User contributions for John d
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23 June 2023
- 19:0819:08, 23 June 2023 diff hist +96 Photolithography - Manual Edge-Bead Removal Techniques →EBR100 Swabbing: minor description about ebr wicking / drying Tag: Visual edit
21 June 2023
- 22:4522:45, 21 June 2023 diff hist +64 Rapid Thermal Processor (SSI Solaris 150) Added “RTA” and abbreviations for searchability Tag: Visual edit
20 June 2023
- 20:1320:13, 20 June 2023 diff hist +6 m Photolithography - Manual Edge-Bead Removal Techniques →Lithographic Edge Bead Removal Tag: Visual edit
16 June 2023
- 05:3705:37, 16 June 2023 diff hist +346 m Wet Etching Recipes table: link to Piranha section Tag: Visual edit
- 05:3205:32, 16 June 2023 diff hist −1,111 m Wet Etching Recipes →Organic removal: headings for Organics Removal section Tag: Visual edit
- 05:1505:15, 16 June 2023 diff hist +6 Wet Etching Recipes →Table of Wet Etching Recipes: InGaAs exothermic comment Tag: Visual edit
- 05:1405:14, 16 June 2023 diff hist +97 Wet Etching Recipes →Table of Wet Etching Recipes: Added InP & InGaAs selective etches for stop-etch Tag: Visual edit
- 04:3304:33, 16 June 2023 diff hist −238 Wet Etching Recipes →Table of Wet Etching Recipes: added selective substrate removal recipes for GaAs/AlGaAs (from Garrett Cole), oxide removal dips for InP, GaAs (from memory) Tag: Visual edit
15 June 2023
- 17:2717:27, 15 June 2023 diff hist +153 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #1: Metals: added BDEAS recipe - needs more info Tag: Visual edit
14 June 2023
- 21:0121:01, 14 June 2023 diff hist +944 Direct-Write Lithography Recipes →Greyscale Lithography (MLA150): adde dgresyscale starter process Tag: Visual edit
- 20:5220:52, 14 June 2023 diff hist +232 Direct-Write Lithography Recipes →Positive Resist (MLA150): explain rehydration step Tag: Visual edit
- 20:3820:38, 14 June 2023 diff hist +219 Direct-Write Lithography Recipes →Positive Resist (MLA150): added SPR220-7.0, from Lubin greyscale project Tag: Visual edit
- 20:2320:23, 14 June 2023 diff hist +1 Template:Announcements →NanoFan Lab is UP: typo
12 June 2023
- 23:0523:05, 12 June 2023 diff hist +61 Wet Benches added NEVER heat: ISO, Toluene etc. Tag: Visual edit
- 18:4218:42, 12 June 2023 diff hist +106 Wet Benches →Detailed Specifications: minor updates, clarified that NMP can be heated, ACE can not Tag: Visual edit
8 June 2023
- 15:0815:08, 8 June 2023 diff hist +258 Microscopes →Microscope #7: Olympus DSX1000 Digital Microscope (Bay 4): minor updates to specs Tag: Visual edit
6 June 2023
- 06:3706:37, 6 June 2023 diff hist +113 Surface Analysis (KLA/Tencor Surfscan) added high-particles images Tag: Visual edit
- 06:3606:36, 6 June 2023 diff hist +38 N File:Surfscan 230113A7G2 after low particles.jpg No edit summary current
- 06:3506:35, 6 June 2023 diff hist +39 N File:Surfscan - 230113A7 Gain4 high particles.jpg No edit summary current
2 June 2023
- 19:0819:08, 2 June 2023 diff hist 0 File:PECVD1 SiN Stress vs. N2 plot.jpg John d uploaded a new version of File:PECVD1 SiN Stress vs. N2 plot.jpg current
- 18:5518:55, 2 June 2023 diff hist −130 PECVD Recipes →Low Stress Si3N4 (PECVD#1): deleted process control data link Tag: Visual edit
- 18:5518:55, 2 June 2023 diff hist +1 m PECVD Recipes →Low Stress Si3N4 (PECVD#1): indent image Tag: Visual edit: Switched
- 18:5418:54, 2 June 2023 diff hist +428 PECVD Recipes →SiOxNy deposition (PECVD #1): added SiN stress vs. N2 plot Tag: Visual edit
- 18:5218:52, 2 June 2023 diff hist +209 N File:PECVD1 SiN Stress vs. N2 plot.jpg No edit summary
1 June 2023
- 18:3018:30, 1 June 2023 diff hist −64 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): deleted false link Tag: Visual edit
- 18:2918:29, 1 June 2023 diff hist +277 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): added sub headings to N2/O2, link to new page Tag: Visual edit
27 May 2023
- 17:2817:28, 27 May 2023 diff hist +68 Calculators + Utilities →General CAD files for Litho: added authorship to some CAD files Tag: Visual edit
25 May 2023
- 18:3318:33, 25 May 2023 diff hist +118 Stepper 3 (ASML DUV) →Resists Used: mnetiuon EBL compatibility Tag: Visual edit
- 18:3118:31, 25 May 2023 diff hist +35 Stepper 3 (ASML DUV) →About: separated "resist info" to it's own heading Tag: Visual edit
23 May 2023
- 17:3517:35, 23 May 2023 diff hist +220 ICP-PECVD (Unaxis VLR) added Process Control Data section current Tag: Visual edit
18 May 2023
- 23:4123:41, 18 May 2023 diff hist +813 Process Group - Process Control Data →Stepper #3 (ASML DUV): included example images
- 23:4023:40, 18 May 2023 diff hist +1 m Stepper 3 (ASML DUV) →Process Control Data Tag: Visual edit
- 23:4023:40, 18 May 2023 diff hist −1 m Stepper 3 (ASML DUV) →Process Control Data
- 23:3923:39, 18 May 2023 diff hist +254 m Stepper 3 (ASML DUV) →Process Control Data Tag: Visual edit
- 23:3723:37, 18 May 2023 diff hist +209 m Stepper 3 (ASML DUV) →Process Control Data: images link to data now
- 23:3523:35, 18 May 2023 diff hist +360 Stepper 3 (ASML DUV) →Process Control Data: added example images of Process Control Data Tag: Visual edit: Switched
- 23:3023:30, 18 May 2023 diff hist +39 N File:ASML CD Cals - Example Plot.jpg No edit summary current
- 23:2823:28, 18 May 2023 diff hist +46 N File:ASML CD Cals - Example Table.jpg No edit summary current
- 22:1322:13, 18 May 2023 diff hist +32 Direct-Write Lithography Recipes →Positive Resist (MLA150) Tag: Visual edit
15 May 2023
- 17:3417:34, 15 May 2023 diff hist −408 PECVD Recipes →ICP-PECVD (Unaxis VLR): moved "old recipe" links, fixred gDrive sharing settings Tag: Visual edit
11 May 2023
- 05:0505:05, 11 May 2023 diff hist +44 N File:SEM1 JEOL IT800HSL.jpg photo of SEM #1, JEOL IT800HSL current
- 05:0105:01, 11 May 2023 diff hist +178 Microscopes →Microscope #8: AmScope Wide Field of View Stereoscope (Bay 4): added photo Tag: Visual edit: Switched
- 04:5804:58, 11 May 2023 diff hist +45 N File:Amscope Stereoscope Photo.jpg No edit summary current
- 04:5104:51, 11 May 2023 diff hist +32 N File:DektakXT.jpg image of Dektak XT current
- 04:5104:51, 11 May 2023 diff hist +40 Step Profilometer (DektakXT) changed image, linked to mfg. current Tag: Visual edit: Switched
10 May 2023
- 19:3519:35, 10 May 2023 diff hist +5 SEM 1 (JEOL IT800SHL) →Imaging
- 19:3419:34, 10 May 2023 diff hist +14 SEM 1 (JEOL IT800SHL) cahnged tool pic
- 19:3419:34, 10 May 2023 diff hist +2,712 N SEM 1 (JEOL IT800SHL) iniital page copied from SEM2 Tag: Visual edit: Switched
- 19:2519:25, 10 May 2023 diff hist +7 Tool List →Electron Microscopy: changed links to just "SEM 1/2" and included model number of SEM1, and link to new SEM1 page. Tag: Visual edit
5 May 2023
- 06:3306:33, 5 May 2023 diff hist +93 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Documentation: mentioend travelers for etches Tag: Visual edit