference between revisions
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== Lithography == |
== Lithography == |
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=== Mask Plates - How do I order a mask plate? === |
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* [[Mask Making Guidelines for Contact Aligners|How to order a contact mask plate]] |
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* [[Autostep 200 Mask Making Guidance|How to order a mask plate for the GCA Steppers]] |
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* [[Stepper 3 (ASML DUV)#Mask Design and CAD files|How to order an ASML mask plate]] |
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=== Calibration - How do I determine the correct exposure Dose/Focus? === |
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On tools that have motorized autofocus (steppers & direct-write litho tools), you often need to analyze both the Focus Offset & Exposure Dose simultaneously. (Remember that "Focus Offset" is an offset from the autofocus' "zero" position of the wafer surface.) These tools will have a function for shooting a "Focus Exposure Matrix/Array", or "FEM/FEA", which exposes a grid with Dose varying in one direction, and Focus varying in another - the following explains how to find the [https://en.wikipedia.org/wiki/Process_window Process Window] from your FEM: |
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* [[Lithography Calibration - Analyzing a Focus-Exposure Matrix]] |
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== Deposition == |
== Deposition == |
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Revision as of 04:37, 23 October 2024
Below are answers to common processing questions in the NanoFab.
Lithography
Mask Plates - How do I order a mask plate?
- How to order a contact mask plate
- How to order a mask plate for the GCA Steppers
- How to order an ASML mask plate
Calibration - How do I determine the correct exposure Dose/Focus?
On tools that have motorized autofocus (steppers & direct-write litho tools), you often need to analyze both the Focus Offset & Exposure Dose simultaneously. (Remember that "Focus Offset" is an offset from the autofocus' "zero" position of the wafer surface.) These tools will have a function for shooting a "Focus Exposure Matrix/Array", or "FEM/FEA", which exposes a grid with Dose varying in one direction, and Focus varying in another - the following explains how to find the Process Window from your FEM:
Deposition
Metal Deposition
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Dielectric/Insulator Deposition
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Etching
Dry (plasma) Etching
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Wet (chemical) Etching
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Materials
Material "Quality"
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Alloying metals
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Impurities
Experiment Setup
Design of Experiments
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Tracking your processes
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