Tony Bosch: Difference between revisions
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*[[Deep UV Optical Microscope (Olympus)]] |
*[[Deep UV Optical Microscope (Olympus)]] |
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*[[Laser Scanning Confocal M-scope (Olympus LEXT)]] |
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]] |
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*[[Automated Coat/Develop System (S-Cubed Flexi)]] |
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*[[Coater Track (SCube)]] |
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*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]] |
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]] |
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*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)]] |
*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)]] |
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Revision as of 02:35, 28 October 2021
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About
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Tools
Tony Bosch is the supervisor for the following tools.