Tony Bosch: Difference between revisions
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*[[ICP Etch 2 (Panasonic E640)]] |
*[[ICP Etch 2 (Panasonic E640)]] |
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*[[Rodwell Tube Furnace]] |
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*[[Tube Furnace (Tystar 8300)]] |
*[[Tube Furnace (Tystar 8300)]] |
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*[[Tube Furnace AlGaAs Oxidation (Linberg)]] |
*[[Tube Furnace AlGaAs Oxidation (Linberg)]] |
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*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]] |
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]] |
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*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)]] |
*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)]] |
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*[[Lift-Off Station]] |
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* [[]] |
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Latest revision as of 16:53, 28 October 2021
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About
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Tools
Tony Bosch is the supervisor for the following tools.