User contributions for Biljana
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12 December 2019
- 20:3420:34, 12 December 2019 diff hist +421 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 20:2820:28, 12 December 2019 diff hist +279 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 20:2420:24, 12 December 2019 diff hist +134 PECVD Recipes No edit summary Tag: Visual edit: Switched
11 October 2019
- 16:1916:19, 11 October 2019 diff hist +162 Stepper 2 (AutoStep 200) Operating Procedures No edit summary Tag: Visual edit
- 16:1416:14, 11 October 2019 diff hist −101 Stepper 2 (AutoStep 200) Operating Procedures No edit summary Tag: Visual edit
3 October 2019
- 15:2415:24, 3 October 2019 diff hist +2 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:2215:22, 3 October 2019 diff hist +128 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:1215:12, 3 October 2019 diff hist +123 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:5614:56, 3 October 2019 diff hist +100 PECVD Recipes →SiN deposition (Unaxis VLR)
- 14:3914:39, 3 October 2019 diff hist 0 N SiN 100C Table-2019 Created blank page current Tag: Visual edit
- 14:3514:35, 3 October 2019 diff hist −71 PECVD Recipes →SiN deposition (Unaxis VLR) Tag: Visual edit
- 14:3114:31, 3 October 2019 diff hist −6 PECVD Recipes →SiN deposition (Unaxis VLR)
- 14:2714:27, 3 October 2019 diff hist +103 PECVD Recipes →SiN deposition (Unaxis VLR)
18 September 2019
- 14:5214:52, 18 September 2019 diff hist +7 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
- 14:4914:49, 18 September 2019 diff hist −7 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences No edit summary
- 14:3214:32, 18 September 2019 diff hist +13 Stepper 1 (GCA 6300) →Operating Procedures Tag: Visual edit
- 14:3114:31, 18 September 2019 diff hist +14 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
10 September 2019
- 18:3018:30, 10 September 2019 diff hist −2 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 18:2918:29, 10 September 2019 diff hist +142 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 17:4817:48, 10 September 2019 diff hist −8 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 17:4817:48, 10 September 2019 diff hist −10 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 17:4717:47, 10 September 2019 diff hist −9 PECVD Recipes →SiN deposition (Unaxis VLR)
- 17:4617:46, 10 September 2019 diff hist +6 PECVD Recipes →SiN deposition (Unaxis VLR)
- 17:4617:46, 10 September 2019 diff hist 0 PECVD Recipes →SiN deposition (Unaxis VLR)
- 17:4517:45, 10 September 2019 diff hist 0 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 17:4517:45, 10 September 2019 diff hist +42 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 17:4517:45, 10 September 2019 diff hist +272 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 17:4117:41, 10 September 2019 diff hist +147 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:4915:49, 10 September 2019 diff hist +1 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:4915:49, 10 September 2019 diff hist +9 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:4815:48, 10 September 2019 diff hist −5 PECVD Recipes →SiO2 deposition (Unaxis VLR) Tag: Visual edit
- 15:4715:47, 10 September 2019 diff hist +131 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:4615:46, 10 September 2019 diff hist +131 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:4015:40, 10 September 2019 diff hist −36 PECVD Recipes →SiN deposition (Unaxis VLR): update Tag: Visual edit
- 15:3815:38, 10 September 2019 diff hist +2 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:3715:37, 10 September 2019 diff hist +19 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:3615:36, 10 September 2019 diff hist +110 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:3315:33, 10 September 2019 diff hist +3 Unaxis SiN100C 300nm-2019 No edit summary current
- 15:2415:24, 10 September 2019 diff hist +3 N Unaxis SiN100C 300nm-2019 WIP Tag: Visual edit
- 15:2215:22, 10 September 2019 diff hist +34 PECVD Recipes →SiN deposition (Unaxis VLR) Tag: Visual edit
21 June 2019
- 21:1321:13, 21 June 2019 diff hist −82 Stepper 2 (AutoStep 200) →Detailed Specifications: about stepper Tag: Visual edit
20 June 2019
- 22:4122:41, 20 June 2019 diff hist +3 N Stepper 1 (GCA 6300) Available chucks wip current Tag: Visual edit
- 22:3922:39, 20 June 2019 diff hist +72 Stepper 1 (GCA 6300) - Standard Operating Procedure →Loading a wafer into the system Tag: Visual edit
- 22:3222:32, 20 June 2019 diff hist +5,924 N Stepper 1 (GCA 6300) Substrate Thickness, Shim Thickness ans Target Thickness shims current Tag: Visual edit
- 22:2522:25, 20 June 2019 diff hist +139 Stepper 1 (GCA 6300) - Standard Operating Procedure →Loading a wafer into the system Tag: Visual edit
- 22:2422:24, 20 June 2019 diff hist +607 Stepper 1 (GCA 6300) - Standard Operating Procedure →Loading a wafer into the system Tag: Visual edit
- 22:1322:13, 20 June 2019 diff hist +1,071 N Stepper 1 (GCA6300) How to select proper chuck Created page with "{| class="wikitable" | colspan="3" |GCA 6300 CHUCKS |- |Chuck Name/Wafer Size |Substrate Thickness |Chuck Thickness |- | | | |- |1/4 of 2"(and smaller) |~717um (+/-100) |5.40..." current Tag: Visual edit
- 22:1022:10, 20 June 2019 diff hist +59 Stepper 1 (GCA 6300) - Standard Operating Procedure →Loading a wafer into the system Tag: Visual edit
- 21:2321:23, 20 June 2019 diff hist −27 Stepper 2 (AutoStep 200) Operating Procedures →Reticle Loading and Unloading Tag: Visual edit
- 20:4620:46, 20 June 2019 diff hist +4 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →JOB Programming - FULL Tag: Visual edit