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- 09:42, 16 April 2023 diff hist 0 Template:News moved new SEM 1 week earlier
- 09:41, 16 April 2023 diff hist +601 Template:News New SEM and New Scribe+Break
- 20:11, 14 April 2023 diff hist +811 N Automated Wafer Cleaver (Loomis LSD-155LT) initial page Tag: Visual edit: Switched
- 20:06, 14 April 2023 diff hist +55 Tool List →Die Singulation / Down-sizing: link to new Loomis Wafer Cleaver page Tag: Visual edit
- 15:37, 4 April 2023 diff hist +64 Aidan Hopkins →Tools: fixed DSE & wafer bench links
- 15:35, 4 April 2023 diff hist 0 Aidan Hopkins →Tools: fixed wafer bonder link
- 15:35, 4 April 2023 diff hist +6 Aidan Hopkins →Tools: fixed SEM#2 link
- 15:33, 4 April 2023 diff hist +74 E-Beam Lithography Recipes changed SEM#1 link and Nabity title in prep for new SEM current
- 00:52, 3 April 2023 diff hist +323 MLA150 - CAD Files and Templates →Resolution and Calibration Patterns: details on CAD files available on MLA150 computer Tag: Visual edit
- 00:45, 3 April 2023 diff hist +488 Calculators + Utilities →CAD Files & Templates: Added Verniers link & linked to MEMs-exchange, EPFL, and Tag: Visual edit
- 10:32, 2 April 2023 diff hist +1,343 Calculators + Utilities →Example CAD File: links to various lithography system CAD files, vented fonts etc. Tag: Visual edit
- 10:07, 2 April 2023 diff hist +85 N File:Vented font DDJ.gds Vented Font - a font good for liftoff (no enclosed holes), GDS CAD file
- 13:10, 21 March 2023 diff hist +385 Wafer scanning process traveler →Wafers to Use: mention regular prime grade Tag: Visual edit
- 13:07, 21 March 2023 diff hist +21 m Wafer scanning process traveler Tag: Visual edit
- 13:07, 21 March 2023 diff hist +1,043 Wafer scanning process traveler →Data Recording: updated surfscan photos, added examples of before/after and high particle photos. Tag: Visual edit
- 13:03, 21 March 2023 diff hist +57 N File:Surfscan P1 SiN 221208Z5G4 after.jpg current
- 12:59, 21 March 2023 diff hist +37 N File:Surfscan G4 before example - P1 230317E7G4 before.jpg current
- 12:56, 21 March 2023 diff hist 0 File:UCSBTEST1.png John d uploaded a new version of File:UCSBTEST1.png current
- 12:55, 21 March 2023 diff hist 0 File:UCSBTEST2 .png John d uploaded a new version of File:UCSBTEST2 .png current
- 16:24, 20 March 2023 diff hist +122 Calculators + Utilities →KLayout: like to U. waterloo KLayout vids Tag: Visual edit
- 16:05, 20 March 2023 diff hist +1,728 N Oxford Etcher - Sample Size Effect on Etch Rate pasted from old Process Control Dataa: Oxford_ICP_Etcher_-_Process_Control_Data current Tag: Visual edit: Switched
- 16:05, 20 March 2023 diff hist +179 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher): link to Sample Size effect on ER Tag: Visual edit
- 16:02, 20 March 2023 diff hist +41 m Template:News link to all data
- 11:04, 20 March 2023 diff hist +3 Template:Announcements corected SEM #2 --> SEM#1
- 22:01, 18 March 2023 diff hist +27 N User:Mehalana v redirects to Vraj's correct staff page current Tags: New redirect Visual edit: Switched
- 10:27, 16 March 2023 diff hist -8 Stepper 3 (ASML DUV) →Operating Procedures: moved training procedure above Tag: Visual edit
- 12:22, 15 March 2023 diff hist +19 GCA 6300 Mask Making Guidance link to Autostep 200 mask page
- 12:21, 15 March 2023 diff hist +97 GCA 6300 Mask Making Guidance
- 12:16, 15 March 2023 diff hist 0 m Stepper 2 (AutoStep 200) →Process Information Tag: Visual edit
- 12:16, 15 March 2023 diff hist +25 m Stepper 2 (AutoStep 200) →Process Information Tag: Visual edit
- 12:15, 15 March 2023 diff hist +180 Stepper 2 (AutoStep 200) copied Mask making link to SOP section as well, minor formatting elsewhere. Tag: Visual edit
- 10:31, 15 March 2023 diff hist +2,035 Autostep 200 Mask Making Guidance addded Submission Details section Tag: Visual edit
- 16:23, 13 March 2023 diff hist 0 File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx John d uploaded a new version of File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx current
- 14:09, 10 March 2023 diff hist +643 Stepper Recipes →Stepper 3 (ASML DUV): added Process Control Data section
- 14:07, 10 March 2023 diff hist +45 m Process Group - Process Control Data Litho to Top of page, link to ASML recipes page
- 14:04, 10 March 2023 diff hist +738 Process Group - Process Control Data New Litho section + Stepper3 ASML section with links to process control data Tag: Visual edit: Switched
- 14:01, 10 March 2023 diff hist +1,321 Stepper 3 (ASML DUV) link to Process Control Data Tag: Visual edit
- 15:36, 5 March 2023 diff hist +114 XeF2 Etch (Xetch) Link to recipes oage Tag: Visual edit
- 00:17, 26 February 2023 diff hist +14 Template:Announcements →Flip-Chip Bonder repair
- 20:12, 25 February 2023 diff hist -16 Template:Announcements FCB update
- 10:17, 25 February 2023 diff hist +8 m Step Profilometer (DektakXT) added date of replacement Tag: Visual edit
- 16:00, 23 February 2023 diff hist +797 PECVD Recipes →ICP-PECVD (Unaxis VLR): cleaned up process control section, and added 800nm max SiO2 thickness before cleaning Tag: Visual edit
- 15:01, 21 February 2023 diff hist -51 Probe Station: I-V Curves with Keithley 2400 and Python Script anaconda inzstruction current Tag: Visual edit
- 09:53, 20 February 2023 diff hist +56 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher): linked to new google sheets data Tag: Visual edit
- 21:45, 16 February 2023 diff hist +37 Photolithography - Manual Edge-Bead Removal Techniques →Lithographic Edge Bead Removal: link to DUV FLood exposure Tag: Visual edit
- 21:43, 16 February 2023 diff hist +2 m Lithography Recipes fixed link Tag: Visual edit
- 21:42, 16 February 2023 diff hist +2 m Lithography Recipes remove TOC again
- 21:42, 16 February 2023 diff hist +36 Lithography Recipes →General Photolithography Techniques: made each section a linkable header level Tag: Visual edit
- 21:40, 16 February 2023 diff hist -2 m Lithography Recipes add TOC to get header link
- 12:36, 14 February 2023 diff hist +995 Frequently Asked Questions →General NanoFab Questions: added "what supplies do i need to bring?" Tag: Visual edit