User contributions for John d

26 April 2023

• 21:1121:11, 26 April 2023 diff hist −13 m Frequently Asked Questions →Authorship on Publications Tag: Visual edit
• 19:4419:44, 26 April 2023 diff hist +1,284 N Ellipsometer (Woollam) - Measuring thin dielectrics with Native Oxide pre-measurement added basic description & steps referring to for details, Measuring_thin_metals_with_oxide_pre-measurement current Tag: Visual edit
• 19:3719:37, 26 April 2023 diff hist +205 Ellipsometer (Woollam) →Operating Procedures: link to thin dielectric meas, pre-meas NatOx Tag: Visual edit
• 17:5217:52, 26 April 2023 diff hist +640 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick updated to 150°C, quantity of wax for 4-inch wafers, and place both wafers in contact on hotplate, not on Logitech. Tag: Visual edit
• 17:3617:36, 26 April 2023 diff hist +413 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick comment about wax on filter paper Tag: Visual edit
• 16:1616:16, 26 April 2023 diff hist +349 ICP Etching Recipes →Through Silicon Via etch (DSEiii): wax mounting warnings + updates Tag: Visual edit
• 16:1016:10, 26 April 2023 diff hist +272 ICP Etching Recipes →Through Silicon Via etch (DSEiii): publication policy on TSV process Tag: Visual edit
• 06:2806:28, 26 April 2023 diff hist +355 Ion Beam Deposition (Veeco NEXUS) added schematic of ion beam Tag: Visual edit
• 06:2706:27, 26 April 2023 diff hist 0 File:IBD Schematic.jpg John d uploaded a new version of File:IBD Schematic.jpg current
• 06:2306:23, 26 April 2023 diff hist +33 N File:IBD Schematic.jpg No edit summary

23 April 2023

• 20:5920:59, 23 April 2023 diff hist +242 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: new heading for schematics Tag: Visual edit

19 April 2023

• 21:5221:52, 19 April 2023 diff hist +373 Template:News amscope entry
• 21:5121:51, 19 April 2023 diff hist −10 Microscopes →Microscope #6: AmScope Wide Field of View Stereoscope (Bay 4): changed to Scope #8 Tag: Visual edit
• 21:5021:50, 19 April 2023 diff hist +520 Microscopes Scope #6 initial entry - needs updating Tag: Visual edit

17 April 2023

• 21:5121:51, 17 April 2023 diff hist 0 File:Vented font DDJ.gds John d uploaded a new version of File:Vented font DDJ.gds current
• 21:5021:50, 17 April 2023 diff hist +138 Calculators + Utilities →CAD Files & Templates: added instructions for vented font installation Tag: Visual edit

16 April 2023

• 16:4216:42, 16 April 2023 diff hist 0 Template:News moved new SEM 1 week earlier
• 16:4116:41, 16 April 2023 diff hist +601 Template:News New SEM and New Scribe+Break

15 April 2023

• 03:1103:11, 15 April 2023 diff hist +811 N Automated Wafer Cleaver (Loomis LSD-155LT) initial page Tag: Visual edit: Switched
• 03:0603:06, 15 April 2023 diff hist +55 Tool List →Die Singulation / Down-sizing: link to new Loomis Wafer Cleaver page Tag: Visual edit

4 April 2023

• 22:3722:37, 4 April 2023 diff hist +64 Aidan Hopkins →Tools: fixed DSE & wafer bench links
• 22:3522:35, 4 April 2023 diff hist 0 Aidan Hopkins →Tools: fixed wafer bonder link
• 22:3522:35, 4 April 2023 diff hist +6 Aidan Hopkins →Tools: fixed SEM#2 link
• 22:3322:33, 4 April 2023 diff hist +74 E-Beam Lithography Recipes changed SEM#1 link and Nabity title in prep for new SEM current

3 April 2023

• 07:5207:52, 3 April 2023 diff hist +323 MLA150 - CAD Files and Templates →Resolution and Calibration Patterns: details on CAD files available on MLA150 computer Tag: Visual edit
• 07:4507:45, 3 April 2023 diff hist +488 Calculators + Utilities →CAD Files & Templates: Added Verniers link & linked to MEMs-exchange, EPFL, and Tag: Visual edit

2 April 2023

• 17:3217:32, 2 April 2023 diff hist +1,343 Calculators + Utilities →Example CAD File: links to various lithography system CAD files, vented fonts etc. Tag: Visual edit
• 17:0717:07, 2 April 2023 diff hist +85 N File:Vented font DDJ.gds Vented Font - a font good for liftoff (no enclosed holes), GDS CAD file

21 March 2023

• 20:1020:10, 21 March 2023 diff hist +385 Wafer scanning process traveler →Wafers to Use: mention regular prime grade Tag: Visual edit
• 20:0720:07, 21 March 2023 diff hist +21 m Wafer scanning process traveler No edit summary Tag: Visual edit
• 20:0720:07, 21 March 2023 diff hist +1,043 Wafer scanning process traveler →Data Recording: updated surfscan photos, added examples of before/after and high particle photos. Tag: Visual edit
• 20:0320:03, 21 March 2023 diff hist +57 N File:Surfscan P1 SiN 221208Z5G4 after.jpg No edit summary current
• 19:5919:59, 21 March 2023 diff hist +37 N File:Surfscan G4 before example - P1 230317E7G4 before.jpg No edit summary current
• 19:5619:56, 21 March 2023 diff hist 0 File:UCSBTEST1.png John d uploaded a new version of File:UCSBTEST1.png current
• 19:5519:55, 21 March 2023 diff hist 0 File:UCSBTEST2 .png John d uploaded a new version of File:UCSBTEST2 .png current

20 March 2023

• 23:2423:24, 20 March 2023 diff hist +122 Calculators + Utilities →KLayout: like to U. waterloo KLayout vids Tag: Visual edit
• 23:0523:05, 20 March 2023 diff hist +1,728 N Oxford Etcher - Sample Size Effect on Etch Rate pasted from old Process Control Dataa: Oxford_ICP_Etcher_-_Process_Control_Data current Tag: Visual edit: Switched
• 23:0523:05, 20 March 2023 diff hist +179 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher): link to Sample Size effect on ER Tag: Visual edit
• 23:0223:02, 20 March 2023 diff hist +41 m Template:News link to all data
• 18:0418:04, 20 March 2023 diff hist +3 Template:Announcements corected SEM #2 --> SEM#1

19 March 2023

• 05:0105:01, 19 March 2023 diff hist +27 N User:Mehalana v redirects to Vraj's correct staff page current Tags: New redirect Visual edit: Switched

16 March 2023

• 17:2717:27, 16 March 2023 diff hist −8 Stepper 3 (ASML DUV) →Operating Procedures: moved training procedure above Tag: Visual edit

15 March 2023

• 19:2219:22, 15 March 2023 diff hist +19 GCA 6300 Mask Making Guidance link to Autostep 200 mask page
• 19:2119:21, 15 March 2023 diff hist +97 GCA 6300 Mask Making Guidance No edit summary
• 19:1619:16, 15 March 2023 diff hist 0 m Stepper 2 (AutoStep 200) →Process Information Tag: Visual edit
• 19:1619:16, 15 March 2023 diff hist +25 m Stepper 2 (AutoStep 200) →Process Information Tag: Visual edit
• 19:1519:15, 15 March 2023 diff hist +180 Stepper 2 (AutoStep 200) copied Mask making link to SOP section as well, minor formatting elsewhere. Tag: Visual edit
• 17:3117:31, 15 March 2023 diff hist +2,035 Autostep 200 Mask Making Guidance addded Submission Details section Tag: Visual edit

13 March 2023

• 23:2323:23, 13 March 2023 diff hist 0 File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx John d uploaded a new version of File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx current

10 March 2023

• 21:0921:09, 10 March 2023 diff hist +643 Stepper Recipes →Stepper 3 (ASML DUV): added Process Control Data section