User contributions for John d

For John d talk block log uploads logs

Jump to navigation Jump to search

02:4802:48, 29 April 2025 diff hist 0‎ Stepper Reticle Layout (Advanced) - Complex Experiments and Variations ‎ added stepper blade-off schematic/link Tag: Visual edit: Switched
02:4702:47, 29 April 2025 diff hist +668‎ Stepper Reticle Layout (Advanced) - Complex Experiments and Variations ‎No edit summary Tag: Visual edit: Switched
02:4602:46, 29 April 2025 diff hist +144‎ Stepper 3 (ASML DUV) ‎ →‎Design Tools: link to advanced reticle design current Tag: Visual edit
02:4102:41, 29 April 2025 diff hist +259‎ Stepper 3 (ASML DUV) ‎ →‎About: link to advnaced stepper layout Tag: Visual edit
01:4901:49, 29 April 2025 diff hist +245‎ Stepper Reticle Layout (Advanced) - Complex Experiments and Variations ‎ added links to OAS CAD file and programming sheet
01:4801:48, 29 April 2025 diff hist +89‎ N File:ASML Reticle Programming Params - DEMIS-DOE v1.xlsx ‎ Stepper reticle tutorial - programming sheet for DOE layouts (Demis D John) current
01:4701:47, 29 April 2025 diff hist +62‎ N File:CAD Tutorial for ASML Reticle v2 DEMIS-DOE.OAS ‎ Stepper reticle tutorial OAS file (Demis D John) current
01:4401:44, 29 April 2025 diff hist +8‎ Stepper Reticle Layout (Advanced) - Complex Experiments and Variations ‎ add TOC
01:4401:44, 29 April 2025 diff hist +2,841‎ N Stepper Reticle Layout (Advanced) - Complex Experiments and Variations ‎ initial page Tag: Visual edit
01:2601:26, 29 April 2025 diff hist +62‎ N File:Stepper Reticle Layout Tutorial - Wafer layout with variations.png ‎No edit summary current
01:2401:24, 29 April 2025 diff hist +64‎ N File:Stepper Reticle Layout Tutorial - Reticle layout with variations.png ‎No edit summary current
01:2201:22, 29 April 2025 diff hist +301‎ Stepper Mask-Making Guidelines (Generic) ‎ link to advances stepper layout Tag: Visual edit

18:2218:22, 28 April 2025 diff hist −23‎ Template:Announcements ‎ velion update

18:1718:17, 27 April 2025 diff hist +419‎ Template:Announcements ‎ dicing saw down

05:5605:56, 24 April 2025 diff hist +23‎ m Calculators + Utilities ‎ →‎KLayout Tag: Visual edit

20:0920:09, 22 April 2025 diff hist +233‎ Template:Announcements ‎ riath DOWN
20:0820:08, 22 April 2025 diff hist −992‎ Template:Announcements ‎ deleted old annc, updated DDOS
19:4619:46, 22 April 2025 diff hist −4‎ m ICP Etching Recipes ‎ →‎Si Etch Recipes (Fluorine ICP Etcher) current Tag: Visual edit
18:5918:59, 22 April 2025 diff hist +436‎ Lithography Calibration - Analyzing a Focus-Exposure Matrix ‎ heading level 1, minor updates Tag: Visual edit
18:3818:38, 22 April 2025 diff hist +401‎ Stepper 3 (ASML DUV) ‎ →‎Operating Procedures: linked to FEM docs Tag: Visual edit

22:4922:49, 19 April 2025 diff hist +185‎ KLayout Design Tips ‎ link to example CAD files Tag: Visual edit

00:1600:16, 18 April 2025 diff hist 0‎ Stepper 3 (ASML DUV) ‎ →‎UCSB Photomasks Available Tag: Visual edit
00:1600:16, 18 April 2025 diff hist +207‎ Stepper 3 (ASML DUV) ‎ →‎UCSB Photomasks Available Tag: Visual edit
00:1400:14, 18 April 2025 diff hist +40‎ m Stepper 3 (ASML DUV) ‎ →‎UCSB Photomasks Available Tag: Visual edit
00:1300:13, 18 April 2025 diff hist +71‎ ASML Stepper 3 - UCSB Test Reticles ‎ →‎Other Masks and Images Tag: Visual edit

23:3623:36, 17 April 2025 diff hist +487‎ ASML Stepper 3 - UCSB Test Reticles ‎ link to Other Masks and Images in gDrive Tag: Visual edit
23:3223:32, 17 April 2025 diff hist +180‎ ASML Stepper 3 - UCSB Test Reticles ‎ →‎Resolution Chart Schematic: added simple coord for resolution chart Tag: Visual edit

18:0418:04, 16 April 2025 diff hist −11‎ m Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) ‎No edit summary current

20:2920:29, 12 April 2025 diff hist +1,289‎ Edge Bead Removal via Photolithography for 4-inch Wafers ‎ updated for I-Line and DUV methods. current Tag: Visual edit
20:1520:15, 12 April 2025 diff hist +42‎ N File:Edge bead Removal on MA6 - IMG 5625 - placed on wafer.jpg ‎No edit summary current
20:1420:14, 12 April 2025 diff hist +41‎ N File:Edge bead Removal on MA6 - IMG 5626 - place on wafer.jpg ‎No edit summary current
20:1320:13, 12 April 2025 diff hist +44‎ N File:Edge bead Removal on MA6 - IMG 5624 - cassette location.jpg ‎No edit summary current
20:1220:12, 12 April 2025 diff hist +43‎ N File:Edge bead Removal on MA6 - IMG 5623 - vidmar drawers.jpg ‎No edit summary current
20:0620:06, 12 April 2025 diff hist +70‎ N ASML DUV: Edge Bead Removal via Photolithography ‎ John d moved page ASML DUV: Edge Bead Removal via Photolithography to Edge Bead Removal via Photolithography for 4-inch Wafers: make title generic to I-line and DUV PR's current Tag: New redirect
20:0620:06, 12 April 2025 diff hist 0‎ m Edge Bead Removal via Photolithography for 4-inch Wafers ‎ John d moved page ASML DUV: Edge Bead Removal via Photolithography to Edge Bead Removal via Photolithography for 4-inch Wafers: make title generic to I-line and DUV PR's
19:3719:37, 12 April 2025 diff hist 0‎ m ICP Etching Recipes ‎ →‎High Rate Bosch Etch (DSEIII) Tag: Visual edit
19:3419:34, 12 April 2025 diff hist −155‎ ICP Etching Recipes ‎ →‎PlasmaTherm/SLR Fluorine Etcher: smaller SEM images Tag: Visual edit
19:3119:31, 12 April 2025 diff hist 0‎ m ICP Etching Recipes ‎ →‎High Rate Bosch Etch (DSEIII): smaller images Tag: Visual edit
19:3019:30, 12 April 2025 diff hist 0‎ m ICP Etching Recipes ‎ →‎High Rate Bosch Etch (DSEIII): smaller images Tag: Visual edit
19:2719:27, 12 April 2025 diff hist 0‎ ICP Etching Recipes ‎ moved process control data to the bottom of each recipe section Tag: Visual edit: Switched
19:2019:20, 12 April 2025 diff hist −11‎ m Stepper 3 (ASML DUV) ‎ →‎Optical Proximity Correction (OPC): Going below the resolution limit Tag: Visual edit

17:5117:51, 8 April 2025 diff hist −6‎ m Stepper 3 (ASML DUV) ‎No edit summary Tag: Visual edit
17:5117:51, 8 April 2025 diff hist +25‎ Stepper 3 (ASML DUV) ‎ →‎General Capabilities/Overview: moved stepper tutorial to it's own subheading Tag: Visual edit

20:3020:30, 7 April 2025 diff hist +993‎ UCSB NanoFab Microscope Training ‎ →‎Bright/Dark Field Explanation: added example DF image, explanation image, and DIC example image current Tag: Visual edit
20:2720:27, 7 April 2025 diff hist +112‎ N File:Microscope DIC-Nomarski Example v1.jpg ‎No edit summary current
20:1520:15, 7 April 2025 diff hist +77‎ N File:Dark Field Microscopy - High Particle Count example 2025-03-25 W1 particle check Demis.jpg ‎No edit summary current
20:1020:10, 7 April 2025 diff hist +72‎ N File:Dark Field Microscopy explanation v1.jpg ‎No edit summary current
18:2818:28, 7 April 2025 diff hist +25‎ Maskless Aligner (Heidelberg MLA150) ‎ →‎Calibrate your own Litho process Tag: Visual edit

15:2415:24, 5 April 2025 diff hist 0‎ m Template:Announcements ‎No edit summary
15:2315:23, 5 April 2025 diff hist −101‎ Template:Announcements ‎ unaxis down, deleted power outage announcement

Retrieved from "https://wiki.nanofab.ucsb.edu/wiki/Special:Contributions/John_d"