User contributions for Zwarburg
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1 July 2012
- 15:2715:27, 1 July 2012 diff hist +1 Tool List →Inspection, Test and Characterization
- 15:2315:23, 1 July 2012 diff hist +13 N File:Ellipsometer.jpg {{toolimage}} current
- 15:2315:23, 1 July 2012 diff hist +1,101 N Ellipsometer (Rudolph) Created page with "{{tool|{{PAGENAME}} |picture=Ellipsometer.jpg |type = Inspection, Test and Characterization |super= Mike Silva |phone=(805)839-3918x219 |location=Bay ? |email=silva@ece.ucsb.edu …"
- 14:4114:41, 1 July 2012 diff hist +13 N File:Ashers.jpg {{toolimage}} current
- 14:4114:41, 1 July 2012 diff hist +1,349 N Ashers (Technics PEII) Created page with "{{tool|{{PAGENAME}} |picture=Ashers.jpg |type = Dry Etch |super= Adam Abrahamsen |phone=(805)839-3918x213 |location=Bay 5 |email=abrahamsen@ece.ucsb.edu |description = Plasma Etc…"
- 14:3714:37, 1 July 2012 diff hist +887 N Plasma Clean (Gasonics 2000) Created page with "{{tool|{{PAGENAME}} |picture=Gasonics.jpg |type = Dry Etch |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 5 |email=silva@ece.ucsb.edu |description = Aura 2000-LL Downs…"
- 14:3514:35, 1 July 2012 diff hist +13 N File:EVG.jpg {{toolimage}} current
- 14:3514:35, 1 July 2012 diff hist +624 N Plasma Activation (EVG 810) Created page with "{{tool|{{PAGENAME}} |picture=EVG.jpg |type = Dry Etch |super= Aidan Hopkins |phone= 805-893-3918x208 |location=Bay 7 |email=hopkins@ece.ucsb.edu |description = Plasma Surface Act…"
- 14:3114:31, 1 July 2012 diff hist −1 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) No edit summary
- 14:3014:30, 1 July 2012 diff hist +13 N File:SiDeep.jpg {{toolimage}} current
- 14:2914:29, 1 July 2012 diff hist +2 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) No edit summary
- 14:2814:28, 1 July 2012 diff hist +2,946 N Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) Created page with "{{tool|{{PAGENAME}} |picture=RIE5.jpg |type = Dry Etch |super= Don Freeborn |phone= 805-893-3918x216 |location=Bay 2 |email=freeborn@ece.ucsb.edu |description = SiRIE Based Flour…"
- 14:2214:22, 1 July 2012 diff hist +13 N File:CMP.jpg {{toolimage}} current
- 14:2214:22, 1 July 2012 diff hist −1 Chemical-Mechanical Polisher (Logitech) No edit summary
- 14:2214:22, 1 July 2012 diff hist +936 N Chemical-Mechanical Polisher (Logitech) Created page with "{{tool|{{PAGENAME}} |picture=XeF2.jpg |type = Dry Etch |super= Wet Processing |phone=(805)839-3918x216 |location=Bay 5 |email=freeborn@ece.ucsb.edu |description = ORBIS Chemical …"
- 04:4504:45, 1 July 2012 diff hist 0 Tool List →Dry Etch
- 04:4504:45, 1 July 2012 diff hist +1 m Tool List →Dry Etch
- 04:4404:44, 1 July 2012 diff hist −2 RIE 5 (PlasmaTherm) No edit summary
- 04:4404:44, 1 July 2012 diff hist +2,228 N RIE 5 (PlasmaTherm) Created page with "{{tool|{{PAGENAME}} |picture=RIE5.jpg |type = Dry Etch |super= Don Freeborn |phone= 805-893-3918x216 |location=Bay 2 |email=freeborn@ece.ucsb.edu |description = RIE #5 Programmab…"
- 04:4104:41, 1 July 2012 diff hist −3 RIE 1 (Custom) No edit summary
- 04:4004:40, 1 July 2012 diff hist +1,404 N XeF2 Etch (Xetch) Created page with "{{tool|{{PAGENAME}} |picture=XeF2.jpg |type = Dry Etch |super= Don Freeborn |phone=(805)839-3918x216 |location=Bay 2 |email=freeborn@ece.ucsb.edu |description = XeF<sub>2</sub> G…"
- 03:4303:43, 1 July 2012 diff hist +40 Tool List No edit summary
- 03:4203:42, 1 July 2012 diff hist −272 PECVD 2 (Advanced Vacuum) →About
- 03:4103:41, 1 July 2012 diff hist +1,162 N PECVD 2 (Advanced Vacuum) Created page with "{{tool|{{PAGENAME}} |picture=PECVD2.jpg |type = Vacuum Deposition |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 2 |email=silva@ece.ucsb.edu |description = Vision 310 …"
- 03:3403:34, 1 July 2012 diff hist +1,565 N Ion Beam Deposition (Veeco NEXUS) Created page with "{{tool|{{PAGENAME}} |picture=IBD.jpg |type = Vacuum Deposition |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 3 |email=silva@ece.ucsb.edu |description = Ion Beam Depos…"
- 02:2402:24, 1 July 2012 diff hist +877 N Molecular Vapor Deposition Created page with "{{tool|{{PAGENAME}} |picture=MVD.jpg |type = Vacuum Deposition |super= Aidan Hopkins |phone=(805)839-3918x208 |location=Bay 4 |email=hopkins@ece.ucsb.edu |description = Molecular…"
30 June 2012
- 23:3223:32, 30 June 2012 diff hist +13 N File:FlexAL.jpg {{toolimage}}
- 23:3223:32, 30 June 2012 diff hist +1,292 N Atomic Layer Deposition (Oxford FlexAL) Created page with "{{tool|{{PAGENAME}} |picture=FlexAL.jpg |type = Vacuum Deposition |super= Brian Lingg |phone=(805)839-3918x210 |location=Bay 2 |email=lingg@ece.ucsb.edu |description = Oxford Fle…"
- 23:2823:28, 30 June 2012 diff hist 0 Tool List →Vacuum Deposition
- 23:2423:24, 30 June 2012 diff hist +13 N File:JEOL.jpg {{toolimage}} current
- 23:2323:23, 30 June 2012 diff hist −6 E-Beam Lithography System (JEOL JBX-6300FS) No edit summary
- 23:2223:22, 30 June 2012 diff hist +1,768 E-Beam Lithography System (JEOL JBX-6300FS) →See Also
- 23:1923:19, 30 June 2012 diff hist +1,704 N E-Beam Lithography System (JEOL JBX-6300FS) Created page with "{{tool|{{PAGENAME}} |picture=AFMNanoman.jpg |type = Lithography |super= Bill Mitchell |phone= (805)893-4974 |location=Bay 7 |email=mitchell@ece.ucsb.edu |description = Vector Sca…"
- 23:1323:13, 30 June 2012 diff hist +1,568 N Atomic Force Microscope (Bruker ICON) Created page with "{{tool|{{PAGENAME}} |picture=AFMNanoman.jpg |type = Lithography |super= Bill Mitchell |phone= (805)893-4974 |location=Bay 7 |email=mitchell@ece.ucsb.edu |description = Dimension …"
- 22:2122:21, 30 June 2012 diff hist +1,160 N Wafer Bonder (SUSS SB6-8E) Created page with "{{tool|{{PAGENAME}} |picture=WaferBonder.jpg |type = Lithography |super= Don Freeborn |phone=(805)839-3918x216 |location=Bay 7 |email=freeborn@ece.ucsb.edu |description = Karl Su…"
- 22:2122:21, 30 June 2012 diff hist +13 N File:WaferBonder.jpg {{toolimage}} current
- 22:1622:16, 30 June 2012 diff hist +1,743 N Contact Aligner (SUSS MA-6) Created page with "{{tool|{{PAGENAME}} |picture=ContactAligner.jpg |type = Lithography |super= Don Freeborn |phone=(805)839-3918x216 |location=Bay 7 |email=freeborn@ece.ucsb.edu |description = Mask…"
- 22:0422:04, 30 June 2012 diff hist +1 IR Aligner (SUSS MJB-3 IR) →Detailed Specifications
- 22:0422:04, 30 June 2012 diff hist +2,798 N IR Aligner (SUSS MJB-3 IR) Created page with "{{tool|{{PAGENAME}} |picture=SussAlignerIR.jpg |type = Lithography |super= Don Freeborn |phone=(805)839-3918x216 |location=Bay 6 |email=freeborn@ece.ucsb.edu |description = Mask …"
- 21:5821:58, 30 June 2012 diff hist −1 File:SussAligner.jpg No edit summary current
- 21:5721:57, 30 June 2012 diff hist +14 N File:SussAligner.jpg {{toolimages}}
- 21:5721:57, 30 June 2012 diff hist +2,232 N Suss Aligners (SUSS MJB-3) Created page with "{{tool|{{PAGENAME}} |picture=SussAligner.jpg |type = Lithography |super= Don Freeborn |phone=(805)839-3918x216 |location=Bay 6 |email=freeborn@ece.ucsb.edu |description = Mask Al…"
- 20:2120:21, 30 June 2012 diff hist +149 Chemical List - OLD 2018-09-05 →Lithography Chemicals
- 19:5619:56, 30 June 2012 diff hist −4 Chemical List - OLD 2018-09-05 →Other Chemicals
- 19:5519:55, 30 June 2012 diff hist +8 N File:Technic25ESGoldPlatingSolution.pdf {{MSDS}} current
- 19:5519:55, 30 June 2012 diff hist +8 N File:SilverEtchantTypeTFS.pdf {{MSDS}} current
- 19:5519:55, 30 June 2012 diff hist +8 N File:SaturatedBromineWaterMSDS.pdf {{MSDS}} current
- 19:5519:55, 30 June 2012 diff hist +8 N File:PC3-1500SpinOnGlassMSDS.pdf {{MSDS}} current
- 19:5419:54, 30 June 2012 diff hist +8 N File:GenTak230MSDS.pdf {{MSDS}} current
- 19:5419:54, 30 June 2012 diff hist +8 N File:GoldEtchantTypeTFAMSDS.pdf {{MSDS}} current
