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Show new changes starting from 08:05, 28 September 2024
   
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27 September 2024

     14:56 Upload log John d talk contribs uploaded a new version of File:Nanofabrication Facility Project Description.xlsx ‎(Rev v2024-09-27 - unlocked PI Phone number.)
     12:20  Template:Announcements‎ diffhist +351‎ Mehalana v talk contribs
      12:07  Surface Analysis (KLA/Tencor Surfscan)‎‎ 24 changes history +149‎ [Biljana‎ (24×)]
     
12:07 (cur | prev) +2‎ Biljana talk contribs →‎Operating Procedures
     
12:07 (cur | prev) -3‎ Biljana talk contribs →‎Operating Procedures
     
12:06 (cur | prev) -29‎ Biljana talk contribs →‎Operating Procedures
     
12:06 (cur | prev) 0‎ Biljana talk contribs →‎Operating Procedures
     
12:05 (cur | prev) 0‎ Biljana talk contribs →‎Operating Procedures
     
12:05 (cur | prev) +70‎ Biljana talk contribs →‎Operating Procedures
     
12:04 (cur | prev) +150‎ Biljana talk contribs →‎Operating Procedures
     
11:46 (cur | prev) 0‎ Biljana talk contribs →‎Operating Procedures
     
11:45 (cur | prev) +28‎ Biljana talk contribs →‎Operating Procedures
     
11:43 (cur | prev) -150‎ Biljana talk contribs →‎Operating Procedures
     
11:43 (cur | prev) 0‎ Biljana talk contribs →‎Operating Procedures
     
11:43 (cur | prev) -13‎ Biljana talk contribs →‎Operating Procedures
     
11:42 (cur | prev) +1‎ Biljana talk contribs →‎Operating Procedures
     
11:41 (cur | prev) -2‎ Biljana talk contribs →‎Operating Procedures
     
11:41 (cur | prev) -103‎ Biljana talk contribs →‎Operating Procedures
     
11:39 (cur | prev) +74‎ Biljana talk contribs →‎Operating Procedures
     
11:38 (cur | prev) +5‎ Biljana talk contribs →‎Operating Procedures
     
11:38 (cur | prev) -49‎ Biljana talk contribs →‎Operating Procedures
     
11:37 (cur | prev) +146‎ Biljana talk contribs →‎Operating Procedures
     
11:34 (cur | prev) -11‎ Biljana talk contribs →‎Operating Procedures
     
11:33 (cur | prev) +11‎ Biljana talk contribs →‎Operating Procedures
     
11:32 (cur | prev) -211‎ Biljana talk contribs →‎Operating Procedures
     
11:32 (cur | prev) +212‎ Biljana talk contribs →‎Operating Procedures
     
11:27 (cur | prev) +21‎ Biljana talk contribs →‎Operating Procedures
     11:32  Stepper Mask-Making Guidelines (Generic)‎‎ 3 changes history +436‎ [John d‎ (3×)]
     
11:32 (cur | prev) +166‎ John d talk contribs →‎Generic Stepper Mask Parameters Tag: Visual edit
     
11:31 (cur | prev) +2‎ John d talk contribs →‎Generic Stepper Mask Parameters: added stepper mask sizes Tag: Visual edit
     
11:30 (cur | prev) +268‎ John d talk contribs added stepper mask plate sizes. Tag: Visual edit
     11:27  Stepper 2 (AutoStep 200)‎‎ 2 changes history +114‎ [John d‎ (2×)]
     
11:27 (cur | prev) -1‎ John d talk contribs →‎Process Information: moved mask palte info to "detailed specs" Tag: Visual edit
     
11:27 (cur | prev) +115‎ John d talk contribs →‎Detailed Specifications: added mask plate specs Tag: Visual edit
     11:27  Stepper 1 (GCA 6300)‎ diffhist +114‎ John d talk contribs →‎Detailed Specifications: added mask plate specs Tag: Visual edit
      10:15  PECVD Recipes‎‎ 15 changes history +711‎ [Biljana‎ (15×)]
     
10:15 (cur | prev) -15‎ Biljana talk contribs →‎Standard Clean Recipe
     
10:15 (cur | prev) -1‎ Biljana talk contribs →‎Standard Clean Recipe
     
10:15 (cur | prev) +140‎ Biljana talk contribs →‎Standard Clean Recipe
     
10:14 (cur | prev) -105‎ Biljana talk contribs →‎Standard Seasoning Procedure [ICP-PECVD]
     
10:13 (cur | prev) +132‎ Biljana talk contribs →‎Standard Seasoning Procedure [ICP-PECVD]
     
10:12 (cur | prev) +15‎ Biljana talk contribs →‎Standard Seasoning Procedure [ICP-PECVD]
     
10:12 (cur | prev) +2‎ Biljana talk contribs →‎Standard Seasoning Procedure [ICP-PECVD]
     
10:11 (cur | prev) +1‎ Biljana talk contribs →‎Low Stress Si3N4 [ICP-PECVD]
     
10:11 (cur | prev) -1‎ Biljana talk contribs →‎Standard Seasoning Procedure [ICP-PECVD]
     
10:10 (cur | prev) +483‎ Biljana talk contribs →‎ICP-PECVD (Unaxis VLR)
     
10:02 (cur | prev) +15‎ Biljana talk contribs →‎High Deposition Rate SiO2 [ICP-PECVD]
     
10:00 (cur | prev) +15‎ Biljana talk contribs →‎Low Deposition Rate SiO2 [ICP-PECVD]
     
09:53 (cur | prev) +20‎ Biljana talk contribs →‎Low Stress Si3N4 [ICP-PECVD]
     
09:50 (cur | prev) -219‎ Biljana talk contribs →‎Si3N4 [ICP-PECVD]: Updated recipe since August 2024 Tag: Visual edit
     
09:49 (cur | prev) +229‎ Biljana talk contribs →‎Si3N4 [ICP-PECVD]

26 September 2024

     14:54  Template:Announcements‎ diffhist -322‎ Mehalana v talk contribs →‎Focused Ion Beam (Raith Velion) - TOOL DOWN for Raith Service

25 September 2024

      15:03  Wet Benches‎‎ 2 changes history +220‎ [John d‎ (2×)]
     
15:03 (cur | prev) +198‎ John d talk contribs →‎Documentation: explained what is in this doc Tag: Visual edit
     
14:59 (cur | prev) +22‎ John d talk contribs →‎Documentation: expanded "SOP" acronym Tag: Visual edit
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