Vacuum Deposition Recipes

Vacuum Deposition Recipes
	E-Beam Evaporation				Sputtering					Thermal Evaporation		Plasma Enhanced Chemical Vapor Deposition (PECVD)			Atomic Layer Deposition	Ion Beam Deposition (IBD)	Molecular Vapor Deposition
Material	E-Beam 1 (Sharon)	E-Beam 2 (Custom)	E-Beam 3 (Temescal)	E-Beam 4 (CHA)	Sputter 1 (Custom)	Sputter 2 (SFI Endeavor)	Sputter 3 (ATC 2000-F)	Sputter 4 (ATC 2200-V)	Sputter 5 (Lesker AXXIS)	Thermal Evap 1	Thermal Evap 2 (Solder)	PECVD 1 (PlasmaTherm 790)	PECVD 2 (Advanced Vacuum)	Unaxis VLR ICP-PECVD	Atomic Layer Deposition (Tool)	Ion Beam Deposition (Tool)	Molecular Vapor Deposition (Tool)
Ag
Al
Al2O3
AlN
Au
B
Co
Cr
Cu
Fe
Ge
Hf
HfO2
In
Ir
ITO
Mo
Nb
Ni
Pd
Pt
Ru
Si
SiN												R1	R1	R1		R1
SiO2												R1	R1	R1	R1	R1
SiOxNy
Sn
SrF2
Ta
Ta2O5																R1
Ti
TiN
TiO2															R1	R1
V
W
Zn
ZnO2
Zr
ZrO2
Material	E-Beam 1 (Sharon)	E-Beam 2 (Custom)	E-Beam 3 (Temescal)	E-Beam 4 (CHA)	Sputter 1 (Custom)	Sputter 2 (SFI Endeavor)	Sputter 3 (ATC 2000-F)	Sputter 4 (ATC 2200-V)	Sputter 5 (Lesker AXXIS)	Thermal Evap 1	Thermal Evap 2 (Solder)	PECVD 1 (PlasmaTherm 790)	PECVD 2 (Advanced Vacuum)	Unaxis VLR ICP-PECVD	Atomic Layer Deposition (Tool)	Ion Beam Deposition (Tool)	Molecular Vapor Deposition (Tool)