User contributions for John d

12 April 2025

• 19:3419:34, 12 April 2025 diff hist −155‎ ICP Etching Recipes ‎ →‎PlasmaTherm/SLR Fluorine Etcher: smaller SEM images Tag: Visual edit
• 19:3119:31, 12 April 2025 diff hist 0‎ m ICP Etching Recipes ‎ →‎High Rate Bosch Etch (DSEIII): smaller images Tag: Visual edit
• 19:3019:30, 12 April 2025 diff hist 0‎ m ICP Etching Recipes ‎ →‎High Rate Bosch Etch (DSEIII): smaller images Tag: Visual edit
• 19:2719:27, 12 April 2025 diff hist 0‎ ICP Etching Recipes ‎ moved process control data to the bottom of each recipe section Tag: Visual edit: Switched
• 19:2019:20, 12 April 2025 diff hist −11‎ m Stepper 3 (ASML DUV) ‎ →‎Optical Proximity Correction (OPC): Going below the resolution limit Tag: Visual edit

8 April 2025

• 17:5117:51, 8 April 2025 diff hist −6‎ m Stepper 3 (ASML DUV) ‎No edit summary Tag: Visual edit
• 17:5117:51, 8 April 2025 diff hist +25‎ Stepper 3 (ASML DUV) ‎ →‎General Capabilities/Overview: moved stepper tutorial to it's own subheading Tag: Visual edit

7 April 2025

• 20:3020:30, 7 April 2025 diff hist +993‎ UCSB NanoFab Microscope Training ‎ →‎Bright/Dark Field Explanation: added example DF image, explanation image, and DIC example image current Tag: Visual edit
• 20:2720:27, 7 April 2025 diff hist +112‎ N File:Microscope DIC-Nomarski Example v1.jpg ‎No edit summary current
• 20:1520:15, 7 April 2025 diff hist +77‎ N File:Dark Field Microscopy - High Particle Count example 2025-03-25 W1 particle check Demis.jpg ‎No edit summary current
• 20:1020:10, 7 April 2025 diff hist +72‎ N File:Dark Field Microscopy explanation v1.jpg ‎No edit summary current
• 18:2818:28, 7 April 2025 diff hist +25‎ Maskless Aligner (Heidelberg MLA150) ‎ →‎Calibrate your own Litho process Tag: Visual edit

5 April 2025

• 15:2415:24, 5 April 2025 diff hist 0‎ m Template:Announcements ‎No edit summary
• 15:2315:23, 5 April 2025 diff hist −101‎ Template:Announcements ‎ unaxis down, deleted power outage announcement
• 15:1115:11, 5 April 2025 diff hist −458‎ Template:Announcements ‎ updated power outage equipment update
• 03:4203:42, 5 April 2025 diff hist +2‎ m Template:Announcements ‎ →‎EVG - Scheduled downtime
• 03:4103:41, 5 April 2025 diff hist +762‎ Template:Announcements ‎ DDOS attack and VPN

3 April 2025

• 06:4006:40, 3 April 2025 diff hist 0‎ m Template:Announcements ‎No edit summary
• 06:3906:39, 3 April 2025 diff hist −78‎ Template:Announcements ‎ FICP UP, deleted RIE5 up

29 March 2025

• 15:2615:26, 29 March 2025 diff hist +17‎ m Template:Announcements ‎ →‎Lab Open
• 15:2515:25, 29 March 2025 diff hist +422‎ Template:Announcements ‎ FICP down

28 March 2025

• 21:3721:37, 28 March 2025 diff hist +83‎ Template:Announcements ‎ Updated lab OPEN
• 20:3420:34, 28 March 2025 diff hist +436‎ Process Group Interns ‎ update4d lists, moved interns to Alumni current Tag: Visual edit
• 20:2620:26, 28 March 2025 diff hist +139‎ Staff List ‎ linked email addresses current Tag: Visual edit

19 March 2025

• 19:2419:24, 19 March 2025 diff hist +11‎ m Services ‎ →‎Paperwork for new Institutions (Non-UC) current Tag: Visual edit
• 19:0419:04, 19 March 2025 diff hist +175‎ Template:Announcements ‎ updated lab outage
• 15:4515:45, 19 March 2025 diff hist −1,740‎ Nanofab Job Postings ‎ moved internship positions to "filled"/closed Tag: Visual edit

18 March 2025

• 23:4823:48, 18 March 2025 diff hist −238‎ Template:Announcements ‎ deleted EBL move in

17 March 2025

• 21:0921:09, 17 March 2025 diff hist −3‎ PECVD Recipes ‎ →‎Si3N4 [ICP-PECVD]: fixed old SiN recipe link Tag: Visual edit

16 March 2025

• 17:5317:53, 16 March 2025 diff hist −606‎ Template:Announcements ‎ Deleted ASML, MLA, RIE5 up
• 17:3417:34, 16 March 2025 diff hist +490‎ Template:Announcements ‎ March 27th power outage

14 March 2025

• 19:3319:33, 14 March 2025 diff hist +2‎ Rapid Thermal Processor (AET RX6) ‎ →‎Detailed Specifications current Tag: Visual edit
• 19:3219:32, 14 March 2025 diff hist −2‎ m Rapid Thermal Processor (AET RX6) ‎ →‎Detailed Specifications Tag: Visual edit
• 19:3019:30, 14 March 2025 diff hist +425‎ Rapid Thermal Processor (SSI Solaris 150) ‎ added table of max temp vs time current Tag: Visual edit

13 March 2025

• 00:1200:12, 13 March 2025 diff hist +15‎ Process Group - Process Control Data ‎ →‎Oxford PlasmaPro Cobra Etcher: fixed InP cobra links Tag: Visual edit

12 March 2025

• 20:2920:29, 12 March 2025 diff hist +90‎ ASML Stepper 3 - Job Creator ‎ →‎Instructions for Usage: listed exposure job location current Tag: Visual edit
• 19:5419:54, 12 March 2025 diff hist +9‎ ASML Stepper 3 - Job Creator ‎ added TOC

11 March 2025

• 19:1519:15, 11 March 2025 diff hist −156‎ Template:Announcements ‎ EBL move update
• 19:1319:13, 11 March 2025 diff hist 0‎ File:Nanofabrication Facility Project Description.xlsx ‎ John d uploaded a new version of File:Nanofabrication Facility Project Description.xlsx current
• 15:0115:01, 11 March 2025 diff hist +402‎ Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond ‎ Added crystal bond grams and ACE mL, and mentioned cleaning polos chuck and wafer backside current Tag: Visual edit

10 March 2025

• 23:4723:47, 10 March 2025 diff hist −15‎ m Template:Announcements ‎No edit summary
• 23:4723:47, 10 March 2025 diff hist +394‎ Template:Announcements ‎ EBL move-in

9 March 2025

• 19:0319:03, 9 March 2025 diff hist +153‎ Services ‎ →‎Paperwork for Fabrication Services: UC users: request Rechareg acct number Tag: Visual edit
• 18:5718:57, 9 March 2025 diff hist +139‎ ICP Etching Recipes ‎ →‎SiO2 Etch Recipes (Fluorine ICP Etcher): added links to process control data Tag: Visual edit
• 18:5518:55, 9 March 2025 diff hist +2‎ Dry Etching Recipes ‎ updated FL-ICP Si + SIO2 link cuz changed header title current Tag: Visual edit
• 18:5118:51, 9 March 2025 diff hist +1,202‎ ICP Etching Recipes ‎ →‎Si Etching (Fluorine ICP Etcher): reorg - put Etch cals in the Etch cal section, and added Recipe info for Si & SiO2 etching in Recipe section Tag: Visual edit
• 18:4018:40, 9 March 2025 diff hist +49‎ N File:FL-ICP 50W SiO2 etch with Ru Hard Mask.png ‎No edit summary current
• 18:3918:39, 9 March 2025 diff hist 0‎ File:FL-ICP 200W SiO2 Etch with Ru Hardmask - Ning Cao.png ‎ John d uploaded a new version of File:FL-ICP 200W SiO2 Etch with Ru Hardmask - Ning Cao.png current
• 18:3618:36, 9 March 2025 diff hist +49‎ N File:FL-ICP 200W SiO2 Etch with Ru Hardmask - Ning Cao.png ‎No edit summary

7 March 2025

• 20:5120:51, 7 March 2025 diff hist +64‎ Template:Announcements ‎ MLA up