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27 September 2024
14:56 | Upload log John d talk contribs uploaded a new version of File:Nanofabrication Facility Project Description.xlsx (Rev v2024-09-27 - unlocked PI Phone number.) |
12:20 | Template:Announcements diffhist +351 Mehalana v talk contribs |
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11:32 | Stepper Mask-Making Guidelines (Generic) 3 changes history +436 [John d (3×)] | |||
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11:32 (cur | prev) +166 John d talk contribs →Generic Stepper Mask Parameters Tag: Visual edit | ||||
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11:31 (cur | prev) +2 John d talk contribs →Generic Stepper Mask Parameters: added stepper mask sizes Tag: Visual edit | ||||
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11:30 (cur | prev) +268 John d talk contribs added stepper mask plate sizes. Tag: Visual edit |
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11:27 | Stepper 2 (AutoStep 200) 2 changes history +114 [John d (2×)] | |||
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11:27 (cur | prev) -1 John d talk contribs →Process Information: moved mask palte info to "detailed specs" Tag: Visual edit | ||||
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11:27 (cur | prev) +115 John d talk contribs →Detailed Specifications: added mask plate specs Tag: Visual edit |
11:27 | Stepper 1 (GCA 6300) diffhist +114 John d talk contribs →Detailed Specifications: added mask plate specs |
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10:15 | PECVD Recipes 10 changes history +651 [Biljana (10×)] | |||
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10:15 (cur | prev) -15 Biljana talk contribs →Standard Clean Recipe | ||||
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10:15 (cur | prev) -1 Biljana talk contribs →Standard Clean Recipe | ||||
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10:15 (cur | prev) +140 Biljana talk contribs →Standard Clean Recipe | ||||
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10:14 (cur | prev) -105 Biljana talk contribs →Standard Seasoning Procedure [ICP-PECVD] | ||||
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10:13 (cur | prev) +132 Biljana talk contribs →Standard Seasoning Procedure [ICP-PECVD] | ||||
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10:12 (cur | prev) +15 Biljana talk contribs →Standard Seasoning Procedure [ICP-PECVD] | ||||
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10:12 (cur | prev) +2 Biljana talk contribs →Standard Seasoning Procedure [ICP-PECVD] | ||||
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10:11 (cur | prev) +1 Biljana talk contribs →Low Stress Si3N4 [ICP-PECVD] | ||||
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10:11 (cur | prev) -1 Biljana talk contribs →Standard Seasoning Procedure [ICP-PECVD] | ||||
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10:10 (cur | prev) +483 Biljana talk contribs →ICP-PECVD (Unaxis VLR) |