Recent changes
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Track the most recent changes to the wiki on this page.
List of abbreviations:
- N
- This edit created a new page (also see list of new pages)
- m
- This is a minor edit
- b
- This edit was performed by a bot
- (±123)
- The page size changed by this number of bytes
10 October 2024
| 13:35 | Frequently Asked Questions diffhist +123 John d talk contribs →How do I get my files from the NanoFab computers?: mentioned midnight folder sync | ||||
| 13:23 | Template:Announcements diffhist +396 Mehalana v talk contribs →Stepper #3 (ASML DUV) - Tool UP | ||||
9 October 2024
| 17:36 | Template:Announcements diffhist -530 John d talk contribs asml up, deleted MLA | ||||
| 16:39 | ICP Etching Recipes diffhist -30 Noahdutra talk contribs →Process Control Data (DSEiii): took off SiO2/Al2O3 selectivity for dse | ||||
8 October 2024
| 15:09 | Lithography Recipes diffhist +1,656 John d talk contribs →Available Variations: bolded variables on the table, italics descriptions for section | ||||
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14:03 | (Upload log) [Noahdutra (5×)] | |||
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14:03 Noahdutra talk contribs uploaded File:Cal DSE Ar+ER.png (DSE STD_Bosch_Si etch AR/ER dependence) | ||||
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13:44 Noahdutra talk contribs uploaded File:Copy of 22 013 (1).jpg (STD_Bosch_Si example 8/26/24) | ||||
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13:42 Noahdutra talk contribs uploaded File:30D 003.jpg (STD_Bosch_Si etch picture) | ||||
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13:37 Noahdutra talk contribs uploaded File:DSE plot.png (Calibration plot for DSE) | ||||
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13:32 Noahdutra talk contribs uploaded File:Cal vs Legacy DSE.png (Legacy DSE Si etch (Plasma-Therm Standard DSE) vs new Calibration Si etch (STD_Bosch_Si) looking at Etch rate dependence on Aspect Ratio.) | ||||
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| 10:33 | Stepper 2 (AutoStep 200) diffhist +3 John d talk contribs →Video Training: link to biljana as supervisor | ||||
7 October 2024
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20:25 | Stepper 2 (AutoStep 200) 2 changes history +1,049 [John d (2×)] | |||
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20:25 (cur | prev) +186 John d talk contribs →Video Training: added video thumbnail and link Tag: Visual edit: Switched | ||||
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13:34 (cur | prev) +863 John d talk contribs Added link to Training videpo Tag: Visual edit | ||||
| 20:23 | Upload log John d talk contribs uploaded File:GCA Autostep 200 training vid title screen.png | ||||
| 09:56 | Services diffhist +146 John d talk contribs →Statement of Work: link to example Stepper SOW | ||||
4 October 2024
| 15:31 | Dry Etching Recipes diffhist 0 Noahdutra talk contribs changed Oxford GaAs to R2 since we have no data, but there is a recipe on the tool. | ||||
3 October 2024
| 18:36 | Template:Announcements diffhist +330 Mehalana v talk contribs | ||||