Vacuum Deposition Recipes: Difference between revisions

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(added Thermal Evap rankings to wiki)
Line 42: Line 42:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R1]]
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 47: Line 49:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
|-
| bgcolor="#eeffff" |<br>
!AgBr
| bgcolor="#eeffff" |<br>
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
!AgCl
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
|-
! bgcolor="#d0e7ff" align="center" |Al
! bgcolor="#d0e7ff" align="center" |Al
Line 59: Line 93:
|[[Sputtering Recipes|R1]]
|[[Sputtering Recipes|R1]]
|R1
|R1
|[[Thermal Evaporation Recipes|A]]
|[[Thermal Evaporation Recipes#Thermal Evaporator 1|R3]]
|[[Thermal Evaporation Recipes|A]]
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|<br>
|<br>
|<br>
|<br>
Line 83: Line 117:
| bgcolor="#eeffff" |[[Atomic Layer Deposition Recipes#Al2O3 deposition .28ALD CHAMBER 3.29|R4]]
| bgcolor="#eeffff" |[[Atomic Layer Deposition Recipes#Al2O3 deposition .28ALD CHAMBER 3.29|R4]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
|-
!As
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
!AuPd
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 1|R1]]
|
|
|
|
|
|
|-
!AuZn
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 1|R1]]
|
|
|
|
|
|
|-
|-
!AuGe
!AuGe
Line 127: Line 212:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes|A]]
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R3]]
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes|A]]
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 145: Line 230:
|<br>
|<br>
|<br>
|<br>
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|<br>
|<br>
|<br>
|<br>
Line 150: Line 236:
|<br>
|<br>
|<br>
|<br>
|-
|<br>
!Be
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
|-
! bgcolor="#d0e7ff" align="center" |C
! bgcolor="#d0e7ff" align="center" |C
Line 162: Line 264:
| bgcolor="#eeffff" align="center" |
| bgcolor="#eeffff" align="center" |
| bgcolor="#eeffff" align="center" |
| bgcolor="#eeffff" align="center" |
| bgcolor="#eeffff" align="center" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
| bgcolor="#eeffff" align="center" |
| bgcolor="#eeffff" align="center" |
| bgcolor="#eeffff" align="center" |
| bgcolor="#eeffff" align="center" |
Line 167: Line 270:
| bgcolor="#eeffff" align="center" |
| bgcolor="#eeffff" align="center" |
| bgcolor="#eeffff" align="center" |
| bgcolor="#eeffff" align="center" |
|-
| bgcolor="#eeffff" align="center" |
!Cd
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
!CdS
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
!CdTe
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
!CaF2
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R2]]
|
|
|
|
|
|-
|-
! bgcolor="#d0e7ff" align="center" |CeO<sub>2</sub>
! bgcolor="#d0e7ff" align="center" |CeO<sub>2</sub>
Line 195: Line 365:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 212: Line 382:
|{{Rl|Sputtering_Recipes|Sputter_5_.28AJA_ATC_2200-V.29|R3}}
|{{Rl|Sputtering_Recipes|Sputter_5_.28AJA_ATC_2200-V.29|R3}}
|<br>
|<br>
|[[Thermal Evaporation Recipes|A]]
|[[Thermal Evaporation Recipes#Thermal Evaporator 1|R3]]
|[[Thermal Evaporation Recipes|A]]
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R2]]
|<br>
|<br>
|<br>
|<br>
Line 229: Line 399:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 246: Line 416:
|<br>
|<br>
|<br>
|<br>
|[[Thermal Evaporation Recipes#Thermal Evaporator 1|R1]]
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|<br>
|<br>
|<br>
|<br>
Line 251: Line 423:
|<br>
|<br>
|<br>
|<br>
|-
|<br>
!Ga
|<br>
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
!GaAs
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
|-
! bgcolor="#d0e7ff" align="center" |Ge
! bgcolor="#d0e7ff" align="center" |Ge
Line 264: Line 468:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 338: Line 542:
|[[Atomic Layer Deposition Recipes#AlN deposition .28ALD CHAMBER 3.29|R4]]
|[[Atomic Layer Deposition Recipes#AlN deposition .28ALD CHAMBER 3.29|R4]]
|<br>
|<br>
|-
!Hg
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
|-
! bgcolor="#d0e7ff" align="center" |In
! bgcolor="#d0e7ff" align="center" |In
Line 349: Line 570:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes|A]]
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R3]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 355: Line 576:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
|-
!InSb
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
|-
! bgcolor="#d0e7ff" align="center" |Ir
! bgcolor="#d0e7ff" align="center" |Ir
Line 365: Line 603:
|<br>
|<br>
|<br>
|<br>
|[[Thermal Evaporation Recipes#Thermal Evaporator 1|R1]]
|<br>
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|<br>
|<br>
|<br>
|<br>
|<br>
Line 389: Line 627:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
|-
!KCl
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
!LiF
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
!Mg
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 1|R1]]
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
|-
! bgcolor="#d0e7ff" align="center" |MgF2
! bgcolor="#d0e7ff" align="center" |MgF2
Line 400: Line 689:
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
Line 417: Line 706:
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|
|-
!Mn
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 1|R2]]
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
!MnS
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
Line 434: Line 757:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 439: Line 763:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
|-
| bgcolor="#eeffff" |<br>
!Na
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
!NaCl
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
|-
! bgcolor="#d0e7ff" align="center" |Nb
! bgcolor="#d0e7ff" align="center" |Nb
Line 451: Line 808:
|<br>
|<br>
|<br>
|<br>
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|<br>
|<br>
|<br>
|<br>
Line 456: Line 814:
|<br>
|<br>
|<br>
|<br>
|-
|<br>
!NbO5
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
|-
! bgcolor="#d0e7ff" align="center" |Nd
! bgcolor="#d0e7ff" align="center" |Nd
Line 484: Line 858:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes|A]]
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R3]]
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes|A]]
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 501: Line 875:
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 1|R3]]
|
|
|
|
|
Line 518: Line 892:
| bgcolor="#eeffff" |
| bgcolor="#eeffff" |
| bgcolor="#eeffff" |
| bgcolor="#eeffff" |
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R3]]
| bgcolor="#eeffff" |
| bgcolor="#eeffff" |
| bgcolor="#eeffff" |
| bgcolor="#eeffff" |
Line 524: Line 899:
| bgcolor="#eeffff" |
| bgcolor="#eeffff" |
| bgcolor="#eeffff" |
| bgcolor="#eeffff" |
|-
| bgcolor="#eeffff" |
!Pb
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
!PbS
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
|-
! bgcolor="#d0e7ff" align="center" |Pd
! bgcolor="#d0e7ff" align="center" |Pd
Line 535: Line 943:
|<br>
|<br>
|<br>
|<br>
|[[Thermal Evaporation Recipes|A]]
|[[Thermal Evaporation Recipes#Thermal Evaporator 1|R3]]
|[[Thermal Evaporation Recipes|A]]
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|<br>
|<br>
|<br>
|<br>
Line 553: Line 961:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 576: Line 984:
|[[Atomic Layer Deposition Recipes#Pt deposition .28ALD CHAMBER 1.29|R4]]
|[[Atomic Layer Deposition Recipes#Pt deposition .28ALD CHAMBER 1.29|R4]]
|<br>
|<br>
|-
!Sb
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
!Se
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
|-
! bgcolor="#d0e7ff" align="center" |Si
! bgcolor="#d0e7ff" align="center" |Si
Line 587: Line 1,029:
| bgcolor="#eeffff" |R1
| bgcolor="#eeffff" |R1
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[https://wiki.nanotech.ucsb.edu/w/index.php?title=PECVD_Recipes#Amorphous-Si_deposition_.28PECVD_.232.29 R3]
| bgcolor="#eeffff" |[https://wiki.nanotech.ucsb.edu/w/index.php?title=PECVD_Recipes#Amorphous-Si_deposition_.28PECVD_.232.29 R3]
Line 638: Line 1,080:
| bgcolor="#eeffff" |[[Sputtering_Recipes#SiO2_deposition_.28IBD.29|R6]]
| bgcolor="#eeffff" |[[Sputtering_Recipes#SiO2_deposition_.28IBD.29|R6]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
| bgcolor="#eeffff" |[[PECVD Recipes#SiO2 deposition .28PECVD .231.29|R6]]
| bgcolor="#eeffff" |[[PECVD Recipes#SiO2 deposition .28PECVD .231.29|R6]]
| bgcolor="#eeffff" |[[PECVD Recipes#SiO2 deposition .28PECVD .232.29|R6]]
| bgcolor="#eeffff" |[[PECVD Recipes#SiO2 deposition .28PECVD .232.29|R6]]
Line 656: Line 1,098:
|
|
|
|
|
|
|
|
|
|-
!SiO
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 1|R1]]
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
Line 689: Line 1,148:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes|A]]
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 705: Line 1,164:
|<br>
|<br>
|<br>
|<br>
|[[Thermal Evaporation Recipes#Thermal Evaporator 1|R1]]
|<br>
|<br>
|<br>
|<br>
|<br>
Line 723: Line 1,182:
| bgcolor="#eeffff" |R1
| bgcolor="#eeffff" |R1
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 740: Line 1,199:
|[[Sputtering Recipes#Si3N4 deposition .28IBD.29|R6]]
|[[Sputtering Recipes#Si3N4 deposition .28IBD.29|R6]]
|<br>
|<br>
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|<br>
|<br>
|<br>
|<br>
|<br>
Line 757: Line 1,216:
| bgcolor="#eeffff" |R1
| bgcolor="#eeffff" |R1
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 797: Line 1,256:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
|-
!TiO
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
|-
! bgcolor="#d0e7ff" align="center" |TiO<sub>2</sub>
! bgcolor="#d0e7ff" align="center" |TiO<sub>2</sub>
Line 808: Line 1,284:
| bgcolor="#eeffff" |[[Sputtering Recipes#Si3N4 deposition .28IBD.29|R5]]
| bgcolor="#eeffff" |[[Sputtering Recipes#Si3N4 deposition .28IBD.29|R5]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 842: Line 1,318:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 848: Line 1,324:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
|-
!WC
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
|-
! bgcolor="#d0e7ff" align="center" |Zn
! bgcolor="#d0e7ff" align="center" |Zn
Line 858: Line 1,351:
|<br>
|<br>
|<br>
|<br>
|[[Thermal Evaporation Recipes|A]]
|[[Thermal Evaporation Recipes#Thermal Evaporator 1|R3]]
|[[Thermal Evaporation Recipes|A]]
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R2]]
|<br>
|<br>
|<br>
|<br>
Line 875: Line 1,368:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 882: Line 1,375:
| bgcolor="#eeffff" |[[Atomic Layer Deposition Recipes#Pt deposition .28ALD CHAMBER 1.29|R3]]
| bgcolor="#eeffff" |[[Atomic Layer Deposition Recipes#Pt deposition .28ALD CHAMBER 1.29|R3]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
|-
!ZnS
|
|
|
|
|
|
|
|
|
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|
|
|
|
|
|-
|-
! bgcolor="#d0e7ff" align="center" |Zr
! bgcolor="#d0e7ff" align="center" |Zr
Line 893: Line 1,403:
|<br>
|<br>
|<br>
|<br>
|[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
|<br>
|<br>
|<br>
|<br>
|<br>
Line 910: Line 1,420:
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>

Revision as of 00:11, 24 August 2024

Process Control Data

See linked page for process control data (calibration data over time, such as dep. rate, refractive index, stress etc.) over time, for a selection of highly used tools/films.

Deposition Tools/Materials Table

The Key/Legend for this table's A...R6 values is at the bottom of the page.

Vacuum Deposition Recipes

 E-Beam Evaporation Sputtering Thermal Evaporation Plasma Enhanced Chemical
Vapor Deposition (PECVD) 		Atomic Layer Deposition Molecular Vapor Deposition
Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 3
(AJA ATC 2000-F) 		Sputter 4
(AJA ATC 2200-V) 		Sputter 5 (AJA ATC 2200-V) Ion Beam
Deposition (Veeco Nexus) 		Thermal
Evap 1 		Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790) 		PECVD 2
(Advanced Vacuum) 		Unaxis VLR ICP-PECVD Atomic Layer Deposition (Oxford FlexAL) Molecular Vapor Deposition (Tool)
Ag R2
R2 R2 R1 R1

R1 R1




AgBr R1
AgCl R1
Al R2
R2 R2 R1 R3 R1 R1 R3 R1




Al2O3 R2

R3 R3 R1 R5




R4
As R1
AuPd R1
AuZn R1
AuGe R1
AlN



R1 R1
R1




R4
Au R2
R2 R2 R1 R3

R3 R2




B








R1




Be R1
C R3 R1
Cd R1
CdS R1
CdTe R1
CaF2 R2
CeO2
R3












Co R2

R2 R3


R1 R1




Cr R1

R2 R3
R3
R3 R2




Cu R1


R3 R2

R2 R1




Fe R2

R2 R3


R1 R1




Ga R1
GaAs R1
Ge R2
R2 R2 R1 R1


R1




GeO2 R2
Gd R2

R1










Hf R1


R1










HfO2



R1 R1






R4
Hg R1
In








R3




InSb R1
Ir R1

R1



R1 R1




ITO
R3

R1 R1
R1






KCl R1
LiF R1
Mg R1 R1
MgF2 R1 R1 R1
MgO R2 R1
Mn R2 R1
MnS R1
Mo R2


R3 R1


R1




Na R1
NaCl R1
Nb R2



R3


R1




NbO5 R1
Nd



R1








Ni R2
R2 R2 R3


R3 R2




NiCr R2 R2 R3
NiFe R1 R2 R1 R3
Pb R1
PbS R1
Pd R2
R2 R2



R3 R1




Pt R2
R2 R2 R3 R3 R3

R1


R4
Ru R2

R2
R3






R4
Sb R1
Se R1
Si
R2

R3 R1
R1
R1
R3

SiN



R3 R1
R6

R6 R6 R6

SiN - Low Stress R4 R6 R6
SiO2 R2 R2

R3 R1 R2 R6
R1 R6 R6 R6 R4
SiOx R1
SiO R1 R1
SiOxNy






R3

R4



Sn








R2




SrF2
R2





R1





Ta R1


R3 R1
R1
R1




Ta2O5
R1
R1


R6
R1




Ti R2
R2 R2 R3 R3 R3 R1
R2




TiN




R3
R1




R4
TiW R1


R2 R3








TiO R1
TiO2
R2

R1 R3
R5
R1


R4
V



R1 R1








W R2


R2 R3


R1




WC R1
Zn







R3 R2




ZnO







R1 R1


R3
ZnS R1
Zr R2

R2 R1 R1


R1




ZrO2








R1


R4
Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 3
(ATC 2000-F) 		Sputter 4
(ATC 2200-V) 		Sputter 5 (ATC 2200-V) Ion Beam
Deposition (Veeco Nexus) 		Thermal
Evap 1 		Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790) 		PECVD 2
(Advanced Vacuum) 		Unaxis VLR ICP-PECVD Atomic Layer Deposition (Oxford FlexAl) Molecular Vapor Deposition (Tool)

Process Ranking Table

Processes in the table above are ranked by their "Process Maturity Level" as follows:

Process Level Description of Process Level Ranking
A Process Allowed and materials available but never done
R1 Process has been ran at least once
R2 Process has been ran and/or procedure is documented or/and data available
R3 Process has been ran, procedure is documented, and data is available
R4 Process has a documented procedure with regular (≥4x per year) data or lookahead/in-Situ control available
R5 Process has a documented procedure with regular (≥4x per year) data and lookahead/in-Situ control available
R6 Process has a documented procedure, regular ( ≥4x per year) data, and control charts/limits available
Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Vacuum_Deposition_Recipes&oldid=162298"