User contributions for John d
Jump to navigation
Jump to search
8 June 2023
- 15:0815:08, 8 June 2023 diff hist +258 Microscopes →Microscope #7: Olympus DSX1000 Digital Microscope (Bay 4): minor updates to specs Tag: Visual edit
6 June 2023
- 06:3706:37, 6 June 2023 diff hist +113 Surface Analysis (KLA/Tencor Surfscan) added high-particles images Tag: Visual edit
- 06:3606:36, 6 June 2023 diff hist +38 N File:Surfscan 230113A7G2 after low particles.jpg No edit summary current
- 06:3506:35, 6 June 2023 diff hist +39 N File:Surfscan - 230113A7 Gain4 high particles.jpg No edit summary current
2 June 2023
- 19:0819:08, 2 June 2023 diff hist 0 File:PECVD1 SiN Stress vs. N2 plot.jpg John d uploaded a new version of File:PECVD1 SiN Stress vs. N2 plot.jpg current
- 18:5518:55, 2 June 2023 diff hist −130 PECVD Recipes →Low Stress Si3N4 (PECVD#1): deleted process control data link Tag: Visual edit
- 18:5518:55, 2 June 2023 diff hist +1 m PECVD Recipes →Low Stress Si3N4 (PECVD#1): indent image Tag: Visual edit: Switched
- 18:5418:54, 2 June 2023 diff hist +428 PECVD Recipes →SiOxNy deposition (PECVD #1): added SiN stress vs. N2 plot Tag: Visual edit
- 18:5218:52, 2 June 2023 diff hist +209 N File:PECVD1 SiN Stress vs. N2 plot.jpg No edit summary
1 June 2023
- 18:3018:30, 1 June 2023 diff hist −64 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): deleted false link Tag: Visual edit
- 18:2918:29, 1 June 2023 diff hist +277 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): added sub headings to N2/O2, link to new page Tag: Visual edit
27 May 2023
- 17:2817:28, 27 May 2023 diff hist +68 Calculators + Utilities →General CAD files for Litho: added authorship to some CAD files Tag: Visual edit
25 May 2023
- 18:3318:33, 25 May 2023 diff hist +118 Stepper 3 (ASML DUV) →Resists Used: mnetiuon EBL compatibility Tag: Visual edit
- 18:3118:31, 25 May 2023 diff hist +35 Stepper 3 (ASML DUV) →About: separated "resist info" to it's own heading Tag: Visual edit
23 May 2023
- 17:3517:35, 23 May 2023 diff hist +220 ICP-PECVD (Unaxis VLR) added Process Control Data section current Tag: Visual edit
18 May 2023
- 23:4123:41, 18 May 2023 diff hist +813 Process Group - Process Control Data →Stepper #3 (ASML DUV): included example images
- 23:4023:40, 18 May 2023 diff hist +1 m Stepper 3 (ASML DUV) →Process Control Data Tag: Visual edit
- 23:4023:40, 18 May 2023 diff hist −1 m Stepper 3 (ASML DUV) →Process Control Data
- 23:3923:39, 18 May 2023 diff hist +254 m Stepper 3 (ASML DUV) →Process Control Data Tag: Visual edit
- 23:3723:37, 18 May 2023 diff hist +209 m Stepper 3 (ASML DUV) →Process Control Data: images link to data now
- 23:3523:35, 18 May 2023 diff hist +360 Stepper 3 (ASML DUV) →Process Control Data: added example images of Process Control Data Tag: Visual edit: Switched
- 23:3023:30, 18 May 2023 diff hist +39 N File:ASML CD Cals - Example Plot.jpg No edit summary current
- 23:2823:28, 18 May 2023 diff hist +46 N File:ASML CD Cals - Example Table.jpg No edit summary current
- 22:1322:13, 18 May 2023 diff hist +32 Direct-Write Lithography Recipes →Positive Resist (MLA150) Tag: Visual edit
15 May 2023
- 17:3417:34, 15 May 2023 diff hist −408 PECVD Recipes →ICP-PECVD (Unaxis VLR): moved "old recipe" links, fixred gDrive sharing settings Tag: Visual edit
11 May 2023
- 05:0505:05, 11 May 2023 diff hist +44 N File:SEM1 JEOL IT800HSL.jpg photo of SEM #1, JEOL IT800HSL current
- 05:0105:01, 11 May 2023 diff hist +178 Microscopes →Microscope #8: AmScope Wide Field of View Stereoscope (Bay 4): added photo Tag: Visual edit: Switched
- 04:5804:58, 11 May 2023 diff hist +45 N File:Amscope Stereoscope Photo.jpg No edit summary current
- 04:5104:51, 11 May 2023 diff hist +32 N File:DektakXT.jpg image of Dektak XT current
- 04:5104:51, 11 May 2023 diff hist +40 Step Profilometer (DektakXT) changed image, linked to mfg. current Tag: Visual edit: Switched
10 May 2023
- 19:3519:35, 10 May 2023 diff hist +5 SEM 1 (JEOL IT800SHL) →Imaging
- 19:3419:34, 10 May 2023 diff hist +14 SEM 1 (JEOL IT800SHL) cahnged tool pic
- 19:3419:34, 10 May 2023 diff hist +2,712 N SEM 1 (JEOL IT800SHL) iniital page copied from SEM2 Tag: Visual edit: Switched
- 19:2519:25, 10 May 2023 diff hist +7 Tool List →Electron Microscopy: changed links to just "SEM 1/2" and included model number of SEM1, and link to new SEM1 page. Tag: Visual edit
5 May 2023
- 06:3306:33, 5 May 2023 diff hist +93 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Documentation: mentioend travelers for etches Tag: Visual edit
28 April 2023
- 18:1818:18, 28 April 2023 diff hist +205 Contact Aligner (SUSS MA-6) →About: explained BSA a bit more. Tag: Visual edit
- 18:1618:16, 28 April 2023 diff hist +163 Contact Aligner (SUSS MA-6) mentioned motorized systems Tag: Visual edit
- 18:1518:15, 28 April 2023 diff hist +101 Suss Aligners (SUSS MJB-3) mentioned that systems are manual, not motorizd. Tag: Visual edit
- 18:1318:13, 28 April 2023 diff hist +30 Tool List →Contact Aligners (Optical Exposure): changed "suss aligners" --> "contact aligners" Tag: Visual edit
- 17:0217:02, 28 April 2023 diff hist +254 Calculators + Utilities →General CAD files for Litho: added schematics Tag: Visual edit
- 17:0017:00, 28 April 2023 diff hist +35 N File:Vented font screnshot.jpg No edit summary current
- 16:5716:57, 28 April 2023 diff hist +45 N File:Vernier Template v2 screenshot.jpg No edit summary current
- 16:5416:54, 28 April 2023 diff hist 0 File:Vernier Template.gds John d uploaded a new version of File:Vernier Template.gds
- 16:5216:52, 28 April 2023 diff hist +35 File:Vernier Template.gds →Summary: update date Tag: Visual edit
- 16:5116:51, 28 April 2023 diff hist 0 File:Vernier Template.gds John d uploaded a new version of File:Vernier Template.gds
27 April 2023
- 21:5221:52, 27 April 2023 diff hist +225 Stepper 3 (ASML DUV) →Design Tools: CAD files links Tag: Visual edit
- 21:4921:49, 27 April 2023 diff hist +191 Stepper 2 (AutoStep 200) →CAD Files: link to general CAD files Tag: Visual edit
- 21:4821:48, 27 April 2023 diff hist +190 Stepper 1 (GCA 6300) →CAD Files: link to general CAD tempaltes Tag: Visual edit
- 21:4721:47, 27 April 2023 diff hist +101 Calculators + Utilities →CAD Files & Templates: Added heading for general files, description for verniers Tag: Visual edit
- 21:4621:46, 27 April 2023 diff hist +223 MLA150 - CAD Files and Templates link to general CAD file templates Tag: Visual edit