Main public logs

Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).

• 17:18, 31 March 2014 Biljana talk contribs uploaded File:Advanced PECVD-LS Nitride2 300C standard recipe.pdf
• 17:07, 31 March 2014 Biljana talk contribs uploaded File:RIE 3 Operationing instructions.pdf
• 17:03, 31 March 2014 Biljana talk contribs uploaded File:New Operating Instructions Ebeam.pdf
• 23:33, 27 March 2014 Biljana talk contribs uploaded File:Advanced PECVD LS NITRIDE2 March 2014.pdf
• 19:28, 27 March 2014 Bosch talk contribs uploaded File:Unaxis PM3 Web Operational Procedure 3-27-14.pdf (Updated SiO2 Rate Table)
• 23:43, 25 March 2014 Bosch talk contribs uploaded File:Unaxis PM3 Web Operational Procedure 3-25-14.pdf
• 23:52, 24 March 2014 Biljana talk contribs uploaded File:Advanced PECVD-Nitride2 300C standard recipe Nitride2 recipe.pdf
• 23:50, 24 March 2014 Biljana talk contribs uploaded a new version of File:Advanced PECVD-Nitride2 300C standard recipe.pdf
• 23:47, 24 March 2014 Biljana talk contribs uploaded File:ADV PECVD NITRIDE2-Data March 2014.pdf
• 23:39, 24 March 2014 Biljana talk contribs uploaded a new version of File:Advanced PECVD-Nitride2 300C standard recipe.pdf
• 23:37, 24 March 2014 Biljana talk contribs uploaded File:Advanced PECVD-Nitride2 300C standard recipe.pdf
• 22:32, 24 March 2014 Biljana talk contribs uploaded File:NEw Advanced PECVD OXIDE 300C standard recipe.pdf
• 21:57, 24 March 2014 Biljana talk contribs uploaded File:Advanced PECVD OXIDE 300C standard recipe.pdf
• 21:31, 24 March 2014 Biljana talk contribs uploaded File:ADV. PECVD OXIDE data-March 2014.pdf
• 19:00, 24 March 2014 Biljana talk contribs uploaded File:Operating Ebeam1-2.pdf
• 23:43, 21 March 2014 Bosch talk contribs uploaded File:Unaxis PM3 Web Operational Procedure 3-21-14.pdf
• 23:41, 21 March 2014 Bosch talk contribs deleted page File:Unaxis PM3 Web Operational Procedure 7-30-13.pdf (Deleted old revision 20140321233832!Unaxis_PM3_Web_Operational_Procedure_7-30-13.pdf: Newer Version Uploaded)
• 23:38, 21 March 2014 Bosch talk contribs uploaded a new version of File:Unaxis PM3 Web Operational Procedure 7-30-13.pdf
• 23:34, 21 March 2014 Biljana talk contribs uploaded File:PECVD1-SiO2-standard recipe 1000A.pdf
• 23:27, 21 March 2014 Thibeault talk contribs uploaded File:W-TiW-Sputtering-AJA-4-Data-Recipe-RevB.pdf
• 23:08, 21 March 2014 Thibeault talk contribs uploaded File:W-TiW-Sputtering-AJA-4-Data-Recipe-RevA.pdf
• 19:06, 21 March 2014 Biljana talk contribs uploaded File:PECVD1 SiO2 Data-March 2014 SiO2 Data.pdf
• 18:12, 21 March 2014 Thibeault talk contribs uploaded File:Argon-ion-beam-etching-ebeam1-procedure-data-revA.pdf
• 15:51, 21 March 2014 Biljana talk contribs uploaded File:ALD operating instructions-1.pdf
• 23:59, 20 March 2014 Biljana talk contribs uploaded File:PECVD1 SIN 2-pt Thickness uniformity March 2014.pdf
• 22:39, 20 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN-1000A Standard recipe.pdf
• 22:35, 20 March 2014 Biljana talk contribs uploaded File:PECVD1 SIN Data-March 2014 SIN data.pdf
• 21:12, 20 March 2014 Biljana talk contribs uploaded File:PECVD1 SIN Thickness and index uniformity March 2014.pdf
• 21:05, 20 March 2014 Biljana talk contribs uploaded File:PECVD1 SIN Thickness &index uniformity March 2014.pdf
• 21:02, 20 March 2014 Biljana talk contribs uploaded a new version of File:PECVD1 SIN 2-pt Thickness-index uniformity March 2014.pdf
• 20:59, 20 March 2014 Biljana talk contribs uploaded File:PECVD1 SIN 2-pt Thickness-index uniformity March 2014.pdf
• 20:46, 20 March 2014 Biljana talk contribs uploaded File:PECVD1 Operating Instructions.pdf
• 19:12, 20 March 2014 Biljana talk contribs uploaded File:New PECVD1 SIN Data-March 2014 SIN data.pdf
• 19:08, 20 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN-standard recipe 1000A.pdf
• 23:20, 19 March 2014 Biljana talk contribs uploaded File:SiO2 100% SiH4 HDR 50C.pdf
• 21:55, 19 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN Data-March 2014.pdf
• 21:43, 19 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN-standard recipe.pdf
• 22:36, 18 March 2014 Thibeault talk contribs uploaded File:Al-AFM-Variation-Deposition-Rate-Rev1.pdf
• 22:28, 18 March 2014 Ningcao talk contribs uploaded File:28-Very-low-pin-hole-density SiNx film at 300 C.pdf
• 22:17, 18 March 2014 Thibeault talk contribs uploaded File:Al-thickness-variation-with-rate.jpg
• 22:09, 18 March 2014 Ningcao talk contribs uploaded File:27-SiNx Film (Bias=50W) Sidewall Coverage.pdf
• 21:54, 18 March 2014 Thibeault talk contribs uploaded File:Vapor-Pressure-Chart-2.xlsx
• 21:52, 18 March 2014 Thibeault talk contribs uploaded a new version of File:Vapor-Pressure-Chart.xlsx
• 21:49, 18 March 2014 Thibeault talk contribs uploaded File:Vapor-Pressure-Chart.xlsx (alphabetical order)
• 21:48, 18 March 2014 Thibeault talk contribs deleted page File:Vapor-Pressure-Chart.xlsx
• 21:47, 18 March 2014 Thibeault talk contribs uploaded a new version of File:Vapor-Pressure-Chart.xlsx
• 21:45, 18 March 2014 Thibeault talk contribs deleted page File:Vapor-Pressure-Chart.xlsx (Deleted old revision 20140318214515!Vapor-Pressure-Chart.xlsx: Duplicated file)
• 21:45, 18 March 2014 Thibeault talk contribs uploaded a new version of File:Vapor-Pressure-Chart.xlsx
• 21:08, 18 March 2014 Bosch talk contribs uploaded File:Tystar Operational Procedure.pdf
• 21:03, 18 March 2014 Ningcao talk contribs uploaded File:23-Tungsten Sputtering Film-Sputter-4-Ar.pdf