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List of abbreviations:
- N
- This edit created a new page (also see list of new pages)
- m
- This is a minor edit
- b
- This edit was performed by a bot
- (±123)
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7 November 2024
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02:00 | Oxford ICP Etcher (PlasmaPro 100 Cobra) 2 changes history +1,453 [John d (2×)] | |||
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02:00 (cur | prev) +226 John d talk contribs (→Process Control Data) Tag: Visual edit: Switched | |||
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02:00 (cur | prev) +1,227 John d talk contribs (link to PC data) Tag: Visual edit: Switched | ||||
6 November 2024
| 21:51 | DSEIII (PlasmaTherm/Deep Silicon Etcher) diffhist +1,325 John d talk contribs (pasted NoahD's example SEM's) | ||||
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21:39 | Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) 4 changes history +50 [John d (4×)] | |||
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21:39 (cur | prev) +44 John d talk contribs (→Process Control Data) Tag: Visual edit | |||
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21:39 (cur | prev) +11 John d talk contribs (→Process Control Data) Tag: Visual edit | |||
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21:39 (cur | prev) −35 John d talk contribs (→Process Control Data: pasted PC images+links, cleaned up) Tag: Visual edit | ||||
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21:30 (cur | prev) +30 John d talk contribs (→Process Control Data: pasted PC images/links from PC page) | ||||
| 21:22 | ICP Etch 2 (Panasonic E626I) diffhist +366 John d talk contribs (→Recipes: added Process Control Header level 1 & images from PC page) | ||||
2 November 2024
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17:48 | SEM 1 (JEOL IT800SHL) 2 changes history +210 [John d (2×)] | |||
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17:48 (cur | prev) +15 John d talk contribs (→Operating Procedures) Tag: Visual edit | |||
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16:41 (cur | prev) +195 John d talk contribs (→Operating Procedures: link to reduced cahrging imaging modes page) Tag: Visual edit | ||||
31 October 2024
26 October 2024
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19:39 | Maskless Aligner (Heidelberg MLA150) 3 changes history +235 [John d (3×)] | |||
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19:39 (cur | prev) −16 John d talk contribs (→Recipes) Tag: Visual edit | |||
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19:36 (cur | prev) +112 John d talk contribs (→Documentation: link to new MLA150 FEM page) Tag: Visual edit | ||||
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19:35 (cur | prev) +139 John d talk contribs (→Recipes: link to FEM analysis section, mention "Series" for FEM) Tag: Visual edit | ||||
| 19:32 | Stepper 1 (GCA 6300) diffhist +723 John d talk contribs (added Recipes section with link to recipes, FEM analysis etc) | ||||
| 19:30 | Stepper 2 (AutoStep 200) diffhist +728 John d talk contribs (link to FEM analysis pages, Stepper 2 recipes page) | ||||
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19:26 | Stepper 3 (ASML DUV) 2 changes history +491 [John d (2×)] | |||
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19:26 (cur | prev) +339 John d talk contribs (→Recipes: added FEM analysis link) Tag: Visual edit | ||||
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18:42 (cur | prev) +152 John d talk contribs (→Operating Procedures: moved login issue to new page.) Tag: Visual edit | ||||
24 October 2024
| 23:32 | Surface Analysis (KLA/Tencor Surfscan) diffhist −17 John d talk contribs (fixed tool2 mfg) | ||||
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22:00 | Tube Furnace (Tystar 8300) 2 changes history −413 [John d (2×)] | |||
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22:00 (cur | prev) −632 John d talk contribs (→Recipes: moved recipes to Tystar Recipes page, linked to them here.) Tag: Visual edit | ||||
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18:39 (cur | prev) +219 John d talk contribs (→Recipes: updated temperature/time limits) Tag: Visual edit | ||||
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17:18 | Plasma Activation (EVG 810) 3 changes history +912 [John d (3×)] | |||
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17:18 (cur | prev) +363 John d talk contribs (→Examples: added more description of the example process) Tag: Visual edit | ||||
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17:15 (cur | prev) +411 John d talk contribs (added wafer bond example.) Tag: Visual edit | ||||
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16:34 (cur | prev) +138 John d talk contribs (note on "no PR") Tag: Visual edit | ||||
23 October 2024
| 18:22 | Ion Beam Deposition (Veeco NEXUS) diffhist +240 John d talk contribs (→Schematics/Examples: added example DBR spectrum) | ||||
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m 16:54 | Stepper 2 (AutoStep 200) 2 changes history −58 [John d (2×)] | |||
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16:54 (cur | prev) −59 John d talk contribs (→Video Training) Tag: Visual edit | |||
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16:53 (cur | prev) +1 John d talk contribs (→Video Training) Tag: Visual edit | |||
18 October 2024
| 18:58 | Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) diffhist +65 John d talk contribs (→Detailed Specifications: added chuck temp) | ||||