ICP-PECVD (Unaxis VLR): Revision history

2 July 2020

• curprev 18:3618:36, 2 July 2020‎ Biljana talk contribs‎ 1,871 bytes +65‎ →‎Documentation Tag: Visual edit

22 April 2020

• curprev 22:5922:59, 22 April 2020‎ Biljana talk contribs‎ 1,806 bytes −6‎ →‎Documentation Tag: Visual edit
• curprev 20:2720:27, 22 April 2020‎ Biljana talk contribs‎ 1,812 bytes +11‎ →‎Documentation Tag: Visual edit
• curprev 18:3318:33, 22 April 2020‎ Biljana talk contribs‎ 1,801 bytes −13‎ →‎Documentation Tag: Visual edit
• curprev 18:3318:33, 22 April 2020‎ Biljana talk contribs‎ 1,814 bytes −131‎ →‎Documentation Tag: Visual edit

21 April 2020

• curprev 20:3920:39, 21 April 2020‎ Biljana talk contribs‎ 1,945 bytes +123‎ →‎Documentation: added link Tag: Visual edit

20 April 2020

• curprev 17:1117:11, 20 April 2020‎ Biljana talk contribs‎ 1,822 bytes +4‎ →‎Documentation Tag: Visual edit
• curprev 17:1117:11, 20 April 2020‎ Biljana talk contribs‎ 1,818 bytes +113‎ →‎Documentation: scan/coat Tag: Visual edit
• curprev 15:5715:57, 20 April 2020‎ Bosch t talk contribs‎ 1,705 bytes +1‎ →‎Detailed Specifications
• curprev 15:5615:56, 20 April 2020‎ Bosch t talk contribs‎ 1,704 bytes +2‎ →‎About
• curprev 15:1315:13, 20 April 2020‎ Biljana talk contribs‎ 1,702 bytes +4‎ →‎Documentation Tag: Visual edit
• curprev 15:1115:11, 20 April 2020‎ Biljana talk contribs‎ 1,698 bytes +5‎ →‎Documentation Tag: Visual edit
• curprev 15:0915:09, 20 April 2020‎ Biljana talk contribs‎ 1,693 bytes +28‎ →‎Documentation Tag: Visual edit

30 March 2020

• curprev 20:4720:47, 30 March 2020‎ Biljana talk contribs‎ 1,665 bytes −68‎ →‎Documentation Tag: Visual edit
• curprev 20:3720:37, 30 March 2020‎ Biljana talk contribs‎ 1,733 bytes +4‎ →‎Documentation Tag: Visual edit
• curprev 20:3520:35, 30 March 2020‎ Biljana talk contribs‎ 1,729 bytes +32‎ →‎Documentation Tag: Visual edit
• curprev 20:3320:33, 30 March 2020‎ Biljana talk contribs‎ 1,697 bytes +1‎ →‎Documentation
• curprev 20:3320:33, 30 March 2020‎ Biljana talk contribs‎ 1,696 bytes −1‎ →‎Documentation
• curprev 20:1220:12, 30 March 2020‎ Biljana talk contribs‎ 1,697 bytes −74‎ →‎Documentation Tag: Visual edit
• curprev 19:4919:49, 30 March 2020‎ Biljana talk contribs‎ 1,771 bytes +4‎ →‎Documentation Tag: Visual edit
• curprev 19:4819:48, 30 March 2020‎ Biljana talk contribs‎ 1,767 bytes −5‎ →‎Documentation Tag: Visual edit
• curprev 19:4619:46, 30 March 2020‎ Biljana talk contribs‎ 1,772 bytes +1‎ →‎Documentation: wafer coating Tag: Visual edit
• curprev 19:0819:08, 30 March 2020‎ Biljana talk contribs‎ 1,771 bytes +4‎ →‎Documentation Tag: Visual edit
• curprev 19:0419:04, 30 March 2020‎ Biljana talk contribs‎ 1,767 bytes −98‎ →‎Documentation Tag: Visual edit
• curprev 19:0119:01, 30 March 2020‎ Biljana talk contribs‎ 1,865 bytes +33‎ →‎Documentation: wafer coating Tag: Visual edit
• curprev 19:0019:00, 30 March 2020‎ Biljana talk contribs‎ 1,832 bytes +1‎ →‎Documentation
• curprev 17:5317:53, 30 March 2020‎ Biljana talk contribs‎ 1,831 bytes +276‎ link to Wafer Coating Process Traveler + Recipes page Tag: Visual edit
• curprev 17:4217:42, 30 March 2020‎ John d talk contribs‎ 1,555 bytes +6‎ →‎Documentation: fixed link

27 November 2019

• curprev 22:2622:26, 27 November 2019‎ John d talk contribs‎ m 1,549 bytes +12‎ →‎Cluster Configuration: bold Tag: Visual edit
• curprev 22:2422:24, 27 November 2019‎ John d talk contribs‎ m 1,537 bytes −32‎ →‎Cluster Configuration: formatting Tag: Visual edit
• curprev 22:2322:23, 27 November 2019‎ John d talk contribs‎ 1,569 bytes +368‎ added cluster configuration / link to each chamber's tool page Tag: Visual edit

27 March 2014

• curprev 19:2919:29, 27 March 2014‎ Bosch talk contribs‎ 1,201 bytes 0‎ →‎Documentation

25 March 2014

• curprev 23:4423:44, 25 March 2014‎ Bosch talk contribs‎ 1,201 bytes 0‎ →‎Documentation

21 March 2014

• curprev 23:4323:43, 21 March 2014‎ Bosch talk contribs‎ 1,201 bytes 0‎ →‎Documentation

18 March 2014

• curprev 20:2220:22, 18 March 2014‎ Bosch talk contribs‎ 1,201 bytes +6‎ →‎Documentation
• curprev 20:2020:20, 18 March 2014‎ Bosch talk contribs‎ 1,195 bytes +3‎ →‎About
• curprev 20:1920:19, 18 March 2014‎ Bosch talk contribs‎ 1,192 bytes +94‎ No edit summary

14 March 2014

• curprev 21:2621:26, 14 March 2014‎ Bosch talk contribs‎ 1,098 bytes +1‎ →‎About
• curprev 21:2421:24, 14 March 2014‎ Bosch talk contribs‎ 1,097 bytes −13‎ →‎Detailed Specifications

11 March 2014

• curprev 21:1221:12, 11 March 2014‎ Thibeault talk contribs‎ 1,110 bytes 0‎ →‎Detailed Specifications

17 August 2012

• curprev 15:1115:11, 17 August 2012‎ Zwarburg talk contribs‎ 1,110 bytes −128‎ →‎Documentation

14 August 2012

• curprev 16:0716:07, 14 August 2012‎ Biljana talk contribs‎ 1,238 bytes −43‎ →‎Documentation
• curprev 16:0716:07, 14 August 2012‎ Biljana talk contribs‎ 1,281 bytes +10‎ →‎Documentation
• curprev 16:0616:06, 14 August 2012‎ Biljana talk contribs‎ 1,271 bytes +47‎ →‎Documentation
• curprev 16:0516:05, 14 August 2012‎ Biljana talk contribs‎ 1,224 bytes +37‎ →‎Documentation

11 July 2012

• curprev 14:4814:48, 11 July 2012‎ Zwarburg talk contribs‎ m 1,187 bytes 0‎ moved Unaxis VLR ICP-PECVD to ICP-PECVD (Unaxis VLR)

10 July 2012

• curprev 20:2920:29, 10 July 2012‎ Zwarburg talk contribs‎ 1,187 bytes +11‎ No edit summary

3 July 2012

• curprev 00:2800:28, 3 July 2012‎ Zwarburg talk contribs‎ 1,176 bytes +2‎ No edit summary

28 June 2012

• curprev 14:5214:52, 28 June 2012‎ Zwarburg talk contribs‎ 1,174 bytes +77‎ No edit summary
• curprev 14:4914:49, 28 June 2012‎ Zwarburg talk contribs‎ 1,097 bytes +1,097‎ Created page with "{{tool|{{PAGENAME}} |picture=UnaxisVLR.jpg |type = Vacuum Deposition |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 1 |email=bosch@ece.ucsb.edu |description = High Den…"