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Date Name Thumbnail Size User Description Versions
23:54, 5 November 2024 FEM example analysis GMoody Group 2024-11-04 v2.png (file) 58 KB John d (talk | contribs) added X in middle 2
19:02, 26 October 2024 UCSB NetID - correct google account v1.png (file) 96 KB John d (talk | contribs)   1
18:50, 26 October 2024 UCSB NetID wrong google account access denied v1.png (file) 150 KB John d (talk | contribs)   1
18:46, 26 October 2024 UCSB NetID - wrong login access denied.png (file) 89 KB John d (talk | contribs)   1
17:40, 24 October 2024 Plasmatherm DSE - 40um deep Si etch Cal 241007 - 30D 002.jpg (file) 1,019 KB John d (talk | contribs)   1
17:12, 24 October 2024 Spontaneous Wafer Bond Glass to Silicon - Demis D John.png (file) 656 KB John d (talk | contribs)   1
05:25, 23 October 2024 Google Drive - Example Job Folder.png (file) 42 KB John d (talk | contribs)   1
05:22, 23 October 2024 Trello - example job card.png (file) 209 KB John d (talk | contribs)   1
05:21, 23 October 2024 Trello - Example Job Cards.png (file) 126 KB John d (talk | contribs)   1
23:17, 22 October 2024 MLA150 Alignment versus Wafer Location v1.jpg (file) 8 KB John d (talk | contribs)   1
21:03, 8 October 2024 Cal DSE Ar+ER.png (file) 16 KB Noahdutra (talk | contribs) DSE STD_Bosch_Si etch AR/ER dependence 1
20:44, 8 October 2024 DSE 16um Bosch Etch - 22 013.jpg (file) 883 KB Noahdutra (talk | contribs) STD_Bosch_Si example 8/26/24 1
20:42, 8 October 2024 30D 003.jpg (file) 880 KB Noahdutra (talk | contribs) STD_Bosch_Si etch picture 1
20:37, 8 October 2024 DSE plot.png (file) 26 KB Noahdutra (talk | contribs) Calibration plot for DSE 1
20:32, 8 October 2024 Cal vs Legacy DSE.png (file) 20 KB Noahdutra (talk | contribs) Legacy DSE Si etch (Plasma-Therm Standard DSE) vs new Calibration Si etch (STD_Bosch_Si) looking at Etch rate dependence on Aspect Ratio. 1
16:23, 30 September 2024 PRStrip 019 (1).jpg (file) 845 KB Noahdutra (talk | contribs) Si Etch FICP 9/19/24 1
16:15, 30 September 2024 PRStrip 022 (1).jpg (file) 955 KB Noahdutra (talk | contribs)   1
17:54, 24 September 2024 Recipe Importing New Software.pdf (file) 389 KB Sawyer l (talk | contribs)   1
20:32, 13 September 2024 FICP-Si.png (file) 28 KB Noahdutra (talk | contribs) Fluorine ICP Si Etch Control Chart 1
22:51, 5 September 2024 Contact Layer 1 alignment example v1.png (file) 55 KB John d (talk | contribs)   1
01:18, 31 August 2024 Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf (file) 1 MB John d (talk | contribs) added terminology slide 2
23:36, 22 August 2024 AZ5214 negative process schematic.png (file) 68 KB John d (talk | contribs)   1
16:59, 21 August 2024 AZ5214 Fabublox negative schematic.png (file) 46 KB John d (talk | contribs)   1
16:57, 21 August 2024 AZ5214 Fabublox Positive PR schematic.png (file) 38 KB John d (talk | contribs)   1
16:00, 30 July 2024 LEXT OLS4100 InstallManual Ver.3.1.8 offline.pdf (file) 882 KB Hopkins a (talk | contribs) LEXT Offline software 1
17:06, 26 July 2024 LaserMon - Temp Stabilize JoelGuo - 240725 noGas hold200C InPepi DSP.png (file) 108 KB John d (talk | contribs)   1
19:16, 19 July 2024 Stepper Reticle Tutorial - Reticle Masking Schematic.png (file) 497 KB John d (talk | contribs)   1
15:54, 17 July 2024 ADT SOP Rev J.pdf (file) 2.98 MB Sawyer l (talk | contribs)   5
20:20, 16 July 2024 ASML Cal Particle Check.png (file) 279 KB John d (talk | contribs) higher resolution 3
18:25, 9 July 2024 IBD - Deposition Uniformity across a 6-inch wafer 2010-06-15 v2.png (file) 202 KB John d (talk | contribs)   1
18:55, 8 July 2024 EB-3 operation instructions 7-8-24.pdf (file) 198 KB Barreraz (talk | contribs)   1
22:19, 6 June 2024 EB4 Operating Instructions 6-6-24.pdf (file) 1.97 MB Barreraz (talk | contribs)   1
22:07, 6 June 2024 EB-1 operation instructions 6-6-24.pdf (file) 270 KB Barreraz (talk | contribs)   1
21:08, 6 June 2024 Post Dicing Tape Expansion SOP.pdf (file) 1.28 MB Sawyer l (talk | contribs)   1
19:31, 4 June 2024 EB1 Rotation Fixture SOP 6-4-24.pdf (file) 2.58 MB Barreraz (talk | contribs)   1
17:26, 4 June 2024 E-beam1.jpg (file) 2.73 MB Barreraz (talk | contribs)   3
17:22, 4 June 2024 IMG 5450.jpg (file) 2.73 MB Barreraz (talk | contribs)   1
21:44, 3 June 2024 EB-3 operation instructions 5-22-24 V45.47.pdf (file) 197 KB Barreraz (talk | contribs)   2
21:43, 3 June 2024 EB-1 operation instructions 6-3-24.pdf (file) 270 KB Barreraz (talk | contribs)   1
22:48, 31 May 2024 DSEiii Example Bosch Etch 02.jpg (file) 733 KB John d (talk | contribs) Added UCSB NanoFab watermark 2
15:53, 28 May 2024 YES SOP Rev F.pdf (file) 646 KB Sawyer l (talk | contribs) Revised 1
23:28, 22 May 2024 EB-3 operation instructions 5-22-24.pdf (file) 196 KB Barreraz (talk | contribs)   3
23:25, 22 May 2024 EB-1 operation instructions 2-13-24.pdf (file) 269 KB Barreraz (talk | contribs)   1
23:00, 7 May 2024 Rotation Fixture SOP 5-7-24.pdf (file) 6.25 MB Barreraz (talk | contribs)   2
05:41, 5 April 2024 Contact-AlignMarks Vernier DemisDJohn v4.oas (file) 2 KB John d (talk | contribs) Contact Alignment Marks redesigned by Demis D. John - OASIS 1
05:41, 5 April 2024 Contact-AlignMarks Vernier DemisDJohn v4.gds (file) 5 KB John d (talk | contribs) Contact Alignment Marks redesigned by Demis D. John - GDS 1
06:50, 4 April 2024 Contact-AlignMarks Vernier DemisDJohn v3.gds (file) 3 KB John d (talk | contribs) Contact Alignment Marks redesigned by Demis D. John - GDS 1
06:49, 4 April 2024 Contact-AlignMarks Vernier DemisDJohn v3.oas (file) 692 bytes John d (talk | contribs) Contact Alignment Marks redesigned by Demis D. John - OASIS 1
01:43, 6 March 2024 Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08.pdf (file) 1.46 MB John d (talk | contribs) added info abotu :stadnard" recipe, name, mounting method etc. 2
01:35, 6 March 2024 Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf (file) 1.38 MB John d (talk | contribs) added temp and carrier to recipe page 4
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