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- 13:47, 17 October 2018 diff hist +707 N Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond pasted draft procedure
- 13:47, 17 October 2018 diff hist -513 Packaging Recipes moved logitech procedure to separate page. Tag: Visual edit
- 12:19, 17 October 2018 diff hist 0 m Editing Tutorials →Inserting images into a page: adjut recommended image height
- 12:18, 17 October 2018 diff hist +119 m Editing Tutorials →Inserting images into a page: moved floating image to end of sentence
- 12:15, 17 October 2018 diff hist +1,717 Editing Tutorials →Inserting images into a page: added instructions for inserting images Tag: Visual edit
- 11:33, 17 October 2018 diff hist +13 N File:MacOS - Happy Mac.png current
- 17:33, 16 October 2018 diff hist +48 Atomic Layer Deposition Recipes →Al O deposition (ALD CHAMBER 3): converted to regular subscripts, indented each recipe param Tag: Visual edit
- 14:40, 16 October 2018 diff hist +7 Template:Announcements lab closed thurs, deleted RIE5 SiCl4
- 14:39, 16 October 2018 diff hist -55 Template:Announcements updates to RIE5, PECVD1
- 09:15, 16 October 2018 diff hist +59 Dicing Saw (ADT) added sections for SOP, Detials Tag: Visual edit
- 09:14, 16 October 2018 diff hist +366 Wafer Bonder (Logitech WBS7) added link to recipes, short About statement. Tag: Visual edit
- 09:12, 16 October 2018 diff hist +893 Packaging Recipes added Logitech Wafer bonder section, initial draft of procedure for wax mounting Tag: Visual edit
- 09:03, 16 October 2018 diff hist +648 Tube Furnace AlGaAs Oxidation (Lindberg) added Description, and blanks secitons for Procedures/Recipes Tag: Visual edit
- 08:58, 16 October 2018 diff hist +287 Dicing Saw (ADT) linked to Dicing Recipes Tag: Visual edit
- 22:28, 15 October 2018 diff hist +1,228 N Packaging Recipes inital pages Tag: Visual edit
- 22:01, 15 October 2018 diff hist +36 MediaWiki:Sidebar added link to Packaging recipes
- 21:44, 15 October 2018 diff hist +228 m Ion Beam Deposition (Veeco NEXUS) →Detailed Specifications: red-link for calibration method Tag: Visual edit
- 21:41, 15 October 2018 diff hist +141 m Ion Beam Deposition (Veeco NEXUS) →Detailed Specifications: added TiN, Argon sample cleaning, nIR DBRs Tag: Visual edit
- 14:52, 15 October 2018 diff hist +2,102 Thermal Processing Recipes Updated thermal ox Recipe names, added Logitech Bonder, Finetech Bonder, Tystar AlGaAs, Lindberg AlGaAs basic info. Tag: Visual edit
- 10:48, 12 October 2018 diff hist +75 PECVD Recipes →PECVD 1 (PlasmaTherm 790): note about software upgrade Tag: Visual edit
- 23:25, 10 October 2018 diff hist -24 m Step Profilometer (KLA Tencor P-7) deleted erroneous "email" field from {tool} template
- 23:24, 10 October 2018 diff hist -2 Template:Tool update Brian Linng's email
- 23:19, 10 October 2018 diff hist +89 Probe Station & Curve Tracer →Equipment Specifications: included Windows PC & scripting environments Tag: Visual edit
- 23:18, 10 October 2018 diff hist +217 Probe Station & Curve Tracer →Equipment Specifications: deleted HP ParamAnalyzer Tag: Visual edit
- 23:16, 10 October 2018 diff hist -62 Tool List →Topographical Metrology: removed Rudolph Ellips & old Dektak Tag: Visual edit
- 23:13, 10 October 2018 diff hist +459 Filmetrics F40-UV Microscope-Mounted added capabilities section Tag: Visual edit
- 23:06, 10 October 2018 diff hist +161 Ellipsometer (Rudolph) note that tool has been removed current
- 13:51, 5 October 2018 diff hist +72 m ASML 5500: Recovering from an Error minor wording Tag: Visual edit
- 08:34, 5 October 2018 diff hist +1,259 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration moved some procedures onto this one common page Tag: Visual edit
- 08:33, 5 October 2018 diff hist -348 Stepper 3 (ASML DUV) →Troubleshooting and Recovery: removed uneeded links Tag: Visual edit
- 08:03, 5 October 2018 diff hist +184 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration link to wafer recovery page Tag: Visual edit
- 08:00, 5 October 2018 diff hist -62 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Error, Calibration, Error logging Procedures for Users: deleted heading Tag: Visual edit
- 07:56, 5 October 2018 diff hist +433 ASML 5500: Recovering from an Error added instruciton to hit Help button Tag: Visual edit
- 15:29, 1 October 2018 diff hist +26 DSEIII (PlasmaTherm/Deep Silicon Etcher) →Recipes: fixed recipes link Tag: Visual edit
- 15:28, 1 October 2018 diff hist +46 m Dry Etching Recipes fixed SLR link Tag: Visual edit
- 18:22, 28 September 2018 diff hist -6 m Stepper Recipes →DS-K101: clarify how to reduce undercut. Tag: Visual edit
- 18:22, 28 September 2018 diff hist +264 Stepper Recipes →Anti-Reflective Coatings: link to DUV42P etch recipes, also set to individual subheadings Tag: Visual edit
- 18:13, 28 September 2018 diff hist +182 Dry Etching Recipes linked PR&ARC etchign to ICP1 & RIE5 sections Tag: Visual edit
- 18:12, 28 September 2018 diff hist +208 RIE Etching Recipes →RIE 5 (PlasmaTherm): added Photoressit & ARC etching, copied from DUV Litho recipes page Tag: Visual edit
- 18:08, 28 September 2018 diff hist +2 m ICP Etching Recipes →Photoresist & ARC Etching: changed name to no ampersand, mathcing ICP2 title Tag: Visual edit
- 18:07, 28 September 2018 diff hist +281 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): linked to ICP#2 PR/ARC etching recipe Tag: Visual edit
- 16:34, 26 September 2018 diff hist +170 CAIBE (Oxford Ion Mill) link to CAIBE recipes Tag: Visual edit
- 16:32, 26 September 2018 diff hist +29 Dry Etching Recipes fixed CAIBE recipe link Tag: Visual edit
- 22:35, 23 September 2018 diff hist +6 m Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): Si XTAL orientaiton Tag: Visual edit
- 22:33, 23 September 2018 diff hist +214 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): added KOH/Si Tag: Visual edit
- 22:27, 23 September 2018 diff hist +1 m Wet Etching Recipes →Example Wet Etching Table: minor text update Tag: Visual edit
- 22:20, 23 September 2018 diff hist +905 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): Added IBD BHF etch rates Tag: Visual edit
- 22:13, 23 September 2018 diff hist +719 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): added PECVD#1+2 Si3N4 Tag: Visual edit
- 22:03, 23 September 2018 diff hist +78 m Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): "Buffered HF" → "HF ("Buffered HF Improved", Transene)" for sortability Tag: Visual edit
- 21:54, 23 September 2018 diff hist +52 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): pointed out sorting, changed developers to start with "Developer" for sorting ease. Tag: Visual edit