All public logs

Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).

• 00:37, 5 January 2024 Biljana talk contribs created page File:SURFSCAN 6200 122123 for 4inch wafers.pdf
• 00:37, 5 January 2024 Biljana talk contribs uploaded File:SURFSCAN 6200 122123 for 4inch wafers.pdf
• 00:37, 5 January 2024 Biljana talk contribs created page File:SURFSCAN 6200 122123 for 8inch wafers.pdf
• 00:37, 5 January 2024 Biljana talk contribs uploaded File:SURFSCAN 6200 122123 for 8inch wafers.pdf
• 00:37, 5 January 2024 Biljana talk contribs created page File:SURFSCAN 6200 122023 for 6inch wafers.pdf
• 00:37, 5 January 2024 Biljana talk contribs uploaded File:SURFSCAN 6200 122023 for 6inch wafers.pdf
• 22:39, 4 January 2024 Sawyer l talk contribs created page File:DUV Flood Expose SOP Rev C.pdf
• 22:39, 4 January 2024 Sawyer l talk contribs uploaded File:DUV Flood Expose SOP Rev C.pdf
• 21:40, 4 January 2024 John d talk contribs uploaded a new version of File:Vernier Template.gds (Corrected first tooth had 0 offset)
• 18:36, 4 January 2024 John d talk contribs created page Surfscan Errors and Workarounds (added keuyboard workaround) Tag: Visual edit
• 18:31, 4 January 2024 John d talk contribs deleted page KLA-Tencor Surfscan - Standard Operating Procedure (Moved data to another page: content was: "This tool can be used for scanning 4", 6" and 8" wafers. Pieces could be also scanned, but they need to be mounted on either 4" or 8" wafer. The maximum thickness of a wafer (or a wafer+mounted piece) is up to 1mm. ==SURFSCAN 6200== LOG IN using the access code: '''boss''' ( if the keyboard is not working use the virtual keyboard on the monitor). Double click on the icon...", and the only contributor was "Biljana"...)
• 22:37, 29 December 2023 Biljana talk contribs created page File:GCA 6300 - Commands.pdf
• 22:37, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 - Commands.pdf
• 19:46, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Standard Operating Procedure 122823.pdf
• 19:46, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Standard Operating Procedure 122823.pdf
• 19:29, 29 December 2023 Biljana talk contribs created page File:GCA6300 Optimizing the process 6.pdf
• 19:29, 29 December 2023 Biljana talk contribs uploaded File:GCA6300 Optimizing the process 6.pdf
• 19:29, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Shutdown and Start up.pdf
• 19:29, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Shutdown and Start up.pdf
• 19:29, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Reboot frozen keyboard.pdf
• 19:29, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Reboot frozen keyboard.pdf
• 19:29, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Programming a Job 7.pdf
• 19:29, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Programming a Job 7.pdf
• 19:28, 29 December 2023 Biljana talk contribs created page File:GCA 6300 General Information about system 4.pdf
• 19:28, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 General Information about system 4.pdf
• 19:28, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Running a JOB 3.pdf
• 19:28, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Running a JOB 3.pdf
• 18:54, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Programming a Job 7.docx
• 18:54, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Programming a Job 7.docx
• 00:15, 22 December 2023 Biljana talk contribs deleted page File:SURFSCAN 6200 122123 for 2 and 3inch wafers.pdf
• 00:14, 22 December 2023 Biljana talk contribs created page File:SURFSCAN 6200 Small substrates.pdf
• 00:14, 22 December 2023 Biljana talk contribs uploaded File:SURFSCAN 6200 Small substrates.pdf
• 00:14, 22 December 2023 Biljana talk contribs created page File:SURFSCAN 6200 2 and 3inch wafers.pdf
• 00:14, 22 December 2023 Biljana talk contribs uploaded File:SURFSCAN 6200 2 and 3inch wafers.pdf
• 00:13, 22 December 2023 Biljana talk contribs created page File:SURFSCAN 6200 4inch wafers.pdf
• 00:13, 22 December 2023 Biljana talk contribs uploaded File:SURFSCAN 6200 4inch wafers.pdf
• 00:12, 22 December 2023 Biljana talk contribs created page File:SURFSCAN 6200 122123 for 2 and 3inch wafers.pdf
• 00:12, 22 December 2023 Biljana talk contribs uploaded File:SURFSCAN 6200 122123 for 2 and 3inch wafers.pdf
• 23:01, 21 December 2023 Biljana talk contribs created page File:SURFSCAN 6200 6inch wafers.pdf
• 23:01, 21 December 2023 Biljana talk contribs uploaded File:SURFSCAN 6200 6inch wafers.pdf
• 22:59, 21 December 2023 Biljana talk contribs created page File:SURFSCAN 6200 8inch wafers.pdf
• 22:59, 21 December 2023 Biljana talk contribs uploaded File:SURFSCAN 6200 8inch wafers.pdf
• 22:51, 21 December 2023 Biljana talk contribs deleted page Surfscan 6200 8inch wafers
• 22:50, 21 December 2023 Biljana talk contribs created page Surfscan 6200 8inch wafers (Created page with "SURFSCAN 6200 for 8inch wafers IMPORTANT: Do not use it for thick wafers (thickness > 1um )! 1. LOG IN using the access code: boss (if the keyboard is not working use the virt...")
• 19:12, 30 November 2023 John d talk contribs created page YES Recipe Screenshots: STD-O2 (screenshots of "STD-O2-180C-3KW-30sec" and "STD-O2-100C-3KW-15min") Tag: Visual edit
• 19:11, 30 November 2023 John d talk contribs created page File:STD-O2-180C-3KW-30sec - steps.jpg
• 19:11, 30 November 2023 John d talk contribs uploaded File:STD-O2-180C-3KW-30sec - steps.jpg
• 19:10, 30 November 2023 John d talk contribs created page File:STD-O2-180C-3KW-30sec - header.jpg
• 19:10, 30 November 2023 John d talk contribs uploaded File:STD-O2-180C-3KW-30sec - header.jpg
• 19:09, 30 November 2023 John d talk contribs created page File:STD-O2-100C-3KW-15min - steps.jpg