Recent changes
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Track the most recent changes to the wiki on this page.
List of abbreviations:
- N
- This edit created a new page (also see list of new pages)
- m
- This is a minor edit
- b
- This edit was performed by a bot
- (±123)
- The page size changed by this number of bytes
19 July 2024
15:08 | Dry Etching Recipes diffhist +664 Noahdutra talk contribs Added process ranking table |
12:33 | Stepper 3 (ASML DUV) diffhist +116 John d talk contribs →Design Tools: link to new Generic Stepper programming page. |
12:31 | Calculators + Utilities diffhist -31 John d talk contribs →Example CAD File: removed ASML links, replacesd with generic stepper links |
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12:22 | Stepper Mask-Making Guidelines (Generic) 3 changes history +1,178 [John d (3×)] | |||
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12:22 (cur | prev) +107 John d talk contribs made Figure link directly to tutorial | ||||
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12:20 (cur | prev) +450 John d talk contribs inserted image for Stepper Mask tutorial Tag: Visual edit: Switched | ||||
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12:11 (cur | prev) +621 John d talk contribs pasted example CD file and programming Tag: Visual edit |
12:16 | Upload log John d talk contribs uploaded File:Stepper Reticle Tutorial - Reticle Masking Schematic.png |
12:07 | Move log John d talk contribs moved page Stepper Mask-Making Guidelines to Stepper Mask-Making Guidelines (Generic) without leaving a redirect |
N 12:07 | Stepper Mask-Making Guidelines diffhist +3,553 John d talk contribs pasted generic Stepper programming info from various other pages. |
11:50 | Deletion log John d talk contribs deleted page File:ASML Mask Making Guidelines.pdf (unused, move to wiki page) |
18 July 2024
12:48 | Frequently Asked Questions diffhist +754 John d talk contribs →How do I get my files from the NanoFab computers?: added section info about folder names |
17 July 2024
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08:54 | (Upload log) [Sawyer l (2×)] | |||
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08:54 Sawyer l talk contribs uploaded a new version of File:ADT SOP Rev J.pdf | ||||
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08:53 Sawyer l talk contribs uploaded a new version of File:ADT SOP Rev J.pdf |
07:13 | Direct-Write Lithography Recipes diffhist +358 John d talk contribs →Greyscale Lithography (MLA150): moved SPR comments to own row, was squished into small column |
16 July 2024
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21:31 | Demis D. John 3 changes history -108 [John d (3×)] | |||
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21:31 (cur | prev) -85 John d talk contribs →Contact If...: deleted IT tasks Tag: Visual edit | ||||
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21:31 (cur | prev) +37 John d talk contribs →Tools: added wafer bonding fixture Tag: Visual edit | ||||
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21:30 (cur | prev) -60 John d talk contribs →Current Work: added tools holography, probe station, QFI Tag: Visual edit |
14:10 | User rights log John d talk contribs changed group membership for Noahdutra from (none) to staff |
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13:20 | (Upload log) [John d (3×)] | |||
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13:20 John d talk contribs uploaded a new version of File:ASML Cal Particle Check.png (higher resolution) | ||||
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13:17 John d talk contribs uploaded a new version of File:ASML Cal Particle Check.png (flipped wafers 180°, so Flat is Down like on software.) | ||||
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13:14 John d talk contribs uploaded File:ASML Cal Particle Check.png |
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13:18 | Stepper Recipes 2 changes history +1,271 [John d (2×)] | |||
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13:18 (cur | prev) +814 John d talk contribs →Process Control Data: added thumbnail images of the Cals | ||||
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13:16 (cur | prev) +457 John d talk contribs →Process Control Data: added particle check section and explanation/fig Tag: Visual edit |
15 July 2024
12:07 | Template:Announcements diffhist +374 Mehalana v talk contribs |
13 July 2024
08:14 | PECVD Recipes diffhist +962 John d talk contribs →ICP-PECVD (Unaxis VLR): added GapFill recipe |
12 July 2024
11 July 2024
13:35 | Lab Rules diffhist +89 John d talk contribs →Acid/Base and HF/TMAH/Bromine Processing: minor wording on HF TRIonic glove description to match shelf labeling |
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09:19 | Lithography Recipes 8 changes history +2,251 [John d; Gopimeena (7×)] | |||
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09:19 (cur | prev) 0 Gopimeena talk contribs →Recipes Table (S-Cubed Flexi): Reverted back to previous view Tag: Visual edit | ||||
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09:18 (cur | prev) -4 Gopimeena talk contribs →Recipes Table (S-Cubed Flexi): Cosmetics chages Tag: Visual edit | ||||
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09:14 (cur | prev) +1 Gopimeena talk contribs →Recipes Table (S-Cubed Flexi) Tag: Visual edit | ||||
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09:13 (cur | prev) -524 Gopimeena talk contribs →Recipes Table (S-Cubed Flexi) Tag: Visual edit | ||||
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09:10 (cur | prev) 0 Gopimeena talk contribs Fixed some mistakes Tag: Visual edit | ||||
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08:59 (cur | prev) +1,235 Gopimeena talk contribs Added all S-Cube recipes open for UCSB USER Tag: Visual edit | ||||
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08:47 (cur | prev) +126 John d talk contribs →Recipes Table (S-Cubed Flexi): minor update s- headings for dev/dry-etch BARC Tag: Visual edit | ||||
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08:33 (cur | prev) +1,417 Gopimeena talk contribs →Recipes Table (S-Cubed Flexi) Tag: Visual edit |
10 July 2024
23:15 | User creation log User account Evgeneia talk contribs was created |
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19:28 | Lithography Recipes 3 changes history +2,489 [Gopimeena; John d (2×)] | |||
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19:28 (cur | prev) +206 John d talk contribs →Recipes Table (S-Cubed Flexi): added rows between variations Tag: Visual edit | ||||
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19:02 (cur | prev) +826 John d talk contribs →Automated Coat/Develop System Recipes (S-Cubed Flexi): added "variations" info Tag: Visual edit | ||||
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17:24 (cur | prev) +1,457 Gopimeena talk contribs →Automated Coat/Develop System Recipes (S-Cubed Flexi) Tag: Visual edit |
16:25 | User rights log John d talk contribs changed group membership for Gopimeena from (none) to staff (new staff) |
9 July 2024
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11:33 | Sputtering Recipes 2 changes history +575 [John d (2×)] | |||
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11:33 (cur | prev) +238 John d talk contribs →SiO2 Uniformity: added table of stats Tag: Visual edit | ||||
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11:26 (cur | prev) +337 John d talk contribs →Ion Beam Deposition (Veeco NEXUS): Added plot of Sio2 uniformity Tag: Visual edit |
11:25 | Upload log John d talk contribs uploaded File:IBD - Deposition Uniformity across a 6-inch wafer 2010-06-15 v2.png |
8 July 2024
11:56 | E-Beam 3 (Temescal) diffhist -8 Barreraz talk contribs →Documentation |
11:55 | Upload log Barreraz talk contribs uploaded File:EB-3 operation instructions 7-8-24.pdf |
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10:24 | Template:Announcements 2 changes history +749 [Mehalana v (2×)] | |||
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10:24 (cur | prev) -384 Mehalana v talk contribs | ||||
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10:23 (cur | prev) +1,133 Mehalana v talk contribs |
1 July 2024
11:44 | User creation log User account French m talk contribs was created |