Tutorials: Difference between revisions

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== Fabrication Tracking and Process Design ==
== Fabrication Tracking and Process Design ==
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== Mask Making Guidelines ==
== Mask Making Guidelines ==
''Info for mask/CAD layout for specific tools.''
''Info for mask/CAD layout for specific tools.''

==== General ====
* [[Photomask Ordering Procedure for UCSB Users]] - see this page for how to submit your order into the purchasing system.
* [[Photomask Ordering Procedure for UCSB Users]] - see this page for how to submit your order into the purchasing system.
* See [[Tutorials#CAD/Drawing Mask Plates|CAD tutorials above]] for layout tips and examples.


==== Steppers ====
* [[Stepper Mask-Making Guidelines (Generic)|'''Stepper Mask-Making Guidelines''']] - Info needed to design and order a reticle for our Stepper systems.
* '''[https://docs.google.com/document/d/1b9YT11RPsl-UlLvN74hrQvG01OcYDL16r6I5lPOlBEo/edit?usp=sharing ASML-specific Mask Making Guidelines (Private)]''' - More detailed info to design and order a reticle for this specific ASML system.
* [[Stepper Mask-Making Guidelines (Generic)|Stepper Mask-Making Guidelines]] - Info needed to design and order a reticle for our Stepper systems.
* [https://docs.google.com/document/d/1b9YT11RPsl-UlLvN74hrQvG01OcYDL16r6I5lPOlBEo/edit?usp=sharing ASML-specific Mask Making Guidelines (Private)] - More detailed info to design and order a reticle for this specific ASML system.
** ''Access is restricted to trained users only by ASML's requirement - please contact [[Demis D. John|tool supervisor]] for access.''
** ''Access is restricted to trained users only by ASML's requirement - please contact [[Demis D. John|tool supervisor]] for access.''


* [[Autostep 200 Mask Making Guidance]] - information on designing and ordering your photomasks for the GCA AutoStep 200.
* [[Autostep 200 Mask Making Guidance]] - information on designing and ordering your photomasks for the GCA AutoStep 200.
* [[GCA 6300 Mask Making Guidance]] (''Work in progress'') - GCA 6300 Stepper
* [[GCA 6300 Mask Making Guidance]] (''Work in progress'') - GCA 6300 Stepper

==== Contact Aligners ====
* [[Mask Making Guidelines for Contact Aligners|Mask Making Guidelines - Contact Masks]] - for the MJB-3 & MA6 Contact Aligners
* [[Mask Making Guidelines for Contact Aligners|Mask Making Guidelines - Contact Masks]] - for the MJB-3 & MA6 Contact Aligners

==== Direct-Write ====
* [[MLA150 - Design Guidelines]] - for the Heidelberg MLA150 Direct-Writer
* [[MLA150 - Design Guidelines]] - for the Heidelberg MLA150 Direct-Writer


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* [[Lithography Calibration - Analyzing a Focus-Exposure Matrix|Lithography Calibration - Analyzing a Focus-Exposure Matrix (FEM)]] - Projection litho systems (steppers, direct-writers) usually require a lithography calibration, using a Focus-Exposure Matrix/Array (FEM/FEA).
* [[Lithography Calibration - Analyzing a Focus-Exposure Matrix|Lithography Calibration - Analyzing a Focus-Exposure Matrix (FEM)]] - Projection litho systems (steppers, direct-writers) usually require a lithography calibration, using a Focus-Exposure Matrix/Array (FEM/FEA).
*{{fl|Liftoff-Techniques.pdf|Lift-Off Description/Tutorial}} - How it works, process limits and considerations for designing your process.
*{{fl|Liftoff-Techniques.pdf|Lift-Off Description/Tutorial}} - How it works, process limits and considerations for designing your process.

== General Fabrication ==

* [[Processing - How Do I…?]] ← This page attempts to list common solutions to fabrication issues our lab users often run into.

Latest revision as of 14:21, 18 July 2025

The following are various tutorials from our NanoFab Wiki, collected here for your convenience.

Fabrication Tracking and Process Design

Designing experiments, tracking your fabrication steps/process improvements, and keeping track of your results are key to achieving repeatable and improved results!

See this tutorial for example Travelers, Design of Experiments, and Manufacturing Execution Systems:

Examples of Trello + Google Drive for tracking fabrication jobs
Trello - Example Job Cards screenshot
Tracking to-do and completed tasks.
Google Drive - Example Job Folder screenshot
Example Job Folder on Google Drive with in-process traveler, microscope/SEM images, testing results etc.
Trello - example job card screenshot
Example job card for a fabrication run.

CAD/Drawing Mask Plates

Here are pages to help you design your devices in drawing programs, and make photomasks (aka. "masks" or "reticles") for various systems in our lab.
screenshot of KLayout view of Device_Layout
KLayout: example CAD file.

Microfabrication CAD drawings are simple 2D drawings with layers, even though they are intended to become 3D devices through the fabrication process. The fabrication is all top-down, hence only 2D patterning is used.

Stepper Mask Tutorials

Schematic of stepper blocking off adjacent Images on reticle and exposure onto different wafer locations.
Click for Stepper Reticle Tutorial Stepper Reticle Patterns (“images”) can optionally be much more sophisticated and flexible than contact plates.

Mask Making Guidelines

Info for mask/CAD layout for specific tools.

General

Steppers

Contact Aligners

Direct-Write

Lithography Tutorials

General Fabrication

  • Processing - How Do I…? ← This page attempts to list common solutions to fabrication issues our lab users often run into.