User contributions for John d

For John d talk block log uploads logs

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00:2100:21, 2 August 2024 diff hist +272‎ Hummer SEM Sample Coater - Techniques to reduce charging in SEMs ‎ link to Hummer tool page Tag: Visual edit
00:1700:17, 2 August 2024 diff hist +1‎ SEM Sample Coater (Hummer) ‎ →‎Operating Procedures: fixed bullet points, listed approx film thickness current Tag: Visual edit
00:1700:17, 2 August 2024 diff hist +37‎ SEM Sample Coater (Hummer) ‎ →‎About Tag: Visual edit
00:1600:16, 2 August 2024 diff hist +70‎ SEM 1 (JEOL IT800SHL) ‎ →‎Operating Procedures: link to hummer techniques Tag: Visual edit

00:4600:46, 1 August 2024 diff hist +148‎ Lift-Off with DUV Imaging + PMGI Underlayer ‎ →‎Suggested Process for Liftoff: added N2 dry step current Tag: Visual edit

02:2402:24, 30 July 2024 diff hist +108‎ SEM 1 (JEOL IT800SHL) ‎ →‎Imaging: added minor descriptions on detector types Tag: Visual edit

17:1217:12, 26 July 2024 diff hist +121‎ Laser Etch Monitoring ‎ →‎Substrate Temperature Stabilization current Tag: Visual edit
17:0817:08, 26 July 2024 diff hist +789‎ Laser Etch Monitoring ‎ added Joel's DSP Substrate trace example Tag: Visual edit
17:0617:06, 26 July 2024 diff hist +218‎ N File:LaserMon - Temp Stabilize JoelGuo - 240725 noGas hold200C InPepi DSP.png ‎No edit summary current

16:4816:48, 24 July 2024 diff hist +12‎ m Dry Etching Recipes ‎ →‎Process Ranking Table Tag: Visual edit
16:4716:47, 24 July 2024 diff hist +1‎ Dry Etching Recipes ‎ fixed Pan1/2 links Tag: Visual edit
16:3216:32, 24 July 2024 diff hist +95‎ Dry Etching Recipes ‎ →‎Process Ranking Table: minor updates to Process Maturity level Tag: Visual edit
16:3016:30, 24 July 2024 diff hist +132‎ Dry Etching Recipes ‎ mention + link to table Key/Legend Tag: Visual edit
16:2716:27, 24 July 2024 diff hist 0‎ m Dry Etching Recipes ‎ →‎Process Ranking Table Tag: Visual edit

19:3319:33, 19 July 2024 diff hist −1‎ m Stepper 3 (ASML DUV) ‎ →‎Design Tools Tag: Visual edit
19:3319:33, 19 July 2024 diff hist +116‎ Stepper 3 (ASML DUV) ‎ →‎Design Tools: link to new Generic Stepper programming page. Tag: Visual edit
19:3119:31, 19 July 2024 diff hist −31‎ Calculators + Utilities ‎ →‎Example CAD File: removed ASML links, replacesd with generic stepper links Tag: Visual edit
19:2219:22, 19 July 2024 diff hist +107‎ Stepper Mask-Making Guidelines (Generic) ‎ made Figure link directly to tutorial
19:2019:20, 19 July 2024 diff hist +450‎ Stepper Mask-Making Guidelines (Generic) ‎ inserted image for Stepper Mask tutorial Tag: Visual edit: Switched
19:1619:16, 19 July 2024 diff hist +92‎ N File:Stepper Reticle Tutorial - Reticle Masking Schematic.png ‎No edit summary current
19:1119:11, 19 July 2024 diff hist +621‎ Stepper Mask-Making Guidelines (Generic) ‎ pasted example CD file and programming Tag: Visual edit
19:0719:07, 19 July 2024 diff hist 0‎ m Stepper Mask-Making Guidelines (Generic) ‎ John d moved page Stepper Mask-Making Guidelines to Stepper Mask-Making Guidelines (Generic) without leaving a redirect
19:0719:07, 19 July 2024 diff hist +3,553‎ N Stepper Mask-Making Guidelines (Generic) ‎ pasted generic Stepper programming info from various other pages. Tag: Visual edit

19:4819:48, 18 July 2024 diff hist +754‎ Frequently Asked Questions ‎ →‎How do I get my files from the NanoFab computers?: added section info about folder names Tag: Visual edit

14:1314:13, 17 July 2024 diff hist +358‎ Direct-Write Lithography Recipes ‎ →‎Greyscale Lithography (MLA150): moved SPR comments to own row, was squished into small column Tag: Visual edit
04:3104:31, 17 July 2024 diff hist −85‎ Demis D. John ‎ →‎Contact If...: deleted IT tasks Tag: Visual edit
04:3104:31, 17 July 2024 diff hist +37‎ Demis D. John ‎ →‎Tools: added wafer bonding fixture Tag: Visual edit
04:3004:30, 17 July 2024 diff hist −60‎ Demis D. John ‎ →‎Current Work: added tools holography, probe station, QFI Tag: Visual edit

20:2120:21, 16 July 2024 diff hist +26‎ m Stepper Recipes ‎ →‎Particle Checks Tag: Visual edit
20:2020:20, 16 July 2024 diff hist 0‎ File:ASML Cal Particle Check.png ‎ John d uploaded a new version of File:ASML Cal Particle Check.png current
20:1920:19, 16 July 2024 diff hist −10‎ m Stepper Recipes ‎ →‎Particle Checks Tag: Visual edit
20:1820:18, 16 July 2024 diff hist +814‎ Stepper Recipes ‎ →‎Process Control Data: added thumbnail images of the Cals
20:1720:17, 16 July 2024 diff hist 0‎ File:ASML Cal Particle Check.png ‎ John d uploaded a new version of File:ASML Cal Particle Check.png
20:1620:16, 16 July 2024 diff hist +457‎ Stepper Recipes ‎ →‎Process Control Data: added particle check section and explanation/fig Tag: Visual edit
20:1420:14, 16 July 2024 diff hist +52‎ N File:ASML Cal Particle Check.png ‎No edit summary

15:1415:14, 13 July 2024 diff hist +962‎ PECVD Recipes ‎ →‎ICP-PECVD (Unaxis VLR): added GapFill recipe Tag: Visual edit

20:3520:35, 11 July 2024 diff hist +89‎ Lab Rules ‎ →‎Acid/Base and HF/TMAH/Bromine Processing: minor wording on HF TRIonic glove description to match shelf labeling current Tag: Visual edit
15:4715:47, 11 July 2024 diff hist +126‎ Lithography Recipes ‎ →‎Recipes Table (S-Cubed Flexi): minor update s- headings for dev/dry-etch BARC Tag: Visual edit
02:2802:28, 11 July 2024 diff hist +206‎ Lithography Recipes ‎ →‎Recipes Table (S-Cubed Flexi): added rows between variations Tag: Visual edit
02:0202:02, 11 July 2024 diff hist +826‎ Lithography Recipes ‎ →‎Automated Coat/Develop System Recipes (S-Cubed Flexi): added "variations" info Tag: Visual edit

18:3318:33, 9 July 2024 diff hist +238‎ Sputtering Recipes ‎ →‎SiO2 Uniformity: added table of stats Tag: Visual edit
18:2618:26, 9 July 2024 diff hist +337‎ Sputtering Recipes ‎ →‎Ion Beam Deposition (Veeco NEXUS): Added plot of Sio2 uniformity Tag: Visual edit
18:2518:25, 9 July 2024 diff hist +96‎ N File:IBD - Deposition Uniformity across a 6-inch wafer 2010-06-15 v2.png ‎No edit summary current

15:3415:34, 25 June 2024 diff hist +19‎ Optical Film Thickness & Wafer-Mapping (Filmetrics F50) ‎ Updated tool location current

15:3015:30, 20 June 2024 diff hist +777‎ Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) ‎ →‎Recipes: added process control data section Tag: Visual edit: Switched

19:5219:52, 14 June 2024 diff hist 0‎ m Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick ‎No edit summary current Tag: Visual edit
16:5916:59, 14 June 2024 diff hist +20‎ Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) ‎ added tool model to toolinfo

17:5917:59, 5 June 2024 diff hist +3‎ MLA150 - Troubleshooting ‎ →‎Solutions for small substrates: --> sols for ALL substrate types Tag: Visual edit

22:5322:53, 31 May 2024 diff hist −3‎ Template:Tool2 ‎ Remove "N/A" when "recipes" section is not shown current
22:4822:48, 31 May 2024 diff hist 0‎ File:DSEiii Example Bosch Etch 02.jpg ‎ John d uploaded a new version of File:DSEiii Example Bosch Etch 02.jpg current

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