Biljana Stamenic: Difference between revisions
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(→Tools: added stepper #1/2 + Surfscan) |
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=Tools= |
=Tools= |
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{{PAGENAME}} is in charge of the following tools: |
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* [[Stepper_1_(GCA_6300)|Stepper 1 (GCA 6300)]] |
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* [[Stepper 2 (AutoStep 200)|Stepper 2 (AutoStep 200, i-line)]] |
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* [[Surface_Analysis_(KLA/Tencor_Surfscan)|Surface Analysis (KLA/Tencor Surfscan)]] |
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Revision as of 08:03, 30 January 2019
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About
Biljana is the senior development engineer for the facility and is responsible for process control management, and process and developmental support for users ( external and internal).
Current Work
Biljana is working on process control management (PECVD, Advanced PECVD, IBD, and ICP etchers) to establish statistical process control. Biljana is also working on process development and users support.
Tools
Biljana Stamenic is in charge of the following tools: